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ANT95V-3 Hardware Manual

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Summary of Contents for ANT130V-5

Page 1: ...Revision 1 02 00 ANT95V 3 Hardware Manual ...

Page 2: ...rvice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 81 0 43 306 3773 Email service aerotechkk co jp Germany China Phone 49 0 911 967 9370 Fax 49 0 911 967 93720 Email service aerotechgmbh de Phone 86 21 3319 7715 Email service aerotech com France Taiwan ...

Page 3: ...ing and Handling the Stage 13 2 2 Flexure Handling 14 2 3 Dimensions 15 2 4 Securing the Stage to the Mounting Surface 17 2 5 Attaching the Payload to the Stage 19 Chapter 3 Electrical Specifications and Installation 21 3 1 Motor and Feedback Connectors 22 3 2 Motor and Feedback Wiring 24 3 3 Motor and Feedback Specifications 25 3 4 Limits Marker and Machine Direction 27 3 5 Motor and Feedback Pha...

Page 4: ... 15 Figure 2 3 ANT95V 3 Mounting Plate MP Dimensions 16 Figure 2 4 Mounting Hole Pattern 18 Figure 3 1 Motor and Feedback Wiring 24 Figure 3 2 Machine Direction 27 Figure 3 3 Hall Phasing 28 Figure 3 4 Analog Encoder Phasing Reference Diagram 29 Figure 3 5 Encoder Phasing Reference Diagram Standard 29 4 www aerotech com ...

Page 5: ...9 Table 1 2 Environmental Specifications 10 Table 1 3 ANT95V 3 Series Specifications 11 Table 2 1 Stage to Mounting Surface Hardware 17 Table 3 1 Motor and Feedback Pinouts 23 Table 3 2 Feedback Specifications 25 Table 3 3 Motor Specifications 26 Table 3 4 Encoder Specifications 26 www aerotech com 5 ...

Page 6: ...ty requirements 5 Operator safeguarding requirements must be addressed during final integration of the product W A R N I N G To minimize the possibility of electrical shock bodily injury or death the following precautions must be followed 1 Moving parts can cause crushing or shearing injuries Access to all stage and motor parts must be restricted while connected to a power source 2 Cables can pose...

Page 7: ...urther more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration This is to certify t...

Page 8: ...Table of Contents ANT95V 3 Hardware Manual 8 www aerotech com This page intentionally left blank ...

Page 9: ...rations are for reference only and were complete and accurate as of this manual s release Refer to www aerotech com for the most up to date information Table 1 1 ANT95V 3 Model Numbering System ANT Series Vertical Travel Stage Mounting Plate Optional MP Mounting plate Performance Grade Required PL1 Base performance PL2 High accuracy performance PLUS www aerotech com Chapter 1 9 ...

Page 10: ...racy and Temperature Effects Aerotech products are designed for and built in a 20 C 68 F environment Extreme temperature changes could cause a decrease in performance or permanent damage to the ANT95V 3 At a minimum the environmental temperature must be controlled to within 0 25ºC per 24 hours to ensure the ANT95V 3 specifications are repeatable over an extended period of time The severity of temp...

Page 11: ...itch 1 20 arc sec Roll 1 10 arc sec Yaw 1 10 arc sec Maximum Speed 75 mm s 3 in s Maximum Acceleration No Load 0 4 g 4 m s2 Settling Time See Figure In Position Stability 2 1 nm Maximum Force Continuous 71 N Load Capacity 3 1 5 kg 3 3 lb Moving Mass 1 1 kg 2 42 lb Stage Mass 20 kg 4 4 lb Material Aluminum and Stainless Steel Body Black Hardcoat Finish Black Anodize Finish Mean Time Between Failure...

Page 12: ...loves to prevent any contaminants from adhering to the surface of the ANT95V 3 3 During installation use cleaned vented stainless steel fasteners when securing the ANT95V 3 4 Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vacuum compatible lubricants could result in excessive motor operating temperatures Because of this consider all continuous to...

Page 13: ...e shipping container Gently set the ANT95V 3 on a smooth flat and clean surface Before operating the ANT95V 3 it is important to let it stabilize at room temperature for at least 12 hours Allowing it to stabilize to room temperature will ensure that all of the alignments preloads and tolerances are the same as they were when tested at Aerotech Use compressed nitrogen or clean dry oil less air to r...

Page 14: ... to provide smooth repeatable motion for the entire life of the stage They are made of thin steel however and can fail if they are mishandled Do not remove the cover from the stage unless it is absolutely necessary When the cover is off take care not to bend nick ding or mar the flexures in any way Never handle the stage by the flexures or flexure mounting supports If a flexure appears damaged con...

Page 15: ...ANT95V 3 Hardware Manual Mechanical Specifications and Installation 2 3 Dimensions Figure 2 2 ANT95V 3 Dimensions www aerotech com Chapter 2 15 ...

Page 16: ...Mechanical Specifications and Installation ANT95V 3 Hardware Manual Figure 2 3 ANT95V 3 Mounting Plate MP Dimensions 16 Chapter 2 www aerotech com ...

Page 17: ...ined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the mounting surface rather than the ANT95V 3 Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system There is a gap between the through holes in the cover and the mounting h...

Page 18: ...Mechanical Specifications and Installation ANT95V 3 Hardware Manual Figure 2 4 Mounting Hole Pattern 18 Chapter 2 www aerotech com ...

Page 19: ...e stage table and the entire stage should be centered on the support structure N OTE If your ANT95V 3 was purchased with Aerotech controls it might have been tuned with a representative payload based on the information provided at the time of order If the ANT95V 3 is started up without a payload the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can...

Page 20: ...Mechanical Specifications and Installation ANT95V 3 Hardware Manual 20 Chapter 2 www aerotech com This page intentionally left blank ...

Page 21: ...f system level integration was purchased an electrical drawing showing system interconnects has been supplied with the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the following sections for standard motor wiring and connector pin assignments D A N G E R Remove power before connecting or disconnecting electrical com...

Page 22: ...tem Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration of this stage into the final application D A N G E R Remove power before connecting or disconnecting electrical components or cables Failure to do so may cause electric shock W A R N I N G The protective ground connection must be properly installed t...

Page 23: ...8 Hall Effect sensor phase A 9 Hall Effect sensor phase C 10 Frame ground 11 Motor ØA 12 Motor ØB 13 Motor ØC 14 Cosine 15 Sine 16 Marker 17 5 V supply input for feedback devices 18 Reserved 19 Positive CW hardware limit 20 Reserved 21 Hall Effect sensor phase B 22 Frame ground 23 Motor ØA 24 Motor ØB 25 Motor ØC Case Signal shield connection to case Mating Connector Aerotech P N Third Party P N B...

Page 24: ...eedback Wiring All motor and controller manufacturers have their own designations for motor ØA ØB ØC and Hall signals A B C refer to for motor phasing Shielded cables are required for the motor and feedback connections Figure 3 1 Motor and Feedback Wiring 24 Chapter 3 www aerotech com ...

Page 25: ... ground Limit Switch Specifications Supply Voltage Generated by the encoder Supply Current Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Polarity Normally Closed NC l Sinks current to ground Logic 0 when not in limit l High impedance Logic 1 when in limit l Requires external pull up to 5 V 10 kΩ recommended Normally Open NO l Sinks current to ground Logic 0 when...

Page 26: ...ted ambient temperatures 8 All Aerotech amplifiers are rated Apk use force constant in N m Apk when sizing 9 Bus voltages above 80 VDC require the 4DU 25DU stage output cable option The encoder in the ANT95V 3 has a 20 µm fundamental resolution The encoder reads the horizontally driven wedge motion not the vertical tabletop motion This increases the fundamental resolution seen at the tabletop The ...

Page 27: ...back and motor signals and is dictated by the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while machine direction is hardwired in the stage Figure 3 2 shows the machine direction of ANT95V 3 stages Figure 3 2 Machi...

Page 28: ...pecifications and Installation ANT95V 3 Hardware Manual 3 5 Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 3 Hall Phasing 28 Chapter 3 www aerotech com ...

Page 29: ...NT95V 3 Hardware Manual Electrical Specifications and Installation Figure 3 4 Analog Encoder Phasing Reference Diagram Figure 3 5 Encoder Phasing Reference Diagram Standard www aerotech com Chapter 3 29 ...

Page 30: ...Electrical Specifications and Installation ANT95V 3 Hardware Manual 30 Chapter 3 www aerotech com This page intentionally left blank ...

Page 31: ...le speed and environment In general stages operating in a clean environment should be cleaned and lubricated annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris the stage should be cleaned every six months For high speed applications those near max speed at a duty cycle of 50 frequent maintenance with standard lubricants is required Month...

Page 32: ...he ANT95V 3 blow away small particles and dust with nitrogen or less preferably clean dry compressed air Any external metal surface of the ANT95V 3 can be cleaned with isopropyl alcohol on a lint free cloth W A R N I N G Make sure that all solvent has completely evaporated before attempting to move the stage Lubrication If the application process uses only a small portion of travel for most of the...

Page 33: ...polarity and compatibility requirements Example voltage requirements l Controller trap or fault refer to controller documentation Stage moves uncontrollably l Encoder sine and cosine signal connections refer to Chapter 3 and Controller documentation l Motor Connections refer to Chapter 3 and Controller documentation Stage oscillates or squeals l Gains misadjusted refer to the controller documentat...

Page 34: ...Maintenance ANT95V 3 Hardware Manual 34 Chapter 4 www aerotech com This page intentionally left blank ...

Page 35: ... such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerotech com Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than thir...

Page 36: ...ms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site Field Service Representative in a rea...

Page 37: ...duct update l Safety information updated l General revision 1 01 00 l Added Declaration of Incorporation l Added Environmental Specifications section l Added safety information and warnings l Added note about current requirements of motor and ground wires 1 00 00 New Manual www aerotech com Appendix B 37 ...

Page 38: ...Revision History ANT95V 3 Hardware Manual 38 Appendix B www aerotech com This page intentionally left blank ...

Page 39: ...11 inspect 31 inspection schedule 31 isopropyl alcohol 32 L label 13 Limit Switch Specifications 25 Load Capacity 11 lubricants vacuum operation 12 Lubrication 32 lubrication schedule 31 M Material 11 Maximum Acceleration 11 Maximum Force 11 Maximum Speed 11 Mean Time Between Failure 11 mechanical resolution 26 mounting surface 17 Moving Mass 11 multiaxis combinations 32 O orthogonality 32 P part ...

Page 40: ...ing 17 Shipping Clamps 13 solvents 32 Speed 11 stabilize 13 stage distortion 17 Stage Mass 11 Straightness 11 Support 2 T Technical Support 2 V vacuum 12 vacuum guidelines 12 Vibration 10 W Warranty and Field Service 35 Y Yaw 11 40 Index www aerotech com ...

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