Yamato PDC610, Инструкция по эксплуатации

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34
10. WHEN ALARM OCCURS
Operating Procedures for Auto Tuning Adjusting Switch
This operation is used when proper matching cannot be obtained or load in the
chamber will not go into the matching range after switch the plasma mode
（ＲＩＥ ⇔ Ｄ
Ｐ）
.
High frequency wave output must be matched with load. If not, reflective wave will be larger and
preventing effective transmission of output to the load and may cause a malfunction of the high
frequency wave power supply.
The auto tuning adjustment switch is located in the right panel.
（１）
Remove the right panel.
※
Make sure that RF is OFF before removing the panel.
（２）
Set the
“AUTO/MANUAL selector switch
（
VC1 and VC2
）
” to the MANU side.
（３）
Turn the
“MANUAL position adjustment
（
VC1 and VC2
）
” counterclockwise.
（４）
Turn the value on the
“Variable condenser position display （
VC1 and VC2
） ” is 0.
（５）
Set the
“AUTO/MANUAL selector switch
（
VC1 and VC2
）
” to the AUTO side.
（６）
Replace the right panel to the original position.
（７）
Make sure whether matching will be made properly.
VC1 AUTO/MANUAL
selector switch
VC2 AUTO/MANUAL
selector switch
VC1 variable
condenser
MANUAL position
adjustment
VC2 variable
condenser
MANUAL position
adjustment
※
Never attempt to touch.
（
Set at down at the default setting.
）
Position of the
variable condenser