Agilent Technologies 5517B, User Manual

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viii Agilent 5517B/BL/C/D/DL/FL User’s Guide
Contents
Vibration isolation
28
Magnetic shielding
28
Mounting plane tolerance
29
Mounting and clearance
29
Powering Up the Laser Head
30
4 Performance Tests
Introduction
32
Recommended Test Equipment
32
Performance Tests
33
Laser power output test
33
Split frequency test
35
Wavelength test
36
Performance Test Record
37
5 Adjustments
Introduction
40
Safety Considerations
40
Recommended Test Equipment
41
Laser Head Adjustments
41
Equipment needed
41
Preheat setting
42
Adjustment Test Record
49
6 Using the Laser Head in a System
Introduction
52
A one-axis example is used for simplicity
52
Basic steps apply to all laser systems
52
Agilent laser interferometer positioning systems at a glance
52
All Agilent laser systems share a similar configuration
53
A controller is required for all laser positioning systems
54
Setting Up the System Electronics
54
Install the laser electronics board in the PC
54
Connect the electronics cables
54
Power up the laser head
55