Veeco Dimension 3100, Руководство пользователя

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Calibration
Autocalibration
324 Dimension 3100 Manual Rev. D
4. For normal calibration, verify that all parameters are selected in the dialog box, then click on
Calibrate to execute the routine.
Note: The software sequentially presents various calibration images on the display
monitor while prompting the user to draw either a vertical line or a horizontal
line. The control monitor simultaneously displays various dialog boxes (one for
each image), requesting the user to enter a distance.
5. Use the mouse to draw a line on the image. Draw the line to span as many features as
possible, preferably connecting similar edges (see Figure 17.6b ).
Figure 17.6b Vertical Calibration Line
In this example illustrated in Figure 17.6b , a line is drawn from the bottom edge of one feature to
the bottom edge of another feature four rows away—a distance of 40µm. The control monitor
simultaneously displays a dialog box for entering the distance indicated by the white line (see
Figure 17.6c ). The distance displayed in the box (in this example, 35.95µm) is the software’s
estimate of the length of the line drawn on the image based on current calibration values. If the line
length is different from the value shown, change the value to reflect the correct line length. (In this
example, the user would enter a value of
40 .)
Figure 17.6c Calibration Line Distance Prompt
6. Enter the distance covered by the white line drawn on the image. If a 10-micron reference is
employed, like portions of features are spaced 10µm apart (e.g., between bottom edges, left
sides, etc.).
Note: Measure features without regard to how they appear in calibration images.
Features may be represented with stretched, distorted, or angled appearances
Draw a Vertical Line
Autocalibration
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