Veeco Dimension 3100, Руководство пользователя

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Calibration
Check Sample Orthogonality
314 Dimension 3100 Manual Rev. D
17.2.4 Set Up Contact AFM
1. Set the AFM mode to Contact .
Note: The microscope can be calibrated using STM; however, this example utilizes
contact AFM.
2. Set the Scan angle to 0 degrees.
3. Adjust Realtime parameters to obtain a good-quality, maximum Scan size image ( 440V ). Set
the Scan rate to 2.44 Hz and the Number of samples parameter to 256 .
4. With the sample engaged, check the scanning line relative to the reference’s features; the
scan should be orthogonal to the pits on the reference.
5. If the reference requires rotation, Withdraw and rotate the sample to improve orthogonality
between sample and scan line.
6. Repeat until features are oriented orthogonally with the scan frame.
17.3 Check Sample Orthogonality
Check the sample scan for orthogonality along both the X- and Y-axes. If the scan is aligned along
one axis of the scan but not another, it may be necessary to adjust the microscope’s
Orthogonality
parameter in the Scanner Calibration panel.
17.3.1 Measure Orthogonality
1. To measure a captured image’s orthogonality, view it using the Offline > View > Top View
function.
2. On the display monitor, select the Angle command and use the mouse to draw a cursor
between the edges (or centers) of widely spaced pits (see Figure 17.3a ).
Figure 17.3a Non-Orthogonal and Corrected, Orthogonal Image