Aerotech ANT95L Series, Hardware Manual

Page: 3 / 44

Table of Contents
ANT95L Series Single-Axis Linear Direct-Drive Nanopositioning Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 12
1.2. Accuracy and Temperature Effects 12
1.3. Basic Specifications 13
1.4. Vacuum Operation 14
Chapter 2: Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 16
2.3. Securing the Stage to the Mounting Surface 20
2.4. Attaching the Payload to the Stage 22
Chapter 3: Electrical Installation 25
3.1. Motor and Feedback Connectors 26
3.2. Motor and Feedback Wiring 28
3.3. Motor and Feedback Specifications 29
3.4. Limits, Marker, and Machine Direction 31
3.5. Motor and Feedback Phasing 32
Chapter 4: Maintenance 35
4.1. Service and Inspection Schedule 35
4.2. Cleaning and Lubrication 36
4.3. Troubleshooting 38
Appendix A: Warranty and Field Service 39
Appendix B: Revision History 41
Index 43
ANT95L Hardware Manual Table of Contents
www.aerotech.com 3