PM=çÑ=NPQ
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
ÉåMOE`loF
PK=aÉëÅêáéíáçå
mêáåÅáéäÉ=çÑ=çéÉê~íáçå
For operation of the FESEM, gun head, column and specimen chamber have to be evacuated.
The vacuum is essential to operate the gun and to prevent collision of electrons with gas mole-
cules.
HV mode
1
Gun with filament
2
Gun head
3
Multihole aperture
4
Column chamber valve
5
Vent valve, flanged to TIV
6
Turbo pump
7
Roughing backing valve (RBV)
8
Ion getter pump (IGP)
9
Specimen chamber
10 Turbo isolation valve (TIV)
11 Penning gauge
12 Vent valve
13 Pre-vacuum pump
In HV mode, pre-vacuum pump (
13
) and turbo pump (
6
) evacuate the specimen chamber. The
roughing backing valve (RBV) (
7
) has opened the connection between pre-vacuum pump and tur-
bo pump. The turbo isolation valve (TIV) (
10
) is open.
The vacuum in the specimen chamber is measured by a Penning gauge (
11
). The detected
vacuum values are shown as ’System vacuum’ in the SmartSEM
®
user interface.
As long as the detected pressure in the specimen chamber is not ready for operation, the column
chamber valve (
4
) is closed in order to separate the specimen chamber from the column.
Fig. 3.5: Schematics of the vacuum system
(HV mode)
Содержание Crossbeam 340
Страница 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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Страница 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
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Страница 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Страница 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
Страница 133: ......