Series 620
DESCRIPTION OF PRODUCT
1003735EB.DOCX
Edition 2020-01-08
5/26
1.6
Technical data of valve unit
Data
Pressure range at 20
°
C
1 × 10-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20
°
C
< 1 x 10-9 mbar l/s
Leak rate valve seat (local) at 20
°
C
< 1 x 10-9 mbar l/s
Max. differential pressure on plate during isolation
1.0 bar (in opening direction)
1.1 bar (in closing direction)
Max. differential pressure on plate during opening
1 bar (in either direction)
Cycles until first service (unheated and under clean
conditions)
- Pressure control (open - max. throttle - open)
- Closing / opening
1’000’000
200’000
Admissible operating temperature
10°C to +80°C
Mounting position
Any
Process side
materials
body
Stainless steel 316L (1.4404)
plate
Stainless steel 316L (1.4404)
bellows
Stainless steel 316Ti (1.4571)
Seals
bonnet seal
FKM (e.g. Viton
®
)
plate
FKM (e.g. Viton
®
)
Max. controllable conductance (N
2
molecular flow)
400 l/s
Min. controllable conductance (N
2
molecular flow)
0.2 l/s
Full stroke
30 mm
Actuating time
Throttling
(pressure / position control)
0% -> 100% or 100% -> 0%
2 s typ.
Close
0% -> isolated
0% -> close signal
100% -> isolated
100% -> close signal
0.6 s typ.
1.1 s typ.
1.4 s typ.
1.9 s typ.
Open
0% -> 100%
0.8 s typ.
Controller
External control unit (EC2)
Weight
approx. 11 kg
Dimensions
Refer to dimensional drawing (available on request)
