GB 01717 - Edition 06 - Nov 12
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ATH 2300 M/MT - Turbopumps
Welcome
Dear Customer,
You have just purchased
an adixen Magnetically
turbopump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from adixen Vacuum
Products many years of
experience in the field of
turbopump design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
Applications:
S
EMICONDUCTOR
APPLICATIONS
:
Plasma etching, Ion implantation,
Sputtering, Plasma deposition.
O
THERS
A
PPLICATIONS
:
Electron microscopes, Surface analysis,
Research and development, High energy physics, Space simulation,
Accelerators.
Advantages:
High throughput - Quiet and clean vacuum - Corrosion proof -
High MTBF - Minimum size, volume and weight - Smart and
compact electronic controller - Reliability - Maintenance free -
Battery free - Easy integration.
This operating instruction manual includes only the instructions to connect
the pump to the equipment. Refer to the controller operating instructions
to power and use the pump (chapter B, C and D).
This pumping component is designed to generate vacuum by pumping on
gases, but no liquids neither solids. It is dedicated for running in industrial
environments.
The integrator of this component must provide all operator safety measures
mainly against hot surfaces.
This pumping component must not operate in an area with risk of explosion.
Consult us to study a solution.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
