Installation, Operating & Maintenance Instructions
Series 612 DN 40-50 (I.D. 1.5“ - 2”), Logic
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
289419EB
2011-12-12
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3.7 Close
valve
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «Digital inputs» for details)
Push CLOSE button
Send CLOSE VALVE
3.8 Open
valve
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «Digital inputs» for details)
Push OPEN button
Send OPEN VALVE
3.9 Position
control
The valve position is directly controlled according to the position setpoint.
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «Digital inputs» and «Analog inputs
and outputs» for details)
1. Set CONTROL MODE to POSITION CONTROL
Select or enter position setpoint
2. Set
position
SETPOINT
Note: In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher priority.
3.10 Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control performance.
Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve
position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow,
gas type).
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «Digital inputs» and «Analog inputs
and outputs» for details)
1. Set CONTROL MODE to PRESSURE CONTROL
Select or enter pressure setpoint
2. Set
pressure
SETPOINT
Note: In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher priority.
