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Chapter 1 - Safety Warnings 

 

_______________________________________________________________________________________________________________ 

MNL000294.doc 

Revision  2 

 

 

 

 

09/16/2016 

Source System TE11 

 

© Versum Materials, Inc. as of the revision and date shown.  All rights reserved. 

Confidential and Proprietary Data 

 

 

Page 

 -  

31 

 

The following label would be used with the gases listed below it: 

 

 

 

 

 

 

 

                           Acetylene   

               Hydrogen mixtures 

                           Butane 

 

 

   Isobutane 

                           Disilane 

 

 

   Isobutylene 

                           Deuterium   

               Methane 

                           Ethane 

 

 

  Methyl chloride 

                           Ethanol mixtures                Methyl silane 

                           Ethylene 

 

              Propane 

                           Halocarbon 32 

 

  Silane 

                           Halocarbon 41 

 

  Silane mixtures 

                           Hydrogen    

 

 

Содержание GASGUARD Source System TE11

Страница 1: ...terials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Installation Operation Maintenance Manual GASGUARD Source System TE11 Manual Part Number 452169 Edit...

Страница 2: ...out prior written consent of Versum Materials Inc The information and data should be available only to those with a need to know Versum Materials Inc makes no representation that the information and d...

Страница 3: ...ration In no event shall Versum Materials Inc be liable for any incidental indirect or consequential damages in connection with the purchase or use of any Versum Materials Inc product This warranty sh...

Страница 4: ...2 Dimensions and Mounting Rev 2 MNL000295 doc Updated company name and logo Chapter 3 Tubing Connections Rev 2 MNL000297 doc Updated company name and logo Chapter 4 Electrical Connections Rev 2 MNL00...

Страница 5: ...te shown All rights reserved Confidential and Proprietary Data Page C 5 Chapter 10 Maintenance Rev 2 MNL000304 doc Updated company name and logo Chapter 11 System Specific Information Rev 3 MNL000305...

Страница 6: ...1 14 1 10 3 Flammable and Pyrophoric Gas Hazards 1 14 1 10 4 Oxygen and Other Oxidizer Hazards 1 16 1 10 5 Inert Gas Hazards 1 18 1 10 6 Pressurized Gases 1 20 1 10 7 Cylinder Handling Hazards 1 20 1...

Страница 7: ...e Customer Requirement 3 15 Chapter 4 Electrical Connections 4 1 Grounding Method 4 1 4 2 Power Supply Connection 4 2 4 3 Field Connections 4 4 4 4 External I O Communication 4 6 4 4 1 Available Exter...

Страница 8: ...8 23 8 5 2 How to Open and Close Valves 8 25 8 5 3 General Principles of Manual Operation 8 26 8 6 Source System Configuration 8 27 8 6 1 Net Product 8 29 8 6 2 Alarm Setpoints 8 29 8 6 3 Subcycle Par...

Страница 9: ...9 6 15 Low Purge Delivery Pressure 9 11 9 6 16 High Purge Delivery Pressure 9 11 9 6 17 High Vent Pressure 9 12 9 6 18 Low Vacuum Generated PT5 9 12 9 6 19 High Purge Delivery PT8 or Very High Purge...

Страница 10: ..._______________________________________________________________ MNL000296 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confide...

Страница 11: ...arnings like the sample shown below are found throughout the manual to point out hazards which could cause personal injury or death if proper procedures are not followed All installation personnel MUS...

Страница 12: ...vising installation engineer before installation is begun GASGUARD Equipment Systems have been designed and built in accordance with the Uniform Fire Code UFC and the National Fire Protection Associat...

Страница 13: ...procedures Consult your local Versum Materials Inc technical representative if you need assistance in preparation of standard work instruction Please refer to the Table of Contents of this manual for...

Страница 14: ...Safety Warnings Section 3 Inert Gas Hazards Section 4 Pressurized Fluids Gases Section 5 Electrical Hazard Section 6 Falling Equipment Hazard Section 7 Gas Cylinder Handling Hazard Section 8 Pinch Ha...

Страница 15: ...used and describe the icons found in various sections of the manual and on the equipment The hazard warning labels used in the manual will correlate with those used on the equipment 1 1 1 Level or Int...

Страница 16: ...air The formation for explosive gas mixtures of flammable gas and air when exposed to an ignition source Pyrophoric gases which will ignite spontaneously without the presence of an ignition source whe...

Страница 17: ...n and date shown All rights reserved Confidential and Proprietary Data Page 1 4 This symbol warns of a pinch hazard This hazard exists on cabinet doors equipped with automatic closers This symbol indi...

Страница 18: ...operator must read and understand this safety section before operating the system All operating and maintenance personnel must receive training and instruction by Versum Materials Inc All cylinder st...

Страница 19: ...ned area which can cause DEATH All personnel must read and understand the material safety data sheet s MSDS for the specific gas es being used Oxygen concentrations of 19 5 or less can greatly increas...

Страница 20: ...be used See the information on personal protective equipment in this section for details When entering a confined area or area which may contain high inert gas concentrations a Buddy System must be us...

Страница 21: ...g Equipment Hazard This system is a top heavy device If it is not properly installed it could fall and injure crush or kill personnel working in the area When moving and installing the system extreme...

Страница 22: ...ment required for operating and maintaining the GASGUARD system is dependent on the hazard category of the gas es being used When a gas meets more than one hazard category the PPE for the most hazardo...

Страница 23: ...INJURY or DEATH Contact Versum Materials Inc for the gas category Personal Protective Equipment for the gas categories follows Personal Protective Equipment for Toxics Toxic gas leak detection ex MDA...

Страница 24: ...ials Inc recommends the use of both It is not required to use both however at least one MUST be used at all times Personal Protective Equipment for Pyrophorics Pyrophoric gas leak detection ex MDA Har...

Страница 25: ...wing warnings The hazard warnings include Toxic Gases Hazards Corrosive Gases Hazards Flammable and Pyrophoric Gases Hazards Oxidizer Hazards Inert Gas Hazards Pressurized Gases Cylinder Handling Haza...

Страница 26: ...n burning sensations and shortness of breath to alert personnel of exposure to toxic levels Personal protective equipment required for use with toxic gases is detailed in Chapter 1 Section 9 of this m...

Страница 27: ...an cause severe irritation of the eyes and respiratory system At higher concentrations they can cause severe personal injury or death Chapter 1 Section 9 of this manual lists the personal protective e...

Страница 28: ...e limit LEL and below the upper explosive limit UEL for that specific gas Some flammable gases may accumulate as pockets in enclosed areas and subsequently explode if an ignition source is present A f...

Страница 29: ...ert atmosphere Personal protective equipment required for use with pyrophoric and flammable gases is listed in Chapter 1 Section 9 Note that the personal protective equipment PPE for pyrophorics diffe...

Страница 30: ...plier or the Compressed Gas Association to order CGA Pamphlets Maintain oxygen cleanliness at all times All equipment and piping in contact with oxygen or oxidizers must be cleaned to specifications o...

Страница 31: ...nnel Before working in an area where nitrogen helium or other inert gases could be present check the area with an oxygen monitor to be sure the oxygen concentration is between 19 5 and 23 While workin...

Страница 32: ...1910 146 Confined Space Guidelines must be met when working with inert gases in confined spaces Self contained breathing apparatus is required cartridge or filter type gas masks cannot be used See the...

Страница 33: ...ponent or a ruptured failed component can expose the operator to a high pressure gas stream or projectile Read the cylinder handling warnings in Chapter 1 Section 1 10 7 and the safety literature on c...

Страница 34: ...ry or death Do not rotate the cylinder using the cylinder valve handle This may open the cylinder valve and cause a high pressure gas leak NEVER replace the gas specified for use in the source system...

Страница 35: ...rd The purge gas system incorporates a pressure indicating gage which will provide the means of displaying a low purge gas cylinder pressure condition usually 200 psig 14 barg minimum The cylinder sho...

Страница 36: ...machines or equipment or there is a single power source For a more complex system a more comprehensive procedure will need to be developed documented and utilized Lockout or Tagout Procedure for Name...

Страница 37: ...affected employees that a lockout or tagout system is going to be utilized and the reason therefore The authorized employee shall know the type and magnitude of energy that the machine or equipment ut...

Страница 38: ...t or tagout devices Operate the energy isolating devices to restore energy to the machine or equipment Procedure Involving More Than One Person In the preceding steps if more than one individual is re...

Страница 39: ...when such operation could cause injury to personnel Do not attempt to operate any switch valve or other energy isolating device where it is locked or tagged Entry No Description 1 Name of Company 2 Ty...

Страница 40: ..._____________________________ MNL000294 doc Revision 2 09 16 2016 Source System TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1...

Страница 41: ...and Proprietary Data Page 1 28 The following sign is located on the GASGUARD controller This label is required if the GASGUARD Source System is located in certain hazardous areas i e Class I Division...

Страница 42: ...specific to the gases being used They are located on the door of the GASGUARD cabinet They are identical to the labels on the process gas cylinder in the GASGUARD cabinet to provide verification that...

Страница 43: ...System TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 30 The following label would be used with the gases listed below it The...

Страница 44: ...sum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 31 The following label would be used with the gases listed below it Acetylene Hydrogen...

Страница 45: ...rials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 32 The following label would be used with the gases listed below it Arsine mixtures Germane Car...

Страница 46: ...______________________________________ MNL000294 doc Revision 2 09 16 2016 Source System TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Da...

Страница 47: ...d Confidential and Proprietary Data Page 1 34 The following label would be used with the gases listed below it Ammonia Halocarbon 125 Argon Halocarbon 128 Carbon dioxide Halocarbon C141B Halocarbon 11...

Страница 48: ...____________ MNL000294 doc Revision 2 09 16 2016 Source System TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 35 The following...

Страница 49: ...ors are installed when required to shut off the flow of gas in the event of downstream equipment failure An exhaust monitor verifies ventilation through the cabinet The system may utilize a positive s...

Страница 50: ...M MATERIALS INC Safetygram 11 Emergency Action in Handling Leaking Compressed Gas Cylinders VERSUM MATERIALS INC Safetygram 14 Don t Turn a Cylinder into a Rocket VERSUM MATERIALS INC Safetygram 15 Cy...

Страница 51: ..._____________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 1 Chapte...

Страница 52: ...ons included in this section are intended for familiarization purposes For system specific details refer to the installation drawings supplied An installation drawing INS will be provided upon request...

Страница 53: ...vision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 3 2 1 1 Outline Dimension Figures for 2 Cylind...

Страница 54: ...oc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 4 Approximate Weight 500 pounds 226 24 Ki...

Страница 55: ...evision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 5 Approximate Weight 500 pounds 226 24 Kilogr...

Страница 56: ...______________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Dat...

Страница 57: ...______________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprie...

Страница 58: ...16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 8 2 Cylinder Euro XH Rack 2 1 2 Outline Dimension Figures...

Страница 59: ..._________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary...

Страница 60: ...doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 10 Approximate Weight 600 pounds 271 49...

Страница 61: ..._______________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page...

Страница 62: ..._____________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data...

Страница 63: ..._________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Pag...

Страница 64: ...n 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 14 2 1 3 Outline Dimension Figures for 1x1 Cylinder...

Страница 65: ..._________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 15 Approxima...

Страница 66: ...__________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 16 Figure 2 1 3 1 O...

Страница 67: ...______________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2...

Страница 68: ...____________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data...

Страница 69: ...________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page...

Страница 70: ...n 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 20 2 1 4 Outline Dimension Figures for 1x2 Cylinder...

Страница 71: ...______________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Dat...

Страница 72: ...__________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Pa...

Страница 73: ...ision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 23 Approximate Weight 650 pounds 294 84 Kilogra...

Страница 74: ...____________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data...

Страница 75: ...________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page...

Страница 76: ...ry Data Page 2 26 2 2 Mounting Hole Locations The GASGUARD Source System Enclosures or Racks are mounted to the facility floor using four 4 anchors one in each corner of base Highest tension load when...

Страница 77: ...ole Location Figures for proper floor location of four 4 7 16 11 1 mm diameter holes in Enclosure floor Do not use inner manufacturing bolt hole set in cabinet base Using the inner manufacturing bolt...

Страница 78: ...________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary D...

Страница 79: ...______________________________________________________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All...

Страница 80: ...95 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 30 Figure 2 2 1 2 Mounting Hole Locat...

Страница 81: ...______________________________________________________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All...

Страница 82: ...gure 2 2 1 4 Mounting Hole Locations 1x2 Cylinder Enclosure or 1x2 Cylinder Euro XH Enclosure 2 2 2 Rack Anchoring For Rack anchoring see the following Mounting Hole Location Figures for proper floor...

Страница 83: ...______________________________________________________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All...

Страница 84: ..._____________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Propriet...

Страница 85: ..._____________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Propriet...

Страница 86: ...___________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietar...

Страница 87: ...___________________________________________ MNL000295 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietar...

Страница 88: ...ections Section 1 Tubing Interconnections Section 2 Process Line Connection Section 3 Vent Line Section 4 Venturi Line Section 5 Purge Line Section 6 Pneumatic Supply Section 7 Enclosure Exhaust Syste...

Страница 89: ...times specified by the customer for corrosive gases Verify the tubing material type on the Specification Sheet that is supplied with the order All tubing connections are made at the top rear of the so...

Страница 90: ...mm wall thickness Optional process outlet 3 8 9 5 mm diameter 0 035 0 9 mm wall thickness Optional coax 5 8 15 8 mm diameter 0 049 1 2 mm wall thickness Venturi inlet 1 4 6 4 mm diameter 0 035 0 9 mm...

Страница 91: ...ulkhead provides a termination point for an outer secondary containment tube The outer secondary containment tube or jacket is connected directly to the coaxial bulkhead The outer secondary containmen...

Страница 92: ...016 Source System TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 5 Note The method of monitoring the outer secondary containme...

Страница 93: ...the line through the vacuum venturi loop The purging sequences run approximately 30 45 minutes Process gas can be introduced to the vent system at any time in the event of certain multiple component f...

Страница 94: ...der manifold system The vacuum generator will demand a flow of 50 60 LPM 106 127 CFH of nitrogen during purge cycles 3 5 Purge Line A purge line may be provided when the nitrogen purge cylinder is not...

Страница 95: ...against mechanical damage If electrical power for the purge air is required this power shall be on a separate disconnect or before the gas source system disconnect This supply is also used for Type Z...

Страница 96: ...azardous area it is necessary to use the following procedure to re establish the Z purge before operating the controller 1 Close the controller front and tighten both latches completely 2 Open the nee...

Страница 97: ...tor exposure to hazardous gas 200 feet per minute average with 150 feet per minute minimum at any point 61 meters per minute average with 46 meters per minute minimum 3 In order to meet UFC criteria U...

Страница 98: ...S HATCH OPEN 3 Enclosure Size 1 exhaust flow cfm static pressure in H20 velocity pressure in H20 exhaust flow m3 m Static pressure Pa velocity pressure Pa exhaust flow cfm velocity pressure in H20 exh...

Страница 99: ...ystem s Specification Sheet to determine if this option is used 3 These exhaust flow values are applicable to all GASGUARD standard flow enclosures 4 All standard GAGGUARD enclosures are sized for a 6...

Страница 100: ...rd GASGUARD enclosures are sized for a 6 inch outer diameter OD duct connection to the vent stack Refer to the system s Specification Sheet to determine the type of enclosure 5 Access Hatch Closed val...

Страница 101: ...on of the GASGUARD Source System The helium leak test port is for vacuum service only Do not connect pressurized gas to this port 3 10 Hazardous Gas Leak Detection System Customer Requirement A gas le...

Страница 102: ...ust be installed in the outlet valve of any cylinder containing pure silane or mixes containing 2 or more of Silane In addition to the above requirements systems that do not have an excess flow switch...

Страница 103: ...doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 4 1 Chapter 4 Electrical Connections Sect...

Страница 104: ...ing Methods and Article 500 Hazardous Classified Locations of the National Electric Code NEC 1993 if installed in the United States Reference to the use of this equipment in Hazardous Locations only a...

Страница 105: ...p to the facilities grounding network Figure 4 1 shows a suggested grounding method for a typical system This drawing may not be applicable to your specific system Figure 4 1 Suggested Grounding Metho...

Страница 106: ...al circuit interrupting device to remove power from the unit when maintenance on the controller is required and should be Lockout Tagout capable This device should be rated as a minimum at 240 volts 3...

Страница 107: ...rved Confidential and Proprietary Data Page 4 5 Figure 4 3 Power Supply Terminal Connector The power requirements are as follows 100 240 VAC 150 VA maximum Overvoltage protection Recommended may be re...

Страница 108: ...tween each electrical connection point on the cabinet and the electrical source Liquid tight flexible conduit can be installed between the GASGUARD TE11 connectors and the conduit seals to facilitate...

Страница 109: ...terials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 4 7 A 1 1 8 28 6 mm diameter hole for conduit is supplied for connecting the 120 240 VAC power...

Страница 110: ...___________________________________________________________________ MNL000298 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Con...

Страница 111: ...erminal blocks located inside the controller on the back wall left side See Figure 4 6 for details on the location of the connections Figure 4 6 I O Terminal Blocks The tables on the following pages l...

Страница 112: ...eak Shut down GASGUARD System Remote Shutdown Shut down GASGUARD System Vent system unavailable Prevents purge modes from starting Emergency Stop Hardwired Shutdown of GASGUARD System local reset requ...

Страница 113: ...tial and Proprietary Data Page 4 11 Digital Outputs Dry CON3 24 VDC 1 Amp maximum Common NO Relay Output CON3 CON3 K101 Gas Avail Left 1 2 K102 Gas Avail Right 3 4 K103 Shutdown Alarm 5 6 K104 Fault A...

Страница 114: ...______________________________________________________ MNL000299 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and...

Страница 115: ...d with helium and sniffed externally with the detector NOTE It is recommended that the internal GASGUARD Source System tubing which was helium leak tested at the factory be rechecked at this time to e...

Страница 116: ...If one is or was connected do not continue as personal injury or death can result Contact an Versum Materials Inc representative for system verification NOTE Due to the potential hazards listed above...

Страница 117: ...E color and Invalid Password at bottom of window will be displayed 2 From the Mode Menu screen highlight MANUAL MODE by pressing Manual Mode button if the button is red and displays N A a shutdown has...

Страница 118: ...tary Data Page 5 5 Extreme care must be taken when operating valves manually Only those valves required for adequate leak testing should be opened 4 When leak testing is complete press to return to th...

Страница 119: ...________ MNL000300 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 1 Chapter 6 Functiona...

Страница 120: ...his functional check must be made prior to start up The functional check is an additional service provided for a cost The cost of this service may have been pre arranged during the sale and scope revi...

Страница 121: ...0 VAC 50 60 Hz connected see Chapter 4 Section 2 6 Remote I O wiring installed and checked see Chapter 4 Section 4 7 GASGUARD Network wiring installed if applicable and configured on the host see Chap...

Страница 122: ...____________________________ MNL000300 doc Revision 1 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 4...

Страница 123: ...VISUAL INSPECTION PIPING MECHANICAL Check off line item when completed Sign and date when section completed Left side or single Right side Perform visual inspection to verify all mechanical and elect...

Страница 124: ...n completed Sign and date when section completed Left side or single Right side Shelf kit installed and adjusted Cyl Chains Cyl Straps circle Trickle purge gasket installed Correct venturi pressure pr...

Страница 125: ...age 3 of 9 ELECTRICAL Check off line item when completed Sign and date when section is completed Left side or single Right side Earth ground installed 120v 220v 24v electrical complete circle Graphics...

Страница 126: ...top guard in place Remove pneumatic bulkheads from the back of the controller Do all valves operate Manual mode operation No audible solenoid leaks Re install pneumatic bulkheads from the back of the...

Страница 127: ...STEM FIELD START UP CHECKLISTpage 5 of 9 CALIBRATION Verify analog scaling psig with program documentation Transducers must be powered up a minimum of 15 minutes Zero and span should be checked a mini...

Страница 128: ...est the digital alarms and the hardwire shutdowns Digital In Label Hardwire SD loc Checked I0 0 Remote Shutdown L X I0 1 Remote Shutdown R I0 2 Emergency Stop X I0 3 Control Box Z Purge I0 4 Low Pneum...

Страница 129: ...IONAL TEST RELAY OUTPUTS Check off line item when completed Sign and date when section is completed Q0 0 HRDW MSTR RES Q0 1 FAULT LED Q0 2 SHUTDOWN LED Q0 3 GAS FLOW LED Q0 4 HORN Q0 5 MSTRSOL PERM Q0...

Страница 130: ...low pressure portion of the panel is in vacuum state from the decay Crossover signal tested Crossover line purge lockout tested Low process delivery Process response for very low purge Test shutdowns...

Страница 131: ...2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 13 SECTION COMPLETED SIGNATURE DATE VERSUM MATERIALS INC TE1...

Страница 132: ...720 ARGON AR 580 718 ARSINE ASH3 350 632 BORON TRICHLORIDE BCL3 660 634 BORON TRIFLUORIDE B11F3 330 642 CARBON DIOXIDE CO2 320 716 CHLORINE CL2 660 634 724 DIBORANE MIXES B2H6 350 632 DICHLOROSILANE...

Страница 133: ...__________________ MNL000300 doc Revision 1 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 15 SILICON...

Страница 134: ...n All rights reserved Confidential and Proprietary Data Page 7 1 Chapter 7 System Description Section 1 Gas Cabinet Section 2 Rack System Section 3 Auto Switchover System Section 4 Hazardous Gas Panel...

Страница 135: ...e and handling of high purity toxic flammable pyrophoric corrosive oxidizing and reactive cylinder gases GASGUARD Systems have been designed in accordance with the applicable requirements of the Natio...

Страница 136: ...served Confidential and Proprietary Data Page 7 3 The Enclosure has 12 gage 0 004 mm steel doors with windows constructed of 1 4 thick 6 4 mm wire reinforced safety glass A temperature activated 165 F...

Страница 137: ...platform for inert and Silane gas handling systems Its design will accommodate process and purge panels gas cylinders and a controller No exhaust hook up is required The use of a rack system for Silan...

Страница 138: ...depicts a two cylinder low pressure auto switchover system Process gas switchover between right and left cylinders is initiated by a very low delivery pressure a very low process gas cylinder pressur...

Страница 139: ...nert gas to the vacuum venturi system Check valves are used as backup to prevent process gas flow into the inert gas panel and to prevent contamination of the panel from the exhaust system All compone...

Страница 140: ...2019 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 7 7 6 Panel Schematic and Component Descriptions Figure 7 3 i...

Страница 141: ...pigtail close to the process gas cylinder Its primary function is to stop the flow of process gas when a shutdown alarm occurs or the E Stop button is pressed V2 High Pressure Process Isolation Valve...

Страница 142: ...e Transducer This transducer monitors pressure of the purge gas at the cylinder outlet PT4 Purge Delivery Pressure Transducer This transducer monitors purge gas delivery pressure at the outlet side of...

Страница 143: ...anual valve allows process purge or test gases to bypass the process purifier when open It is used in conjunction with MV14 and MV16 It should be closed during normal process gas flow MV16 Process Pur...

Страница 144: ...tion from the process panel MV33 Weld Gas Inlet Valve Optional This manual valve is used to supply weld gas to the process line during installation PCV1 Process Gas Pressure Regulator This regulator c...

Страница 145: ...Page 7 12 This check valve prevents back flow of process gas from the vent piping into the house nitrogen system CV5 provides redundancy to CV7 CV6 Purge Panel Vent Check Valve This check valve preven...

Страница 146: ...encing valve actuation Adequate purging is ensured by checking pressure and vacuum at each step within the purge cycles The controller also has the capability of shutting down the system if an unsafe...

Страница 147: ...erved Confidential and Proprietary Data Page 7 14 7 7 1 Controller Components The Display Screen Located on the front face of the controller the display screen is an LCD that contains a graphical disp...

Страница 148: ...on Window The Main menu is selected by pressing Main Screen anywhere and key in appropriate password The Main Menu is shown in Figure 7 6 The Main Menu will remain displayed for a configurable amount...

Страница 149: ...and closed valves are shown in green default The valve condition colors conform to ISA standards TE11 also provides the optional valve condition color to meet customers requirement Emergency Stop The...

Страница 150: ...are found the process gas flow is started Flow continues until a process stop or until an alarm condition causes a shutdown Pre Purge This option starts the pre purge sequence prior to cylinder change...

Страница 151: ...______________ MNL000301 doc Revision 2 01 04 2019 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 18 Cylinder cha...

Страница 152: ...This option starts the rough line evacuation sequence The rough line evacuation sequence purges the process line between the gas cabinet and the tool It is used to remove process gas before maintenan...

Страница 153: ...Product Alarm Setpoints Subcycle Parameters Leak Test Parameters Digital Inputs Digital Outputs Analog Inputs Analog Setup Alarm Conditions Helium Leak Check Password List Historical Alarms Service Fu...

Страница 154: ...00301 doc Revision 2 01 04 2019 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 21 RFO Restrictive Flow Orifice In...

Страница 155: ...der is changed It is an improvement on the standard leak testing Leak testing done at a higher pressure will indicate leaks faster and of a lesser magnitude than leak testing done at a lower pressure...

Страница 156: ...led The connection must be remade and the cylinder change sequence performed again Note prior to re running the cylinder change sequence the operator must ensure a vacuum condition at PT1 and PT2 If n...

Страница 157: ...1 Fault HI 0 980 233 LOW HP PURGE PT1 Shutdown LO 0 900 200 LOW HP PURGE PT8 Shutdown LO 0 900 200 HPLT Alarm Conditions Responses 7 10 Multiple Process Outlets Multiple Process Outlets are optional p...

Страница 158: ...lity delivery line is complete and ready to be terminated Multiple process outlets offer a convenient method for providing gas to multiple use points to another source cabinet s for emergency manual s...

Страница 159: ...c as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 1 Chapter 8 Operating Procedures Section 1 Emergency Shutdown Procedure Section 2 Operation of the Sour...

Страница 160: ...before operating the system You should also be familiar with the location and function of all components Prior to operating the system the proper installation procedures need to be completed This info...

Страница 161: ...vision and date shown All rights reserved Confidential and Proprietary Data Page 8 3 8 1 Emergency Shutdown Procedures In the event of an emergency press the EMERGENCY STOP pushbutton on the controlle...

Страница 162: ...ge 8 4 Pressing the Emergency Stop button does not disconnect power to the controller The 120 VAC 240 VAC power is still active within the controller Do not perform maintenance on the controller witho...

Страница 163: ...___________________________________ MNL000302 doc Revision 2 01 04 2019 SourceSystemTE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Pa...

Страница 164: ...___________________________________________________________________________________ MNL000302 doc Revision 2 01 04 2019 SourceSystemTE11 Versum Materials Inc as of the revision and date shown All righ...

Страница 165: ...Press the anywhere on the TFT touch screen then the OK key on the Login window to enter the password Example To enter the password 12345 where the level of access precedes the password Press the OK ke...

Страница 166: ...n and date shown All rights reserved Confidential and Proprietary Data Page 8 8 8 2 1 Source Mode Menu Left or Right side Selecting the for Left or for Right from the Main Menu will display the follow...

Страница 167: ...or death The procedures listed in this section are intended to be used in conjunction with the purge and cylinder change functions of the cabinet controller Do not use these procedures independently...

Страница 168: ...Gas Cylinder Change Procedure This procedure will normally be done after PRE PURGE CYCLES in conjunction with a process gas cylinder change Before approaching a hazardous gas cabinet for a cylinder c...

Страница 169: ...clockwise 4 Close manual valve MV10 5 Slowly open manual valve MV13 to vent purge gas within pigtail Close MV13 6 Through the access window loosen the pigtail cylinder connection from the cylinder va...

Страница 170: ...cap If a valve protection cap is extremely difficult to remove do not apply excessive force or pry the cap loose Attach a label to the cylinder identifying the problem Obtain another cylinder Do not...

Страница 171: ...e 4 Slowly open MV13 to vent purge gas from pigtail 5 Close MV13 6 Repeat steps 3 5 a minimum of 10 times to purge the pigtail of any contaminants that may have entered during purge gas cylinder insta...

Страница 172: ...ve MV13 for approximately 15 seconds to remove air from pigtail then close 3 Slowly open manual isolation valve MV10 to regulator 4 Adjust the purge gas regulator PCV2 to 80 90 psig 5 51 6 20 barg del...

Страница 173: ...PRESS Process cylinder weight if scale is present 4 Note the valve color coding key on the graphics Color screen Red valve open default Green valve closed default Proceed to the troubleshooting secti...

Страница 174: ...ion 9 for details on the required PPE 5 Verify that exhaust system is working 6 Open access window 7 Recheck that process cylinder valve is closed Do not use a wrench or other devices to close diaphra...

Страница 175: ...t 15 Place cylinder in appropriate cart and strap in place Place EMPTY tag on cylinder and return cylinder to the appropriate cylinder storage area 8 3 2 3 Full Process Gas Cylinder Installation The r...

Страница 176: ...Cylinders with valve leaks are defective and should be returned to supplier 5 Check valve outlet area for contamination and damage Do not attempt to use a gas cylinder with a damaged or contaminated v...

Страница 177: ...g valves will sequence on the display during the high pressure purge cycles V1L V4L will open to pressurize the pigtail A leak check will be preformed The high pressure tubing will then be evacuated a...

Страница 178: ...________ Gas Service ______________________________________________________ CLOSE CYLINDER VALVE BEFORE STARTING PURGE SEQUENCE WEAR APPROPRIATE PERSONAL PROTECTIVE EQUIPMENT AS DETAILED IN SECTION 1...

Страница 179: ...ist in the installation manual Check to be sure that the GASGUARD system and all plant piping have been leak checked with a helium mass spectrometer in accordance with the customer s specified procedu...

Страница 180: ...ulators are closed knob rotated fully counterclockwise 9 Ensure the process pigtail connection cap plug is installed and tight 10 For systems with internal purge install an inert purge gas cylinder in...

Страница 181: ...very pressure 22 Process gas is now flowing to the process equipment 8 5 Manual Mode Operation Only experienced operators should operate the cabinet in manual mode Operating valves out of their proper...

Страница 182: ...n requires a second level security code 1 Enter second level or higher security code check with appropriate Air Products representative for proper password as follows Press TFT touch screen The LCD sc...

Страница 183: ...he valve you wish to close 2 The valve will close To SECURE Manual Mode 1 The Secure option will allow an operator to exit the Manual Mode menu while remaining in the Manual Mode with the valves open...

Страница 184: ...aterials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 26 8 5 3 General Principles of Manual Operation Open valves in sequence from cylinder to out...

Страница 185: ...TE11 controller files may be modified using a second or third level security code These modifications are referred to as the source system configuration The source system configuration may be accesse...

Страница 186: ...tems In Table 8 3 below W defines a Write access level of security and R defines Read access level A blank means no access is allowed for the user For safety considerations most configuration paramete...

Страница 187: ...installed in the system The analogs configured for displaying cylinder pressures will prompt for the max cyl press instead of a net product This will not occur however if a process cylinder scale is u...

Страница 188: ...on 2 01 04 2019 SourceSystemTE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 30 To change a setpoint first select the analog inp...

Страница 189: ...ium Leak Inboard 1 Helium Leak Outboard 1 To change a setpoint first select the analog input by touching the value you wish to change A key pad will appear on the screen allowing you to enter a number...

Страница 190: ...when performing the Digital Out Test To scroll through the digital input values use the PREV or the NEXT Touch the State block to toggle the output state Extreme care must be taken when forcing a dig...

Страница 191: ...r each alarm in the system The window will allow the operator to enter a new time delay value for one or more alarms or exit the window A delay entry of 0 equates to no delay The range of values is fr...

Страница 192: ...All rights reserved Confidential and Proprietary Data Page 9 1 Chapter 9 Troubleshooting Section 1 Troubleshooting the Controller Section 2 No or Low Purge Gas Pressure Section 3 No or Low Purge Gas F...

Страница 193: ...may result if proper personal protective equipment PPE is not worn when performing troubleshooting See Chapter 1 Section 9 for the proper PPE Before attempting to service the system components close t...

Страница 194: ...ause and possible solutions Before performing troubleshooting review the Safety section and read the warnings in following section If at any time during troubleshooting you are unsure what to do next...

Страница 195: ...scaling range in the controller configuration Repair or replace as necessary Set the scaling values to the proper range of the field device Input circuit fault Check for blown fuse on Replace fuse In...

Страница 196: ...eck the solenoid valve for proper operation Check for blown fuse on output circuit Repair or replace as necessary Replace fuse Follow Troubleshooting Repair or replace faulty Digital Inputs procedure...

Страница 197: ...on and date shown All rights reserved Confidential and Proprietary Data Page 9 6 Purge gas pressure Check setting on pressure Set pressure regulator to Regulator set incorrectly regulator Correct deli...

Страница 198: ...ck if instrument supply is adequate Adjust to 85 95 psig 5 9 6 6 barg if necessary 9 4 No or Low Process Gas Pressure Possible Source of Problem Test Solution Closed process gas cylinder valve Check p...

Страница 199: ...if open Are process gas pneumatic valves receiving sufficient pressure to open Check if instrument supply is adequate Adjust to 85 95 psig 5 9 6 6 barg if necessary 9 6 Typical Alarms This section as...

Страница 200: ...re possible process cylinder transducer alarms 9 6 3 Low Process Cylinder Pressure or Very Low Process Cylinder Pressure Probable Cause Corrective Action Process cylinder is below the low and or very...

Страница 201: ...nd evacuate by opening V7 V5 and V1 until PT1 is less than 5 psig 0 67 barg reinitiate the sequence 9 6 7 Standby Leak Detected Probable Cause Corrective Action Used on Auto Crossover Systems Only Thi...

Страница 202: ...alarms 9 6 10 Low Vacuum at PT2 Probable Cause Corrective Action Vacuum at PT2 is 10 psig 0 7 barg due to Vacuum Venturi supply pressure or flow requirement is insufficient OR An air operated valve i...

Страница 203: ...______________ MNL000303 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 9 12 Process deli...

Страница 204: ...sible purge cylinder transducer alarm 9 6 14 Low Purge Cylinder Pressure or Very Low Purge Cylinder Pressure Probable Cause Corrective Action Purge cylinder pressure is below user setpoint Change purg...

Страница 205: ...ssure or flow requirement is insufficient OR Verify a Venturi supply of 75 95 psig 5 2 6 6 barg at 50 60 slpm 106 127 cfh is obtainable Vent isolation valve MV22 is closed Open manual valve MV22 PT8 P...

Страница 206: ...Purge Delivery pressure is below user setpoint Adjust purge gas pressure regulator to the desired pressure Change purge cylinder as required following procedures in Chapter 8 Section 3 9 6 21 High Pu...

Страница 207: ...grouped 4 to a fuse Determine which fuse is blown by identifying the four analog inputs that are faulted 2 Turn off power to the system 3 Remove the blown fuse from the fuse holder and use an ohm met...

Страница 208: ...ohm test from the fuse output to 24vdc common a If a short circuit exists then disconnect each associated field device one at a time from the interface box or customer terminal until the short circuit...

Страница 209: ...t circuit is somewhere within the PLC I O interface board or cables Replace the associated components one at a time as necessary until the short circuit is eliminated Continue to next step 5 Turn off...

Страница 210: ...________________ MNL000304 doc Revision 2 09 16 2016 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 1 Chapter 10...

Страница 211: ...rect installation and successful operation of the equipment As to all apparatus and products not manufactured by Seller which are component parts of the Equipment furnished by Seller Seller s only obl...

Страница 212: ...tem should be relieved and electrical power to the system turned off Close the cylinder valve s and then vent all pressure in the system Purge out all process gas lines and seal them The process gas c...

Страница 213: ...ed Confidential and Proprietary Data Page 10 4 When piping is added proper labels must be affixed to critical components Failure to label correctly could result in inadvertent operation of system poss...

Страница 214: ...s in corrosive service including standby side be purged at least once every 3 months All other process gases Every cylinder change Cylinder Connection Gasket Filter Replace gasket each time the cylind...

Страница 215: ...ling of the gaskets Also check the surface onto which the gaskets seal Look for oxidation corrosion and foreign material that would prevent proper sealing Yearly Cylinder Restraints Visually inspect f...

Страница 216: ...required or recommended Indoor Yearly Outdoor Every 6 months UV IR Detector Clean housing glass Verify that the detector is aimed in the proper direction Indoor Every 6 months Outdoor Monthly Test UV...

Страница 217: ...ion corrosion and foreign material that would prevent proper sealing Yearly Door Hinges Check resistive hinges and replace as necessary Yearly Door Locking Prop Check that prop locks and stays in plac...

Страница 218: ...ents Expected Life Component Expected Life Recommended Minimum Changeout Frequency Cylinder Connection Gasket Every cylinder change Process Pigtail Corrosives Diborane Pyrophorics 3 years SST tubing f...

Страница 219: ...of the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 10 Pressure Switch Coaxial Tubing 10 years Scales 10 years Electrical Components Expected Life Component E...

Страница 220: ...and date shown All rights reserved Confidential and Proprietary Data Page 11 1 Chapter 11 System Specific Information Section 1 System Specifications Section 2 TE11 Recommended Spare Parts Section 3...

Страница 221: ..._____________________________________________ ____ MNL000305 doc Revision 3 01 04 2019 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Pro...

Страница 222: ...wer Supply DC20 4 28 8 V DC Program Data Memory 100KB Siemens part 6ES7 215 1AG40 0XB0 2 Analog 1 0 Siemens 6ES7231 4HF32 0XB0 Analog Input Card 8 Channel 12 bit Siemens part 6ES7 231 4HF32 0XB0 3 Exp...

Страница 223: ...M 5P Pneumatic Manifold Plug 16 Needle Valve 0 1 SMC AS2001F 07 03 Z Purge meeting valve 17 Circuit board 0 1 VERSUM MATERIALS INC ATMI L Gasguard TEx Left Interface Board Circuit Diagram 18 Circuit...

Страница 224: ...Recommended Mechanical Spare Parts Process Panel Process Pigtail Purge Pigtail Purge Panel Purge Purifier if used Process Purifier if used Process Out Spool Process Crossover Spool if used Purge Cros...

Страница 225: ...___________________________________________ ____ MNL000305 doc Revision 3 01 04 2019 SourceSystem TE11 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Propr...

Страница 226: ...eserved Confidential and Proprietary Data Page APP A 1 Appendix A UHP Tubing and Fitting Specification The Appendix contains the SEMC QAF030 UHP Tubing and Fitting Specification Compressed Gas Associa...

Страница 227: ...high purity applications 2 0 Scope This specification shall apply to all tubing and fittings purchased for use in all ultra high purity piping installations for the electronics industry 3 0 Responsibi...

Страница 228: ...3 The sulfur content of fittings and tubing shall be in the range of 0 005 0 017 percent type 316L VAR and VIM VAR a maximum of 0 005 VAR or VIM VAR will be specified in the purchase order This range...

Страница 229: ...3 ppm Total Hydrocarbons Less than 1 ppm Filtered to no more than 10 particles per scf larger than 0 02 microns at point of use 6 4 2 Deionized water used for cleaning shall have the following minimu...

Страница 230: ...ironment 6 7 3 Pack and ship to prevent damage to double bagging tubing and fittings 6 7 4 Finished components shall be mill and heat traceable and permanently marked for correspondence to the applica...

Страница 231: ...mental composition shall be expressed in atomic percent units and shall verify chromium to iron ratio of 1 5 1 and a minimum chromium oxide to iron oxide ratio of 3 1 for stainless steel 6 8 8 Moistur...

Страница 232: ...roprietary Data Page APP A 7 6 9 Reports and Certifications 6 9 1 The vendor shall supply the following reports and certifications as follows 6 9 1 1 One set of reports shall be sent to SEMC QA prior...

Страница 233: ...___________________________ MNL000139 doc Revision 3 05 02 2018 Gas Equipment Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP B 1...

Страница 234: ...CATION Product name Chemical formula N2 Synonyms Nitrogen Nitrogen gas Gaseous Nitrogen GAN Product Use Description General Industrial Manufacturer Importer Distribu tor IDES Holding AG Postfach 16 05...

Страница 235: ...applicable Skin contact Not applicable Ingestion Ingestion is not considered a potential route of exposure Inhalation Remove to fresh air If breathing has stopped or is labored give assisted respirati...

Страница 236: ...ready for use Use an adjustable strap wrench to remove over tight or rusted caps Before connecting the container check the complete gas system for suitability particularly for pressure rating and mate...

Страница 237: ...tightly closed in a cool well ventilated place Store containers in location free from fire risk and away from sources of heat and ignition Full and empty cylinders should be segregated Do not allow s...

Страница 238: ...F 210 C Boiling point range 321 F 196 C Flash point Not applicable Evaporation rate Not applicable Flammability solid gas Refer to product classification in Section 2 Upper lower explosion flammabilit...

Страница 239: ...kin No adverse effect Inhalation Effects In high concentrations may cause asphyxiation Asphyxiation may bring about unconsciousness without warning and so rapidly that victim may be unable to protect...

Страница 240: ...diate Effects and Chronic Effects from Short and Long Term Exposure Not applicable 12 ECOLOGICAL INFORMATION Ecotoxicity effects Aquatic toxicity No data is available on the product itself Toxicity to...

Страница 241: ...D No UN1066 Proper shipping name NITROGEN COMPRESSED Class or Division 2 2 Label s 2 2 Marine Pollutant No TDG UN ID No UN1066 Proper shipping name NITROGEN COMPRESSED Class or Division 2 2 Label s 2...

Страница 242: ...egulatory list Notification USA TSCA Included on Inventory EU EINECS Included on Inventory Canada DSL Included on Inventory Australia AICS Included on Inventory South Korea ECL Included on Inventory C...

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