Overview
PRO560LM Hardware Manual
PRO560LM Linear Motor Stage
Cable Management (Required)
-CMS0
No external CMS, motor/feedback connector bracket on carriage
-CMS1
External CMS for single axis
-CMS2
External CMS for lower-axis of two-axis PRO (XY) assembly
-CMS3
External CMS for lower-axis of two-axis (XZ or XT) assembly
-CMS6
External CMS for lower-axis of three-axis (XYZ or XYT) assembly
-CMS7
External CMS for lower-axis of three-axis (XZT) assembly
-CMS9
External CMS for lower-axis of four-axis (XYZT) assembly
Lifting Hardware (Optional)
-LF
Lifting hardware
NOTE:
Lifting option available on all travels.
ThermoComp™ (Optional)
-TCMP
ThermoComp™ integrated thermal compensation, single or lower axis
NOTE
: An A3200 controller must be used with the -TCMP option
Metrology (Required)
-PL0
No metrology performance plots
-PL1
Uncalibrated with performance plots
-PL2
Calibrated with performance plots
Accessories (To be Ordered as a Separate Line Item)
ALIGN-NPA
Non-precision XY assembly
ALIGN-NPAZ
Non-precision XZ or YZ assembly
ALIGN-PA10
XY assembly; 10 arc sec orthogonality. Alignment to within 7 µm orthogonality for
short travel stages
ALIGN-PA10Z
XZ or YZ assembly with L-bracket; 10 arc sec orthogonality. Alignment to within 10
µm orthogonality for short travel stages
ALIGN-PA5
XY assembly; 5 arc sec orthogonality. Alignment to within 3 µm orthogonality for
short travel stages.
ALIGN-PA5Z
XZ or YZ assembly with L-bracket; 5 arc sec orthogonality. Alignment to within 5
µm orthogonality for short travel stages.
12
Chapter 1
www.aerotech.com
