Veeco Dektak 150, Руководство пользователя

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Multiple Scan Operation 5-33
Figure 5-52: Scan Routines List with One Selected Scan
2 Click the Run button on the Grid View toolbar.
3 To exclude one or more of the scan routines from another rerun:
a. Right-click the mouse on a selected row and select Exclude from the pop-up menu. The excluded scan
rows are hidden, and the calculations will not include the excluded rows.
b. To change any rows from Excluded to Included status, right-click the mouse on any row and select
Include from the pop-up menu or press C
TRL
+I on the keyboard.
The automation program runs only the selected scan routines, and the new data appears in the APS
Report
in the selected rows. The Summary statistics are also updated.
Selecting a Rerun Scan for Viewing
When the APS Report for each rerun scan is saved, it does not overwrite the APS Reports for the
previous reruns. Instead each report is given a Date/Time stamp and saved individually.
To display a selected APS Report:
1 Select the desired time stamp from the drop-down list to the left of the Update button.
2 Click the Update button (see
Figure 5-53
).
Figure 5-53: Update Button and List
Opening a Saved APS Report
You can open an APS Report inside or outside of the Dektak 150 application.
To open a saved APS Report within the Dektak 150 application:
1 Click the Open icon on the APS Report toolbar. Alternatively, select Window > Automation
Program Summary . The Dektak Database window appears (see
Figure 5-54
).
2 Click File > Open (see
Figure 5-54
). The Open File dialog box appears with a list of files saved under the
.report extension.