OPERATION IN EXPERT MODE
LSM 510
DuoScan
Carl Zeiss
Display and Analysis of Images
LSM 510 META
DuoScan
4-300
B 45-0021 e
03/06
The
Topography
toolbar contains the following function elements:
Channels
buttons
The selection of a channel to be used.
Generate
buttons
The selection of the mode of calculation of the topography image
(maximum, center of gravity, First /Last)
Threshold
buttons
The selection of thresholds (intensity, height, Auto Z) to be used.
Filter
buttons
The definition of filter procedures (geometrical, frequency cut-off filters) for
smoothing, separation of roughness or waviness.
Geometry
buttons
Inversion, various fit procedures, hole filling.
Display
buttons
2D (Intensity, Height, Gradient); Iso-Lines (z Map, Intensity, Black)
3D (Profiles, Grid, Filled, Shaded).
Measure
buttons
Diagrams (Profile, z Distribution, Bearing area ratio plot, Slope distribution);
Roughness parameters ; Volume parameters.
4.13.24.1 Channel
Selection
•
Select the channel to be viewed using the relevant button (e. g.:
Ch1
).
4.13.24.2 Generate Topography
The three buttons provided in the
Generate
button bar allow you to generate the topography in
different ways:
Maximum
•
Click on the
Maximum
button to calculate the topography surface by finding the maximum intensity
value. If the optical section with the highest intensity value is found, the intensity values of both
neighboring slices are also taken into account, so that a 3 point maximum fit is calculated.
•
In case it happens, that the maximum possible intensity value is present in more than one optical slice
for a given pixel (saturation), the mid section of all saturated intensity slices is chosen as a reasonable
approach.
Center
•
Click on the
Center
button to calculate the topography surface by using the center of gravity of all
summed up intensities of the stack for a given xy print.
This mode provides better result for smooth surfaces of low intensity or nearly transparent
surfaces. The receiver gain and offset has to be properly tuned and MarkFirst- MarkLast-
positions of the stack should be located approximately in the same distance from the real
surface.
Содержание LSM 510
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