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Installation, Operating & Maintenance Instructions

Series 650 DN 100-250 (I.D. 4“ - 10”), RS485

VAT Vakuumventile AG, CH-9469 Haag, Switzerland

Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email

[email protected]

www.vatvalve.com

271149EA

2007-06-12

6/77

Valve unit

Pressure range at 20

- Aluminum

(650 . . - . A . . - . . . . ) 1 x 10E-8 mbar to 1.2 bar (abs)

- Aluminum hard anodized (650 . . - . H . . - . . . . ) 1 x 10E-6 mbar to 1.2 bar (abs)

- Aluminum nickel coated (650 . . - . I . . - . . . . )

1 x 10E-8 mbar to 1.2 bar (abs)

Leak rate to outside at 20

- Aluminum

(650 . . - . A . . - . . . . ) 1 x 10E-9 mbar l/s

- Aluminum hard anodized (650 . . - . H . . - . . . . ) 1 x 10E-5 mbar l/s

- Aluminum nickel coated (650 . . - . I . . - . . . . )

1 x 10E-9 mbar l/s

Leak rate valve seat at 20

- Aluminum

(650 . . - . A . . - . . . . ) 1 x 10E-9 mbar l/s

- Aluminum hard anodized (650 . . - . H . . - . . . . ) 1 x 10E-4 mbar l/s

- Aluminum nickel coated (650 . . - . I . . - . . . . )

1 x 10E-9 mbar l/s

Cycles until first service
- Isolation cycles (open - closed - open)
- Throttling cycles (open - max. throttle - open)

200’000 (unheated and under clean conditions)
1’000’000 (unheated and under clean conditions)

Admissible operating temperature

10°C to +150°C

Mounting position

any (valve seat on chamber side is recommended) (valve seat to face
chamber is recommended)

Wetted materials

- Body

(650 . . - . A . . - . . . . ) Aluminum 3.2315 (AA6082)

- Body

(650 . . - . H . . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized

- Body

(650 . . - . I . . - . . . . )

Aluminum 3.2315 (AA6082) nickel coated

- Pendulum plate

(650 . . - . A . . - . . . . ) Aluminum 3.2315 (AA6082)

- Pendulum plate

(650 . . - . H . . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized

- Pendulum plate

(650 . . - . I . . - . . . . )

Aluminum 3.2315 (AA6082) nickel coated

- Sealing ring

(650 . . - . A . . - . . . . ) Aluminum 3.2315 (AA6082),

1.4306 (304L)

- Sealing ring

(650 . . - . H . . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized, 1.4306 (304L)

- Sealing ring

(650 . . - . I . . - . . . . )

Aluminum 3.2315 (AA6082) nickel coated, 1.4306 (304L)

ther parts

Stainless steel 1.4435 (316L), 1.4404 (316L), 1.4122, 1.4310 (301),
1.4303 (304), 1.4571, A2 (304)

- Seals

Viton

(standard). Other materials available.

Seal materials are declared on dimensional drawing of specific valve ordering
number.

DN 100

(65040 - ....)

DN 160

(65044 - ....)

DN 200

(65046 - ....)

DN 250

10"

(65048 - ....)

Max. differential pressure on plate during isolation

1200 mbar in

either direction

1200 mbar in

either direction

1200 mbar in

either direction

1200 mbar in

either direction

Max. differential pressure on plate
during opening and throttling

30 mbar

10 mbar

5 mbar

Min. controllable conductance

molecular flow)

3 l/s

5 l/s

10 l/s

15 l/s

Dimensions

Refer to dimensional drawing of specific valve ordering number

(available on request)

Содержание 650 TJ Series

Страница 1: ...O 650 GS Slave 650 HS Slave PFO SPS Sensor Power Supply PFO Power Failure Option Master configured with firmware 650C 1E 06 Slave configured with firmware 650C 1E 06 The fabrication number is indicate...

Страница 2: ...n 16 2 6 7 Service port connection 16 2 6 8 Valve cluster connection 17 3 Operation 20 3 1 Introduction 20 3 1 1 Individual valve control 21 3 1 2 Individual valve status 21 3 1 3 Freeze mode 21 3 1 4...

Страница 3: ...30 Email reception vat ch www vatvalve com 271149EA 2007 06 12 3 77 5 Maintenance repairs 60 5 1 Maintenance procedures 61 5 2 Option board 68 5 2 1 Durability of power fail battery 68 5 2 2 Retrofit...

Страница 4: ...cal data only Other applications are only allowed with the written permission of VAT 1 1 Technical data Control and actuating unit Power input 1 24 VDC 10 0 5 V pk pk max connector POWER 650 G 650 T 6...

Страница 5: ...100 psi above ATM Ambient temperature 0 C to 50 C max 35 C recommended Pressure control accuracy 0 1 of sensor full scale DN 100 4 65040 DN 160 6 65044 DN 200 8 65046 DN 250 10 65048 Position resolut...

Страница 6: ...e seat to face chamber is recommended Wetted materials Body 650 A Aluminum 3 2315 AA6082 Body 650 H Aluminum 3 2315 AA6082 hard anodized Body 650 I Aluminum 3 2315 AA6082 nickel coated Pendulum plate...

Страница 7: ...lve down with control and actuating unit downwards as it may be damaged 2 2 Installation into the system Fingers and objects must be kept out of the valve opening and away from moving parts The valve...

Страница 8: ...r INTERFACE Refer to RS485 schematics for correct wiring 6 Enable terminating resistor in link adapter of first and last valve in the system Refer to Valve cluster connection for details 7 Connect lin...

Страница 9: ...torques deforms the valve body and may lead to malfunction of the valve 2 3 1 Mounting with centering rings ISO F ISO F Valve size max tightening torque Nm max tightening torque lbs ft DN100 4 65040 8...

Страница 10: ...DN250 10 65048 16 16 16 0 63 0 63 0 63 Caution Make sure that screws are not too long otherwise the valve body may be damaged Note These torques are valid if depth of the mounting screws is min 1 x t...

Страница 11: ...mally connected to the chamber by a pipe To maintain that the response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Lengt...

Страница 12: ...C sensors Refer to chapter 2 6 2 Power and sensor connection 24 VDC sensors for schematic and correct wiring External 15 VDC supplied to POWER connector is feed through to SENSOR connector to supply 1...

Страница 13: ...sor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other...

Страница 14: ...hielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not co...

Страница 15: ...elded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not conn...

Страница 16: ...tion The service port connector SERVICE allows to connect the valve to a RS232 port of a computer This requires a service cable and a software from VAT You can either use our freeware Control View whi...

Страница 17: ...07 06 12 17 77 2 6 8 Valve cluster connection The valve cluster uses a two wire bus for the inter communication between the Master and the Slave valves The valves are connected in a daisy chain and th...

Страница 18: ...ntile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 Email reception vat ch www vatvalve com 271149EA 2007 06 12 18 77 2 6 8 1 Link adapter Link adapter 2x RJ45 jack female 1x Ser...

Страница 19: ...1149EA 2007 06 12 19 77 Setting for first and last valve in the chain Terminating resistor ON 2 6 8 2 Link cable RJ45 pinning active pins 4 and 5 Pin Description 1 not used 2 not used 3 not used 4 Dat...

Страница 20: ...valve is taking care of the pressure control while the Slave valves are following the Master valves plate position It can be operated in pressure control mode or in position control mode In both case...

Страница 21: ...lve cluster is available from the Master valve Refer to chapter Inquiry commands CLUSTER VALVE STATUS for details 3 1 3 Freeze mode This mode enables an individual valve to be controlled independent o...

Страница 22: ...numeric monitoring basic diagnostic Control Performance Analyzer supports parameter setup manual control sequence control numeric and graphical monitoring data recording data analysis advanced diagnos...

Страница 23: ...during power up Reaction of valve Valve position before power up Valve power up configuration closed default Valve power up configuration open Closed isolated Valve remains closed Display shows alter...

Страница 24: ...mware version e g 1C06 1 st information for about 2s Controller configuration 2 nd information for about 2s In case D C or D999 is displayed motor interlock is active Refer to Safety mode for details...

Страница 25: ...mode established Refer to Safety mode for details D Power failure F 0 100 valve position 0 closed 100 open Service request 1 S R Cluster address information MA Master SL Slave 0 FEhex cluster address...

Страница 26: ...default values Refer to chapter RS485 interface for details Master 4 Valve and sensor configuration Basic configurations of the Master valve must be adapted according to application needs Refer to cha...

Страница 27: ...DN 100 250 I D 4 10 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 Email reception vat ch www vatvalve com 271149EA 2007 06 12 27 77 Address setting via g...

Страница 28: ...ge s 10 Command header none a Cluster address high byte in hexadecimal code 0 F b Cluster address low byte in hexadecimal code 0 F c Number of valves high byte in hexadecimal code Master only 0 F d Nu...

Страница 29: ...CR LF Description Address allocation for Slave valve 18 12hex Screenshot Address allocation Each valve connected to the valve cluster system must have its unique cluster address It is possible to addr...

Страница 30: ...n range for RS485 communication must be selected Default for pressure is 0 1 000 000 Default for position is 0 100 000 Local operation Control View or Control Performance Analyzer Remote operation Ref...

Страница 31: ...end VALVE CONFIGURATION 3 Enable or disable ZERO function in menu Setup Sensor 4 Do sensor configuration in menu Setup Sensor 2 Send SENSOR CONFIGURATION 3 6 4 ZERO This function is available on the M...

Страница 32: ...ory which is power fail save The data table can be up downloaded via Control Performance Analyzer software or remote interface Due to encoding the data may not be interpreted directly By an OPEN VALVE...

Страница 33: ...conductance of valve l s refer to Technical data n number of valves in valve cluster qL 39 4 pSFS Cmin n qL gasflow for learn sccm pSFS sensor full scale pressure Torr Cmin min controllable conductanc...

Страница 34: ...ds for details Select or enter pressure setpoint Send PRESSURE CONTROL 3 10 1 Operation with 2 sensors applicable for 650 K version only If 2 sensor operation is enabled changeover between the sensors...

Страница 35: ...rately below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas con...

Страница 36: ...mands for details Set gain factor in menu Setup Control Parameter Send PID CONTROLLER CONFIGURATION 3 10 2 2 Sensor delay adjustment Sensor delay adjustment effects Stability Default value is 0 Adjust...

Страница 37: ...epending on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flo...

Страница 38: ...Use optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed u...

Страница 39: ...1 Fax 41 81 771 48 30 Email reception vat ch www vatvalve com 271149EA 2007 06 12 39 77 Active digital inputs have higher priority than RS485 commands a Configuration with switches for digital inputs...

Страница 40: ...itzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 Email reception vat ch www vatvalve com 271149EA 2007 06 12 40 77 b Configuration with voltage source for digital inputs Note Do not connect other pin...

Страница 41: ...umventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 Email reception vat ch www vatvalve com 271149EA 2007 06 12 41 77 3 11 3 Connection cable drawing Half duplex Full duplex...

Страница 42: ...verse RS485 control command have been received The function is activated when optocoupler is on in non inverted configuration The function is activated when optocoupler is off in inverted configuratio...

Страница 43: ...escription code description data range identification sign ascii 35 aaa device address 000 999 c command refer to standard command set Example Description Send Close command to valve with RS485 device...

Страница 44: ...NGE CONFIGURATION for details Change to POSITION CONTROL mode and transfer of position SETPOINT value resp reading of position SETPOINT Note Reading returns position setpoint only in case pressure con...

Страница 45: ...SED 4 OPEN 5 PRESSURE CONTROL 6 HOLD 7 LEARN 8 INTERLOCK OPEN by digital input 9 INTERLOCK CLOSED by digital input C power failure D safety mode E fatal error read FATAL ERROR STATUS for details c 0 n...

Страница 46: ...CR LF i 36 abcdefgh CR LF PRESSURE CONTROL STATUS data length 8 characters a 0 no pressure control e g if position control is selected 1 wide range control PD control 2 close up control PID control c...

Страница 47: ...er failure battery ready 1 power failure battery not ready d 0 compressed air supply ok only series 65 1 compressed air supply not ok only series 65 efgh reserved do not use This function returns warn...

Страница 48: ...f 0 ok 1 pressure not raising during LEARN gasflow missing g 0 ok 1 sensor unstability during LEARN h reserved do not use This function checks the status of LEARN and indicates if the conditions durin...

Страница 49: ...ring counts as one cycle Get i 72 CR LF i 72 xxxxxxxxxx CR LF POWER UP COUNTER data length 10 characters xxxxxxxxxx number of power ups This function returns the number of control unit power ups Get i...

Страница 50: ...1 enabled frozen g access mode 0 local 1 remote 2 locked remote h control mode 1 synchronization 2 POSITION CONTROL 3 CLOSED 4 OPEN 5 PRESSURE CONTROL 6 HOLD 7 LEARN 8 INTERLOCK OPEN by digital input...

Страница 51: ...en communication to service port is interrupted the valve will automatically change to remote operation Set s 20 abcdefgh CR LF s 20 CR LF Get i 20 CR LF i 20 abcdefgh CR LF INTERFACE CONFIGURATION 1...

Страница 52: ...s 01 abcdefgh CR LF s 01 CR LF Get i 01 CR LF i 01 abcdefgh CR LF SENSOR CONFIGURATION data length 8 characters a 0 no sensor 1 1 sensor operation sensor 1 input 2 2 sensor operation with automatic ch...

Страница 53: ...n range between the valve and the host computer for POSITION PRESSURE and SENSOR READING Note In case ZERO has been performed gauge offset for PRESSURE and SENSOR READING is compensated Note In case 2...

Страница 54: ...ers starting with a zero xxxxxxx Pressure limit for LEARN value depends on configuration refer to RS485 setup commands RANGE CONFIGURATION for details This command starts LEARN By OPEN VALVE CLOSE VAL...

Страница 55: ...t ramp 0 0 0 1 0 5 2 1 0 3 1 5 4 2 0 5 2 5 6 3 0 7 3 5 8 4 0 9 4 5 A 5 0 B 5 5 C 6 0 D 6 5 E 7 0 F 7 5 G 8 0 H 8 5 I 9 0 J 9 5 K 10 0 efgh 0000 reserved do not change This command selects gain factor...

Страница 56: ...moving 02 enable freeze mode and move to close position 03 enable freeze mode and move to open position This function can be used to independently control an individual valve in the cluster The comma...

Страница 57: ...R LF Setup ZERO disabled E 000060 CR LF Device Status Command not accepted due to local operation E 000080 CR LF Command not accepted due to synchronization CLOSED or OPEN by digital input safety mode...

Страница 58: ...taminated or gate seal heavyly sticking Clean valve and or replace gate seal according to Maintenance procedures CLOSE VALVE does not work Safety mode active check for D on display Maintenance mode ac...

Страница 59: ...ming ZERO Pressure is not 0 after ZERO Sensor offset voltage exceeds 1 4V Replace pressure gauge Safety mode active check for D on display Provide power to motor to allow for operation Refer to Electr...

Страница 60: ...performed by the customer or has to be carried out by VAT The fabrication number on the valve made in Switzerland Fabrication No patented A Fabrication number has always to be specified All supplies e...

Страница 61: ...d under increased temperature In this case grease will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT can give the following recommendations for preventive maintenance u...

Страница 62: ...Allen wrench 5mm 3 Open valve Caution Stand away from valve pendulum plate moves out of the valve body 4 Unfasten mounting screw for pendulum plate For reinstall the pendulum plate tighten the mounti...

Страница 63: ...directly expose seals actuator and retaining pin feedthroughs to air stream 13 Clean or replace gate seal if necessary Install gate seal to sealing ring without grease body seal Soft tool o ring remov...

Страница 64: ...n reverse order step 9 3 18 Close the valve bonnet see steps 40 42 19 Release the valve from safety mode Refer to Safety mode for details 20 Move the valve to position 50 half opened This is necessary...

Страница 65: ...l 27 Lubricate each o ring groove with 0 1 ml vacuum grease Pay attention that grease is distributed constantly over the whole circumference Soft tool o ring remover Vacuum grease 28 Clean or replace...

Страница 66: ...or Allen Wrench 4mm 36 Turn on power of controller Note valve moves to close position 37 Open valve and install sealing ring and pendulum plate in reverse order as they had been disassembled steps 8 t...

Страница 67: ...screw at flange side of actuator 1 turn clockwise adjusts pendulum plate by about 3mm towards open c Restart valve in menu System Recovery d Check pendulum plate position according step 38 and redo a...

Страница 68: ...ssure PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The c...

Страница 69: ...e ESD Precaution All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with pane...

Страница 70: ...8 30 Email reception vat ch www vatvalve com 271149EA 2007 06 12 70 77 Description Required tool 1 Remove female screw locks from POWER SENSOR and INTERFACE connectors Open end wrench 4 5 mm 2 Remove...

Страница 71: ...ce board 6 Remove or replace master board 7 Remove or replace option board 8 Insert master board and interface board in reverse order as disassembled at correct positions seesteps 6 to 5 9 Reconnect f...

Страница 72: ...Maintenance Instructions Series 650 DN 100 250 I D 4 10 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 Email reception vat ch www vatvalve com 271149EA 200...

Страница 73: ...label on valve when ordering spare parts This is to ensure that the appropriate spare parts are supplied 7 1 Control unit Item Description Valve size Product ordering number All sizes 650 Control unit...

Страница 74: ...ml 206792 Syringe of vacuum grease 5ml 206793 4 Actuator shaft seals Viton N 5111 329 2 pcs required per valve 5 Sealing ring shaft seals Viton N 5111 112 12 pcs required per valve N 5111 112 8 pcs re...

Страница 75: ...VDC power supply unit input 100 240 VAC 249775 Control Performance Analyzer package for Windows consisting of software and cable 600SP 99LB 000 Control View software for Windows 248126 free download...

Страница 76: ...ing Description Valve size Product ordering number DN 100 4 65040 DN 160 6 65044 DN 200 8 65046 DN 250 10 65048 Aluminum 32040 QAZV 32044 QAZV 32046 QAZV 32048 QAZV Centering ring with Viton o ring fo...

Страница 77: ...oss or expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging s...

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