Veeco Dektak 150, Руководство пользователя

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7-14 Scan Routine Parameters
Figure 7-15: Scan Parameters Dialog Box: Tower Up After Scan
3 Click OK to close the dialog box and enter the Tower Up After Scan function into the scan program.
Deflection Scan
A Deflection Scan is an optional scan type in which the scan is performed at the same point (the stage
does not move), but the stylus force is successively incremented beyond the specified value. The
tower is nulled before the scan. When the scan is completed, the
Data Plot window displays the
deflections plotted against the applied forces. This scan type is primarily used for determining the
deflection and material properties (such as Young’s modulus) of movable devices (such as passive
MEMS and cantilever devices) subjected to different applied forces.
The Scan Type parameter allows you to specify which scan type to use.
1 Click any parameter in the Scan Parameters section of the Scan Routines window (see
Figure 7-1
) to
display the Nominal Parameters tab of the Scan Parameters dialog box.
2 In the Scan Type section, select Deflection Scan from the list.
3 In the Stylus Force section, enter the stylus force to be applied at the end of the scan (see
Figure 7-16
).
4 Click Apply to enter the scan type and stylus force into the scan program and keep the dialog box open.
5 Click the Deflection Parameters tab, which lists its options under Additional Parameters (see
Figure 7-
16
.
6 Enter the Interval in msec during which each increment of stylus force should be applied.
7 Enter the Increment in mg by which the stylus force is incremented after each interval.
8 Click Apply .