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Instruction Manual

Carl Zeiss Microscopy - Electron and Ion Beam Microscopy

4QBSD

Pneumatically driven detector for

field emission scanning electron microscopes

Содержание 4QBSD

Страница 1: ...Instruction Manual Carl Zeiss Microscopy Electron and Ion Beam Microscopy 4QBSD Pneumatically driven detector for field emission scanning electron microscopes...

Страница 2: ...n or retrieval system Violations will be prosecuted The use of general descriptive names registered names trademarks etc in this document does not imply even in the absence of a specific statement tha...

Страница 3: ...5 3 3 2 Specification 15 3 4 System requirements 15 3 5 Customer service 16 4 Installation 16 5 Operation 17 5 1 Preparing the work with the 4QBSD 17 5 2 Obtaining an image 23 5 2 1 Inserting the 4QBS...

Страница 4: ...stage coordinates 34 5 4 2 Recalling stage coordinates 35 5 5 Finishing the work with the 4QBSD 36 6 Maintenance and repair 39 6 1 Resetting touch alarm 39 6 2 Lubricating the rod 40 6 3 Troubleshoot...

Страница 5: ...tructions in this manual are classified as follows DANGER This safety symbol and signal word indicates an imminently hazardous situation Disregarding this warning WILL result in death or serious injur...

Страница 6: ...yboard Click on the High voltage icon Select Aperture size from the drop down list Icons buttons menus and panels are printed in bold Select Aperture size 30 m Set FIB Fil V Target to zero Values to b...

Страница 7: ...series ULTRA series NVision 40 AURIGA series MERLIN The 4QBSD is used to detect backscattered electrons that have been scattered under very low angles The 4QBSD is suitable to produce high quality ma...

Страница 8: ...manual and the entire user documentation delivered with the FESEM You will find the user documentation in the FESEM document folder CAUTION Risk of property damage due to improper maintenance service...

Страница 9: ...s being inserted CAUTION TEM oil 300 may be irritating to skin and eyes Avoid contact with skin Wear suitable gloves In case of contact with the eyes rinse immediately with plenty of water and seek me...

Страница 10: ...vement CAUTION Danger of damaging the 4QBSD The Z axis of the stage moves with delay Before recalling a stage position ensure that you haven t changed the Z position of the stage in between CAUTION Da...

Страница 11: ...f j Qn_pa MP NN QS OK p 2 3 3 STOP button In order to avoid property damage the 4QBSD can be stopped at any position Therefore a STOP button is integrated in the BSD Control panel...

Страница 12: ...O QS f j Qn_pa MP PK a 3 Description 3 1 Overview Fig 1 1 Components of the 4QBSD 1 Adjustment knob for X axis 4 Rod 2 Adjustment knob for Z axis 5 Electronic box 3 Adjustment knob for Y axis 3 5 1 2...

Страница 13: ...f j Qn_pa MP NP QS PK a 3 1 1 Detector head Fig 1 2 Views of the detector head 1 Detector head 2 Bottom view on diodes 4 quadrants 2 1...

Страница 14: ...s and hits the specimen 2 BSEs 3 are released from the specimen BSEs are detected by the diodes four quadrants 4 and generate an electrical signal The operation of the 4QBSD is controlled via the BSD...

Страница 15: ...n the image Thus backscattered electrons can be used to detect contrast between areas with different chemical compositions Fig 1 4 Material contrast Surface topography BSD TOPO Highlights changes of t...

Страница 16: ...D COMPO selects composition imaging BSD TOPO selects surface topography BSD Set TOPO saves the current segment configuration as a new TOPO mode At the top the diode polarity is displayed The diodes ca...

Страница 17: ...ion 5 03 or higher Workstation 4QBSD ZEISS part no SUPRA series ULTRA series NVision 40 AURIGA 4QBSD 347806 9055 000 SUPRA 60 ULTRA 60 AURIGA 60 4QBSD long version 347606 9055 000 MERLIN 4QBSD Pneumat...

Страница 18: ...r Wolfgang Sold ZEISS AG 73447 Oberkochen Germany phone 49 0 7364 202951 e mail sold zeiss de IMPORTANT To maintain best possible performance of the FESEM it is essential to perform preventive mainten...

Страница 19: ...defined macros which impede the safe stage movement 5 1 Preparing the work with the 4QBSD Before working with the 4QBSD the detector has to be adjusted 1 Go to the Detectors tab in the SEM Control pa...

Страница 20: ...l panel opens CAUTION Danger of bruising The 4QBSD is driven pneumatically Do not put your hand in the travel while the 4QBSD is being inserted 5 Click on BSD in The stage lowers to leave enough free...

Страница 21: ...f j Qn_pa MP ON QS RK l IMPORTANT Imaging results are best when the 4QBSD is centered The 4QBSD should not be visible in the InLens SE2 image...

Страница 22: ...heck that the 4QBSD is not visible in the InLens SE2 image If the 4QBSD is visible in the Inlens SE2 image a Adjust the position of the 4QBSD with the adjustment knobs so that the 4QBSD is longer visi...

Страница 23: ...f j Qn_pa MP OP QS RK l 7 Go to the Detectors tab in the SEM Control panel 8 Select 4QBSD from the drop down menu SmartSEM switches to the 4QBSD 9 Check the image quality...

Страница 24: ...the stigmator values shown at the bottom of the screen with inserted 4QBSD and retracted 4QBSD If the stigmator values vary widely between retracted and inserted state or exceed 30 a Readjust the posi...

Страница 25: ...ol 2 The BSD Control panel opens CAUTION Danger of bruising The 4QBSD is driven pneumatically Do not put your hand in the travel while the 4QBSD is being inserted 3 To move the 4QBSD into the specimen...

Страница 26: ...ect 4QBSD from the drop down menu 6 The software switches to the 4QBSD image 5 2 2 Selecting a BSD mode Preconditions The 4QBSD is inserted Procedure 1 Select an operation mode with the buttons a BSD...

Страница 27: ...mages The human brain expects an object to be illumi nated from the top of the presented image Specimens may appear inverted when illuminated from below This illumination can be controlled with the po...

Страница 28: ...d a feature on the specimen surface If the checkbox BSD Fast Scan is ticked the 4QBSD generates images faster 1 Switch to the 4QBSD image 2 Tick the checkbox BSD Fast Scan The 4QBSD scans at a higher...

Страница 29: ...uto Range option ticked the gain range is adjusted automatically for every BSD mode depending on brightness and contrast Four gain ranges are available in the menu low medium high very high Procedure...

Страница 30: ...NT Due to the manual selection of the gain ranges more user defined adjustments are possible 1 Select BSD Gain Low from the drop down menu 2 Adjust brightness and contrast 3 If the result is not satis...

Страница 31: ...may deteriorate the image quality This can occur when working at low scan speeds 10 or lower IMPORTANT Setting the BSD bandwidth especially helps improving the image quality in low scan speeds If you...

Страница 32: ...s brightness and contrast consistent to the specimen image 1 Go to the Detectors tab in the SEM Control panel 2 Select brightness 53 with the slider 3 Go to the Scanning tab 4 Tick the Spot checkbox S...

Страница 33: ...f j Qn_pa MP PP QS RK l 6 In the BSD Control panel click on BSD Auto Level 7 Untick the Spot checkbox in the SEM Control panel Scanning tab The 4QBSD automatically adapts brightness and contrast...

Страница 34: ...OPO mode IMPORTANT Saving the setting is not needed in COMPO mode because all segments are automatically set to Procedure 1 Make the desired segment adjustments 2 Click on BSD Set TOPO The adjustments...

Страница 35: ...be stopped at any position Therefore a STOP button is integrated in the BSD Control panel If you notice that the 4QBSD has to be stopped because it is going to hit components within the specimen cham...

Страница 36: ...ible to store a list of customised stage positions togeth er with magnification and working distance Thus you can recall these positions easily Requires the licence STAGECO 5 4 1 Saving and editing st...

Страница 37: ...el opens a Set the desired parameters b Click on OK 5 To delete a stage position mark the position and click on Del 5 4 2 Recalling stage coordinates 1 To move the stage to a stored position a Select...

Страница 38: ...damaging the 4QBSD when moving the specimen stage Retract the 4QBSD when you have finished 4QBS imaging Macros may influence the movement of the stage Do not start user defined macros which impede th...

Страница 39: ...to TV mode CAUTION Danger of bruising The 4QBSD is driven pneumatically Do not put your hand in the travel while the 4QBSD is being inserted 3 In the BSD Control panel click on BSD out The stage is mo...

Страница 40: ...QM QS f j Qn_pa MP RK l The position of the 4QBSD is displayed as BSD Position Out...

Страница 41: ...form work on the electrical system of the FESEM 6 1 Resetting touch alarm When the 4QBSD touches the stage an audible warning and an on screen message appear 1 Click on OK to accept the warning A warn...

Страница 42: ...eyes Vapours may cause drowsiness and dizziness Keep away from sources of ignition No smoking In case of contact with the eyes rinse immediately with plenty of water and seek medical advice Avoid con...

Страница 43: ...ted STEM is inserted Gas injection system GIS is inserted Safe 4QBSD is invalid Initialise the stage Retract the Charge Compensator Retract the STEM Retract the GIS Call your local ZEISS service repre...

Страница 44: ...our quadrant backscattered electron detector BSD Backscattered electron detector BSE Backscattered electron CC Charge Compensator COMPO Detects compositional contrast Detection of contrast between are...

Страница 45: ...ctor head of the 4QBSD 11 Diode status 14 E Electronic box 4QBSD 10 F Fine 15 Finishing the work with the 4QBSD 34 G Gain range 28 H Hazards not related to personal injury 8 Hazards related to persona...

Страница 46: ...dge Cambridgeshire CB1 3JS UK microscopy zeiss com Carl Zeiss Microscopy LLC One Zeiss Drive Thornwood NY 10594 USA microscopy zeiss com Plus a worldwide network of distributors www zeiss com microsco...

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