3 Product and Functional Description | 3.2 Main Components
ZEISS
3.2.5.3 InLens SE Detector
Purpose
The InLens SE detector is a high-efficiency detector for high resolution SE imaging and detects
secondary electrons directly in the beam path. The very high detection efficiency of this detector
results from its geometric position in the beam path and from the combination with the electro-
static/electromagnetic lens.
Position
The annular shaped in-column detector is located above the objective lens.
1
2
3
4
5
6
7
8
11
9
10
12
Fig. 16: InLens
1
Primary electron (PE) beam
2
Filtering grid
3
Beam booster
4
Magnetic lens
5
6
Secondary electron paths
7
Specimen
8
InLens SE detector
9
Scan coils
10
Electrostatic lens
11
12
Interaction volume
Function
The primary electrons
1
are accelerated by the acceleration voltage at the anode and, up to
an acceleration voltage of 20 kV, by an additional beam booster
3
voltage of 8 kV at the liner
tube. To ensure that the electrons reach the specimen surface
7
with the energy set as accel-
eration voltage, an opposing electrostatic field of the same magnitude as the beam booster volt-
age (8 kV) is generated at the end of the objective lens by the electrostatic lens
10
.
This electrostatic field acts as acceleration field for the SEs generated on the specimen surface.
The secondary electrons are absorbed, re-accelerated, and focused through the electromagnetic
field to the InLens SE detector
8
.
At the InLens SE detector, the electrons hit a scintillator. This generates a flash of light that is led
out of the beam path and onto a photomultiplier by means of a lightguide. The photomultiplier
converts the light information into an electronic signal, which can be displayed on the monitor.
The interaction between the primary electron beam and the specimen generates a large number
of SEs.
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006