Calibration, Maintenance, Troubleshooting and Warranty
Fine-tuning for X-Y Calibration
298
MultiMode SPM Instruction Manual
Rev. B
Calculation Method
1. Select
Realtime
>
Microscope
>
Calibrate
>
Scanner
to display the
Scanner Calibration
dialog box.
2. Record the
X fast derate
or
Y slow derate
value.
3. Perform the following calculation where
s
is the
X fast Sens
or
Y slow Sens
value;
a
is the
actual distance;
d
is the
X fast derate
or
Y slow derate
value you recorded earlier;
m
is the
measured distance; and,
v
is the
Scan size
in volts:
4. Return to the
Scanner Calibration
dialog box.
5. Select the
X fast derate
or
Y slow derate
parameter.
6. Enter the new
X fast derate
or
Y slow derate
value calculated in
scanner’s fast axis to more closely match calculated distances with actual feature distances.
7. To set the new parameter value, click
OK
.
15.7.5
Measure Vertically at 150V Scan Size
1. Select two widely-spaced features on the sample image of known separation, then use the
mouse to draw a vertical line between them. (For example, on a 10µm, silicon reference,
draw the line from the top edge of one pit to the top edge of another pit as far away as
possible.) The microscope will display the measured distance next to the line.
2. Check to see whether the microscope’s measured distance agrees with the known vertical
distance. If there is significant disagreement between the two, fine tuning will be required;
go to
. If the displayed distance agrees with the known distance, no further calibration
is required.
3. Adjust your
Y slow derate
value by one of two methods: see “Trial and Error Method” on
page 297. or “Calculation Method” on page 298.
15.7.6
Change Scan angle and Repeat Calibration Routines
As a
fi
nal step, change the
Scan angle
on the
Scan Controls
panel to
90
degrees, then repeat steps
above for the following parameters:
Y fast sens
,
X slow sens
,
Y
fast der
, and
X slow der
. This will ensure the scanner is calibrated along the X- and Y-axis for
scanning at 90º.
s
a
m
----
s
d 440
v
–
(
)
–
[
]
⋅
–
440
v
–
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