Veeco Dektak 150, Руководство пользователя

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5-4 Multiple Scan Operation
The scan routine is identified in the Scan Routines area by three entries: the left number is the scan
number; the center entry is the Scan Type and the number to the right is the scan length (see Figure
5-3 ).
NOTE –
After you have defined the X location and Y location according to the instructions
in
Defining Scan Location and Length on page 5-4
, the Scan Routines area also shows
the X location and Y location in µm .
Figure 5-3: Scan Routines Area
Double-click any one of the scans listed in the Scan Routines area to open the Scan Routines
window, which displays the parameters for that scan routine (see Figure 5-4 ).
Figure 5-4: Scan Routines Area with Scan Routine Selected
At this point, all four scan routines in your current automation program have the same values. You
can use the functions described in the next section to determine new values for the location and
length of each scan routine in the
Sample Positioning window. Furthermore, you can adjust or edit
values for each scan routine in the Scan Routines window, using the functions described in Editing
Scan Routines on page 5-11 .
Defining Scan Location and Length
This procedure determines the appropriate scan starting location and scan length for measuring the
vertical standard that came with your system or another sample. You define the scan location and
scan length from the
Sample Positioning window.
1 Select Window > Sample Positioning from the menu to display the Sample Positioning window (see
Figure 5-5
).