PK=aÉëÅêáéíáçå
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
ÉåMOE`loF
=OR=çÑ=NPQ
tçêâëí~íáçå
3. Description
3.1. Workstation
The basic workstation of Crossbeam 340 consists of a field emission scanning electron micro-
scope with GEMINI
®
column and FIB column.
1
Electron optical GEMINI
®
column
6
80-mm airlock (optional)
2
Ion Getter Pumps (IGPs) for FIB
7
Monitors (2nd monitor optional)
3
FIB column (optional)
8
Dual joystick
4
Gas Injection System (MultiGIS, optional)
9
Control panel (optional)
5
Specimen chamber with door handle
Plinth with ON/OFF/Standby buttons and optional EMO box are not shown.
Fig. 3.1: View of Crossbeam 340
Содержание Crossbeam 340
Страница 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
Страница 24: ...OQ çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF OK p ÑÉíó p ÑÉíó ÉèìáéãÉåí ...
Страница 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...
Страница 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Страница 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...
Страница 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
Страница 133: ......