Overview
PRO560LM Hardware Manual
1.3. Basic Specifications
N O T E :
Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3:
PRO560LM Series Specifications (-0400 to -1000)
PRO560LM
-0300
-0400
-0500
-0600
Travel
300 mm
400 mm
500 mm
600 mm
Accuracy
(1)
Standard
±10 μm
±12 μm
±14 μm
±15.5 μm
Calibrated
±1 μm
±1 μm
±1 μm
±1 μm
Resolution (Minimum Incremental
Motion)
5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability
(1)
±0.4 μm
±0.4 μm
±0.4 μm
±0.4 μm
Horizontal Straightness
(1)
±3 μm
±4 μm
±5 μm
±6 μm
Vertical Straightness
(1)
±3 μm
±4 μm
±5 μm
±6 μm
Pitch
49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
Roll
39 μrad
(8.0 arc sec)
44 μrad
(9.1 arc sec)
53 μrad
(10.9 arc sec)
58 μrad
(12.0 arc sec)
Yaw
49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
Maximum Speed
(2)
2 m/s
Maximum Acceleration
(2)
3 g
Maximum Force, Continuous
532.4 N – Standard
792.6 N – With Air Cooling (20 psig)
Load Capacity
(3)
Horizontal
150 kg
Side
150 kg
Moving Mass
25.0 kg
Stage Mass
90.4 kg
99.5 kg
108.6 kg
117.7 kg
Material
Anodized Aluminum
Mean Time Between Failure
20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
14
Chapter 1
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