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4. Operation Method
Shortcut function (optional connector)
Optional connector:
Connectors used for sample sensor, chamber temp. measurement sensor and pressure gauge
optionally purchased.
Before using
Operate this product according to the procedure described in this Operation Manual.
Failure to follow the operation procedure described herein may result in a problem. The
guarantee will not apply if you operate the product in the wrong manner.
Caution
1. Turn off the breaker before connecting.
2. Before connecting, confirm that both the chamber pressure and temp. are lower.
3. Please correctly connect the optional connectors (S1, S2, S3) respectively.
Connection procedure
In each connector, PT1/4 screws are mounted. Please remove these screws when connecting.
1.
Sample sensor
1-1. Please connect the optional connector S1 or S2 (refer to P.101 98[12.Piping diagram])
to optional sample sensor. (Refer to P.17)
1-2. In order to input the sample sensor, please disassemble the back plate of unit body,
connect to the terminal block (TB1 4.5) of controller board. When connecting, please
confirm that they are connected by the screws attached by terminals. Refer to (P.59 [11.
wiring and piping diagram])
2.
Chamber temp. measurement sensor
Please connect the optional connector S1 or S2 (refer to P.101 [12.Piping diagram]) to
optional chamber temp. measurement sensor. (Refer to P.17)
3.
Pressure gauge
Please connect the optional connector S3 (refer to P.101 [12.Piping diagram]) to optional
pressure gauge.