PK=aÉëÅêáéíáçå
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
ÉåMOE`loF
=PN=çÑ=NPQ
mêáåÅáéäÉ=çÑ=çéÉê~íáçå
VP mode
14 Needle valve
15 Pirani gauge
16 Bypass
In VP mode, pre-vacuum pump (
13
) evacuates directly the specimen chamber. RBV (
7
) opens
connection between pre-vacuum pump and specimen chamber. The TIV (
10
) is closed so that the
turbo pump (
6
) is separated from the specimen chamber. The turbo pump evacuates the lower
part of the column via bypass (
16
). The needle valve (
14
) supplies nitrogen to the specimen cham-
ber.
In the VP Control window of the SmartSEM
®
user interface, the pressure required in the specimen
chamber can then be set between:
•
10 - 133 Pa with In-lens SE detector configuration (i.e. 0.02 - 1.33 mbar)
•
10 - 60 Pa with In-lens Duo detector configuration
The pressure in the specimen chamber is measured by the Pirani gauge (
15
).
As long as the detected pressure in the specimen chamber is not ready for operation, the column
chamber valve (
4
) is closed in order to separate the specimen chamber from the column.
Switching to
VP mode
Switching from HV mode to VP mode is initialised by pressing the
Go To VP
key in the VP Control
window. The acceleration voltage decreases to zero, the TIV closes and the RBV opens. The
pressure required in the specimen chamber can then be set in the
VP target
field. When the cham-
ber vacuum has reached the selected pressure, the message
Chamber Status = At VP
appears.
Fig. 3.6: Schematics of the vacuum sys-
tem (VP mode)
Содержание Crossbeam 340
Страница 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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Страница 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
Страница 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Страница 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Страница 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
Страница 133: ......