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ZEISS
7 Troubleshooting | 7.3 Column
7.3.1.2 Starting the Bakeout
Info
You cannot work with the microscope while the bakeout procedure runs.
NOTICE
Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4
Do not place any combustible objects on the grids of the electron optical column during
bakeout.
4
After the bakeout procedure, let surfaces cool down before working around the column.
4
Only advanced operators are allowed to perform the bakeout procedure.
Prerequisite
ü
Requires the
Supervisor
privilege and the user level
Service
ü
Only advanced operators are allowed to perform the bakeout procedure
Procedure
1. In the
Panel Configuration Bar
, double-click
Bakeout
.
à
The
Bakeout
dialog is displayed.
2. If the
Full service bakeout
checkbox is available, deactivate the
Full service bakeout
checkbox.
INFO:
Full service bakeout includes column heating that may lead to column misalignment.
3. From the
Bakeout
drop-down list, select a bakeout cycle.
For 2 hours heating / 1.5 hours cooling, select
Quick
.
For 8 hours heating / 1.5 hours cooling, select
Overnight
.
For 43 hours heating / 7 hours cooling, select
Weekend
.
For a cycle defined by the operator, select
User
.
4. To start the bakeout procedure, click
Bakeout Start
.
7.3.2 Calibrating the Probe Current
This function enables you to automatically calibrate the probe currents within a few minutes.
Calibrating the probe current can be necessary in the following cases:
§
Before performing analytical applications (e.g. EDX, WDX)
§
After changing the extractor voltage
§
To improve the accuracy of the set probe current values
Parts and Tools
Designation
Part no.
Faraday cup
348342-8055-000
Prerequisite
ü
The microscope has a Gemini 2 column
Procedure
1. Load the Faraday cup into the specimen chamber. Refer to
2. Pump the specimen chamber.
3. Switch on the electron beam. Refer to
4. Set a magnification that allows transmission of the complete electron beam into the cavity
of the Faraday cup through the aperture orifice.
5. In the
Panel Configuration Bar
, double-click
Probe Current Calibration
.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
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