2.2 E
1
2
3
4
5
Electrodes
1.
Main elec
Connects
measure
sample us
2.
Guard ele
Connects
ducing th
Connects
come a h
and this e
3.
Opposed
Connects
become a
and this e
Connects
ducing th
flowing in
4.
Dial
Used to m
to the ele
5.
Dial Gaug
Used to m
s
ctrode
with the IN
insulation re
sed, allowing
ectrode
with the LO
he measureme
with the HI
high-voltage
electrode.
electrode
with the H
a high-voltag
electrode.
with the LO
he measurem
n a sample.
move up and
ctrodes to m
ge
measure the t
Figur
NPUT A and
esistance, an
g the sample
O of the V S
ent error by
I of the V SO
application
HI of the V S
ge application
O of the V S
ment error b
d down the m
make a sample
thickness of
12702A/B
re 2-2 Elec
B connector
nd pressure t
to be fixed f
SOURCE ter
canceling cu
OURCE term
electrode. V
SOURCE ter
n electrode. V
SOURCE ter
y canceling
main electrod
e and the ele
a sample nec
B Resistivity
trodes
rs on the fron
to be applied
firmly.
rminal in vol
urrent flowin
minal in surfa
Voltage is app
rminal in vo
Voltage is ap
rminal in sur
current for
de and the gu
ctrodes stick
cessary for v
y Chamber
nt panel. Thi
d can be var
lume resistiv
g on the surf
ace resistivity
plied betwee
olume resisti
pplied betwee
rface resistiv
volume res
uard electrod
k fast to each
volume resist
Operation M
2
.2 E
is electrode i
ried accordin
vity measure
face of a sam
y measureme
en the main
ivity measur
en the main
vity measure
istivity mea
de and apply
h other.
tivity calcula
2-3
Manual
Electrodes
is used to
ng to the
ment, re-
mple.
ent to be-
electrode
rement to
electrode
ment, re-
asurement
y pressure
ation.
