6 Operation | 6.2 Obtaining a First Image
ZEISS
6.2.5 Switching on the EHT
Purpose
When you switch on the EHT, the gun starts emitting electrons.
Prerequisite
ü
The chamber and the gun head have been evacuated.
ü
The gun has been switched on.
1. In the Crossbeam SEM Control panel, select the Control tab.
2. Double-click the EHT Target readout.
à
The EHT Target window is displayed.
3. In the input field, enter
10
and click OK.
4. In the right part of the
Status Bar
, click
.
à
The pop-up menu for vacuum, gun, and EHT activation is displayed.
5. Click EHT On.
à
à
In the right part of the
Status Bar
, the vacuum, gun, and EHT status buttons merge to
.
6.2.6 Acquiring an Image
Purpose
Info
The following procedure describes the best way to quickly obtain an image without the con-
trol panel. You can also use the control panel to adjust aperture alignment, magnification/fo-
cus and brightness/contrast.
Overview
The procedure contains the following steps:
§
Selecting the Column Mode and Probe Current [
§
§
§
§
Setting a Long Working Distance [
§
Adjusting Brightness and Contrast [
§
Visualizing Details on the Specimen Surface [
6.2.6.1 Selecting the Column Mode and Probe Current
1. In the Crossbeam SEM Control panel, select the
Control
tab.
2. In the
Column
section, click
Normal
.
à
The column mode is set to
Normal
.
3. In the
Beam
section, double-click the
I Probe
readout.
à
The
I Probe
window is displayed.
4. In the input field, enter
300
.
à
The probe current is set to 300 pA.
6.2.6.2 Selecting the SE Detector
1. In the Crossbeam SEM Control panel, select the Imaging tab.
74
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
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