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VAT 62714-XE64-3 Series, Руководство по эксплуатации

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6 

1126117EA     (2022-02)

 

 

2. 

Technical Data 

 

Vacuum connection 

M14×1 

Adapters (accessories) 

flange fitting 
tube fitting 

 
DN 10 ISO-KF 
OD ¼",  OD 6 mm 

Installation angle 

any, preferably perpendicular 

Pressure range 

1×10

-8

 … 2 bar (absolute) 

Tightness 

1×10

-9

 mbar l/s 

Gas flow 

1)

 

 
 
62714-XE64-ABG3 
62714-XE64-ABH3 
62714-XE64-ABI3 
62714-XE64-ABJ3 

 
 

 

 

 

  100 sccm F.S. 
  500 sccm F.S. 
 1000 sccm F.S. 
 5000 sccm F.S. 

Response time 

<30 ms 

Supply voltage 
Control range 
Power 
Duty cycle 

0 … 24 VDC  
20 … 70 mA, 1 … 100% F.S. 
2.5 W 
100% 

Degree of protection 

IP51 

Temperature 

Ambiance 
Bakeout 

 
5 °C … 50 °C 
80 °C (with idle coil) 

Materials 

Housing 
Armature  
Guiding tube 
Springs 
Seals 

 
stainless steel 1.4301 
stainless steel 1.4105 IL 
stainless steel 1.4305, 1.4105 IL 
stainless steel 1.4310 
FPM 

Weight 

96 g 

 

                                                           

1

)   For air at a pressure difference 

∆

p = 1 bar 

Note! 
Basic valves 
without optional 
flange. 

Содержание 62714-XE64-3 Series

Страница 1: ...1126117EA 2022 02 1 Control Valve 62714 XE64 3 Operating Manual ...

Страница 2: ...vided below Validity This document applies to products basic valves without optional flange with part numbers 62714 XE64 ABG3 100 sccm 62714 XE64 ABH3 500 sccm 62714 XE64 ABI3 1000 sccm 62714 XE64 ABJ3 5000 sccm The part number PN can be taken from the product nameplate We reserve the right to make technical changes without prior notice All dimensions in mm made in Switzerland Fabrication No A ...

Страница 3: ...intaining a desired pressure in a vacuum system It must not be used for controlling liquid gases Functional Principle The 62714 XE64 Control Valve opens and closes as a function of the control voltage It will close or remain closed in the event of a power loss Example of a control loop VDM005A X Control Valve Controller e g VCC500 Vacuum pump Pressure sensor Gas inlet Vacuum system ...

Страница 4: ...vironmental damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end user of the product ...

Страница 5: ...mponents are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Communicate the safety instructions to all other users 1 4 Liability and Warranty VAT assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make a...

Страница 6: ...XE64 ABJ3 100 sccm F S 500 sccm F S 1000 sccm F S 5000 sccm F S Response time 30 ms Supply voltage Control range Power Duty cycle 0 24 VDC 20 70 mA 1 100 F S 2 5 W 100 Degree of protection IP51 Temperature Ambiance Bakeout 5 C 50 C 80 C with idle coil Materials Housing Armature Guiding tube Springs Seals stainless steel 1 4301 stainless steel 1 4105 IL stainless steel 1 4305 1 4105 IL stainless st...

Страница 7: ...1126117EA 2022 02 7 Dimensions mm ...

Страница 8: ...8 1126117EA 2022 02 ...

Страница 9: ...xample of a flow rate curve mean values 500 sccm F S at a pressure difference p 1 bar Current solenoid coil mA Gas flow sccm Control valve closed Control valve open 0 100 200 300 400 500 600 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 ...

Страница 10: ...n of the vacuum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area ...

Страница 11: ...1126117EA 2022 02 11 3 1 1 Flange Connections Remove the protective lids and mount two flange connections ...

Страница 12: ... if clamps are opened while the vacuum sys tem is pressurized Do not open any clamps while the vacuum system is pressurized Use the type of clamps which are suited to overpressure DANGER DANGER overpressure in the vacuum sys tem 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak and possibly damage your health Use O rings prov...

Страница 13: ...ng ring ISO KF flange connection Protective lid Clamping ring Watch the flow direction Keep the protective lids Check that the vacuum connections are leak tight 3 1 2 Tube Connections Cut the tube to the required length and remove the burs ...

Страница 14: ... 1126117EA 2022 02 Slide the union nut and clamping rings over the tube Remove the protective lid and insert the tube until the mechanical stop is reached Watch the flow direction Keep the protective lids ...

Страница 15: ...1126117EA 2022 02 15 Slide the clamping rings up to the mechanical stop Tighten the union nut with your fingers ...

Страница 16: ...16 1126117EA 2022 02 Tighten the union nut initial installation by turns stainless steel subsequent installation by turns stainless steel hold stationary Check that the vacuum connections are leak tight ...

Страница 17: ... Electrical Connection The polarity of the 24 VDC connection need not be taken into consideration Before connecting or disconnecting the product turn off the control system Plug in the cable socket and secure it with the screw ...

Страница 18: ... in the event of a power loss 5 De installation Precondition Vacuum system vented DANGER DANGER contaminated parts Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts ...

Страница 19: ...ts take appropriate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area Before connecting or disconnecting the product turn off the control system ...

Страница 20: ...20 1126117EA 2022 02 Procedure Unfasten the lock screw and unplug the cable socket ...

Страница 21: ...1126117EA 2022 02 21 Remove the product from the vacuum system and place the protective lids Flange connections ...

Страница 22: ...22 1126117EA 2022 02 Tube connections AF 17 ...

Страница 23: ...parts can be detrimental to health and environment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Caution Caution vacuum component Dirt and damages impair the function of the vacuum component When handling vacuum components take appropriate measures to ensure cleanliness and...

Страница 24: ...itive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area Procedure Remove the filter from the inlet Protective lid Filter Circlip ...

Страница 25: ...1126117EA 2022 02 25 Mount the filter ø 6 mm Circlip Filter Push in until circlip catches ...

Страница 26: ... 579211 1 tube connection OD 579257 1 tube connection OD 6 mm 579292 Connection cable for 627PM 16GV 000 Controller 3 m 5 m 10 m 15 m 20 m 25 m 627CV 89LC 000 627CV 89LE 000 627CV 89LJ 000 627CV 89LK 000 627CV 89LL 000 627CV 89LX AIK Filter kit comprising 10 poral filter ø6 1 10 circlips 579255 ...

Страница 27: ... harmful substances Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination The form can be downloaded from our website www vatvalve com Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Products not accompanied by a duly completed declarat...

Страница 28: ...nd electric components operating fluids etc can be detrimental to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components according to the following criteria Contaminated components Contaminated components radioactive toxic caustic microbiological hazard etc must be decontaminated...

Страница 29: ...Series 627 1126117EA 2022 02 29 This page has been left blank intentionally ...

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