VAT 075 Series, Инструкции по установке, эксплуатации и обслуживанию

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Series 075 INSTALLATION
601899EC Edition 2014-08-20 11/29
4.2 Installation into the system
WARNING
Hazardous components
Parts, loaded springs, air cushions etc. may move or release a movement and
cause serious injury.
Do not connect or supply electrical power and compressed air before the
product is completely mounted in the system.
NOTICE
Contamination
Product may get contaminated.
Always wear cleanroom gloves when handling the product.
NOTICE
Insufficient stability
Product may get damaged when actuated at this stage.
Do not operate before product is installed completely into the vacuum system.
NOTICE
Wrong tightening torque
Door and screws may get damaged.
Use tightening torque according to the size of the screws.
•
Make sure that sealing surfaces of the door and the chamber are
undamaged. Mount door to a clean system only.
•
Make sure that dimensions and tolerances specified on the dimensional
drawing are strictly met.
1. Mount actuator to the chamber, use screws (99) M6×50 mm; see «Figure 3-1»
on page 8.
Quantity of screws depends on mounting position. For U-Type, 3 screws are
required, for V-Type, 4 screws are required.