Veeco Dimension 3100, Руководство пользователя

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Stage System
Stage Menu Commands
76 Dimension 3100 Manual Rev. D
5.2.4 Move To (X,Y)
This option enables the operator to quickly index the stage to a defined X-Y coordinate. If the
origin has not been preset using the
Stage > Set Reference panel, the stage automatically defaults
to the last origin that was previously used. (All subsequent X-Y moves are done from the origin.)
To move the X-Y stage to a specified X-Y coordinate, complete the following:
1. Verify that the stage origin (position 0, 0) is either:
• At the default, or,
• Reset to a new position using the Set Reference panel under the Stage pop-down menu.
2. Select the Move To ( x,y ) panel under the Stage pop-down menu. The screen presents a panel
with four fields (see Figure 5.2e ).
Note: The first two fields define absolute moves relative to the currently set origin
(0,0). The third and fourth fields define relative moves from the
current
position .
Figure 5.2e Move To Prompt
3. Enter the X and Y coordinates of the desired move to position, then click Move .
4. The stage moves to the new position. Should it become necessary to halt movement, click on
the Pause button (see Figure 5.2f ).
Figure 5.2f Abort Motion Prompt
025
Stage
Press <Pause> to abort motion