Zeiss AURIGA Compact Crossbeam, Инструкция по эксплуатации

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6.6.6. Adjusting a FIB probe current at high kV (30 kV)
6.6.6.1. Overview
The FIB probe current is defined by emission current, condenser voltage and aperture diameter.
Canion FIB
Table 6.1: Canion FIB: FIB probe currents and aperture numbering
IMPORTANT
The probe current of 50 pA is used as reference for the Canion FIB column. The other probe
currents are dependent on this reference.
If you change the reference values, all other probe currents will be changed as well.
IMPORTANT
Depending on special customer requirements, size and numbering of the apertures may be
slightly different.
You can see that you have selected the reference probe current when the message „You cannot
delete the reference probe entry.“ is displayed in the
FIB Probe Table .
Range FIB probe currents Aperture diameter Aperture No.
Low probe currents 1, 2, 5 pA 10 µm 1
5, 10, 20 pA 20 µm 2
20, 50 , 100, 200 pA 50 µm 3
200, 500 pA
1 nA 100 µm 4
High probe currents 1, 2, 5 nA 200 µm 5
5, 10, 20 nA 400 µm 6
50 nA 700 µm 7