ZEISS
9 Technical Data and Conformity | 9.3 Installation Requirements
9.3.1 Layout and Connections
A
B
C
D
E
F
1
2
3
4
G
1
Static vibration damper
A
Mains power supply 208...230 V,
max. 16 A
2
Pre-vacuum pump
Equipotential bonding bar, afety
earth
3
Plinth and column
Vacuum exhaust
4
Computer workplace
Chilled water supply
Dry compressed air
Dry nitrogen supply
Additional standard local mains
power sockets, max. 13 A
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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