Zeiss GeminiSEM Series, Инструкция по эксплуатации

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ZEISS 3 Product and Functional Description | 3.2 Main Components
Position The specimen stage is mounted on the chamber door. If the chamber door is closed, the speci-
men stage is inside of the specimen chamber.
1
2
Fig. 21: Specimen stage with dovetail fitting for precise fitting
1 Specimen holder 2 Specimen stage
Function
The stage can be operated using the Dual Joystick [
}
45] or using the SmartSEM software.
Axis Description Movement
X X-axis Movement towards or away from the cham-
ber door (horizontal movement in the image)
Y Y-axis Movement
Z Height Vertical movement (movement towards or
away from the focal plane of the image)
R Rotation Stage rotation parallel to the X-Y plane
T Tilt Stage tilt about an axis parallel to the X axis
3.2.9 Dual Joystick
Purpose The dual joystick is used for stage control and specimen navigation.
Position The dual joystick is placed on the microscope desk.
2 3 1
Fig. 22: Dual joystick
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 45