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TriScroll 300 Inverter Vacuum Pump
Table of Contents
Declaration of Conformity
Warranty ...................................................................viii
Warranty Replacement and Adjustment..............viii
Instructions for Use ..................................................... 1
General Information ................................................. 1
Storage ................................................................. 1
Unpacking and Inspection........................................ 1
Installation Requirements ......................................... 2
Safety ................................................................... 2
Operation................................................................. 4
Startup Procedure ................................................. 4
Shutdown Procedure ............................................ 4
Maintenance ............................................................ 4
Technical Information ................................................. 5
Pump Electrical Controller........................................ 8
Technical Specifications ....................................... 9
Serial Interface Specification RS485 and RS232.. 10
Gas Ballast ............................................................. 12
Bearing Purge......................................................... 12
Purge Kit ................................................................ 12
Isolation Valve Kit .................................................. 12
CT-100 Speed Control Kit....................................... 14
VPI and CT100 Speed Control Kit........................... 15
Exhaust Silencer Kit ................................................ 16
Vibration Isolation Kit............................................. 16
HEPA Inlet filter...................................................... 16
Troubleshooting ..................................................... 17
Maintenance .......................................................... 18
General Information ........................................... 18
Related TriScroll Manuals................................... 18
Maintenance and Tooling Kits ............................ 19
Factory Service Options...................................... 20
Accessories......................................................... 20
Contacting Agilent.............................................. 20
