Wentworth Technology Pegasus S200 Скачать руководство пользователя страница 3

 

 

 

 

Wentworth

Laboratories

 

 

 

Copyright notice 

 

© 

Wentworth Laboratories Limited, 2002-2003.  

ALL RIGHTS RESERVED  

This document is copyrighted by Wentworth Laboratories Limited. No part of this 
manual may be reproduced or transmitted in any form, by any means (electronic, 
photocopying, recording, or otherwise) without the prior written permission of 
Wentworth Laboratories Limited.  

Trademarks 

 

Any trademarks, registered trademarks, or trade names mentioned in this manual that are 
not he property of Wentworth Laboratories Limited are acknowledged to be the property 
of their respective holders.  

Disclaimer 

 

Wentworth Laboratories Limited makes no representations or warranties regarding the 
contents of this document. We reserve the right to revise this document, or make 
changes to the specifications of the products described within, at any time without 
notice and without obligation to notify any person for such revision or change.  

Contact Information 

If you have any questions or comments about the 

Pegasus Probe

 or any other 

Wentworth product, please direct your inquiry to your local sales representative or one 
of the Wentworth offices: 

Wentworth Laboratories, Inc 

101 Commerce Drive 
Brookfield, CT 06804 
Tel:   203 775 9311 
Fax:  203 775 4398 

Wentworth Laboratories, Ltd 

 

1 Gosforth Close 
Sandy, Bedfordshire  SG19 1RB 
ENGLAND 
Tel: 

+44 (0) 1767 681 221 

Fax:  +44 (0) 1767 691 951 

Wentworth Laboratories, Inc. 
1102 Walsh Avenue 
Santa Clara, CA 95050 
Tel: 

408 919 1875 

Fax:  408 919 6684 

Wentworth Japan Co., Ltd 

1-8-15 Nakagawa, Tsuzuki-ku 
Yokohama 224 
JAPAN 
Tel: 

+81 (0) 45 912 8520 

Fax:  +81 (0) 45912 8524 

Wentworth Laboratories, Inc. 

3913 Todd Lane, Suite 505 
Austin, TX 78744 
Tel: 

512 440 0792 

Fax:  512 440 0530 

Web site

 http://www.wentworthlabs.com 

 

Содержание Pegasus S200

Страница 1: ...Wentworth Laboratories Pegasus Probe Installation and Operation Issue 2 0 December 2003 The Leader in ProbeAbility...

Страница 2: ......

Страница 3: ...ake changes to the specifications of the products described within at any time without notice and without obligation to notify any person for such revision or change Contact Information If you have an...

Страница 4: ......

Страница 5: ...be The position of this probe will be set prior to shipment such that the nominal position of the needle will be coincident with the chuck centre when the prober is first initialised Whilst it is poss...

Страница 6: ...the amount of probe force required to break the edge sense contact can be adjusted Replacement of the probe needle is quick and easily achieved without the requirement for adhesives or any special too...

Страница 7: ...e needle Optional 45 or 60 probe to substrate orientation Adjustable Pegasus Probe Adjustment Radial 12mm coarse 5mm fine Tangential 5mm Height 10mm Probe Needle Size 0 5mm diameter 0 020 Probe Force...

Страница 8: ...mbwheel Note The position of the fixed probe will have been set prior to shipment Vertical Thumbwheel Locking Screw Mounting Screws Fig 2 Mounting the fixed Pegasus Probe 3 1 Fixed Probe Setting Proce...

Страница 9: ...needle holder Run the Probe Height facility on the prober to set the Gross and Fine heights Should it be required the platform can be raised and lowered using the Platform adjusting micrometer at the...

Страница 10: ...the probe height routine and raise the chuck until it comes into contact with the Fixed Pegasus Probe Using the vertical thumbwheel lower each Adjustable Pegasus Probe until an X appears on the scree...

Страница 11: ...directly to the connector provided on the side of the Pegasus Probe body and anchored to the side of the body as shown Connecting the tester cable directly to the needle can influence the performance...

Страница 12: ...th Laboratories Fig 7 Cable Management Clamps Cable clamps are provided on the underside of both sides of the platform to guide the tester and edge sense cables to the rear of the prober Fig 7 8 Fig 8...

Страница 13: ...e holder by pulling the sprung loaded clamp back towards the Pegasus Probe body Fig 9 and inserting the needle through the exposed hole from the underside This operation can be performed with the Pega...

Страница 14: ...the S200 and Pegasus Probe configuration to obtain the desired probe mark throughput conditions These are listed below Probe Contact Force S200 Contact Enhancement Parameter S200 Damping Enhancement P...

Страница 15: ...y rotating this screw either clockwise or counter clockwise will increase or decrease the contact force The direction required can be obtained by stepping 1 or 2 devices after adjustment and observing...

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