ANT95V-3 Hardware Manual
Mechanical Specifications and Installation
2.4. Securing the Stage to the Mounting Surface
W A R N I N G : Do not attempt to manually move the ANT95V-3 if it is connected to a power
source.
W A R N I N G : The ANT95V-3 must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
D A N G E R : If you remove the cover of the stage, high magnetic fields at the ends of the
magnet tracks will be exposed. Keep metal objects away from the ends of the magnet tracks.
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the ANT95V-3 stage. When it is mounted to a non-flat surface, the stage can be distorted
as the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the
mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E :
To maintain accuracy, the mounting surface must be flat to within 5 µm over the entire stage
footprint.
N O T E :
The ANT95V-3 is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ANT95V-3. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
There is a gap between the through holes in the cover and the mounting holes that can make inserting the
mounting screws challenging. The hex tool that was provided has a retention mechanism that is designed to
hold the screw during stage mounting. You should always use this hex tool when mounting the stage to
prevent damage to exposed components below the cover.
N O T E :
Covers should not be removed unless absolutely necessary.
If you must remove the cover, be extremely careful to not damage any of the exposed components, including
cables when you reinstall the cable cover and the limit boards near the mounting holes. Do not touch or mark
the flexures. Any bends, dings, or scratches could cause the flexures to fail prematurely. Do not leave
covers off longer than necessary.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in
are typical values and may not be accurate for your
mounting surface. Refer to
for specific model mounting locations and dimensions.
Table 2-1:
Stage to Mounting Surface Hardware
Mounting Hardware
Typical Screw Torque
M4 by 12 mm [#8 by 3/8 in] SHCS
2.3 N·m
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Chapter 2
17
