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VHS-4, VHS-6 and VHS-250 Diffusion Pumps

FT 3/9

4-3

Inlet pressure surges

Incorrect heater voltage.

Check and correct voltage.

Fluid outgassing.

Condition pump fluid by
operating pump for a few hours.

Leak in system ahead of
pump inlet.

Check and correct.

High chamber contamination

Forepressure too high.

Check for leak in foreline, poor
mechanical pump performance,
breakdown of pump fluid, and
incorrect valve operation.

Prolonged operation at high
throughput at pressure above
10

−

Torr (1.33x10

-3

mbar).

Review operating procedures.

Improper system operation
air-release procedures.

Review operating procedures

Pump will not start

Safety circuits and/or protective
devices prevent contactor from
staying closed.

Check utilities, flow switches,
interlocks, and thermostat
operation.

Table 4-1

Troubleshooting (Continued)

Symptom

Probable Cause

Repair Action

Содержание VHS-4

Страница 1: ...INSTRUCTION MANUAL vacuum technologies VHS 4 VHS 6 and VHS 250 Diffusion Pumps Part No 699901024 Revision A February 2005 ...

Страница 3: ...sponsibility of the user to maintain safe operating conditions at all times Vacuum Technologies assumes no liability for personal injury or damage resulting from operation or service of the equipment Vacuum Technologies has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe use and disposal of hazardous or potentially haza...

Страница 4: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps This page intentionally left blank ...

Страница 5: ...bereinstimmt auquel se réfère cette déclaration est conforme à la auz norme s ou au x document s normatif s al que se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione è conforme alla e sequente I norma o documento I normativo i Frederick C Ca...

Страница 6: ...VHS 4 VHS 6 and VHS 250 Diffusion Pump This page intentionally left blank ...

Страница 7: ...ter Connections 1 11 Electrical Connections 1 12 Thermal Switch 1 13 Startup 2 1 Shutdown 2 2 General Maintenance 3 1 Inspection Requirements 3 1 Cleaning 3 2 VHS 4 and VHS 6 Cold Cap Removal Installation 3 3 VHS 250 Cold Cap Removal Installation 3 4 Jet Assembly Removal Installation 3 5 Heater Replacement 3 8 Pump Fluid Charge 3 10 Leakage 4 1 Outgassing 4 1 Poor Pump or System Performance 4 2 ...

Страница 8: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps This page intentionally left blank ...

Страница 9: ...4 VHS 6 Wiring Information 1 6 1 5 VHS 250 Speed and Throughput Curves 1 8 1 6 VHS 250 Wiring Information 1 8 3 1 VHS4 and VHS 6 Cold Cap Removal Installation 3 3 3 2 VHS 250 Cold Cap Removal Installation 3 4 3 3 VHS 4 Diffusion Pump Jet Assembly 3 6 3 4 VHS 6 and 250 Diffusion Pump Jet Assembly 3 7 3 5 VHS 6 and VHS 250 Heater Mounting 3 8 3 6 VHS 4 Heater Mounting 3 9 ...

Страница 10: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps This page intentionally left blank ...

Страница 11: ...fications 1 1 1 2 VHS 4 Dimensions 1 5 1 3 VHS 6 Dimensions 1 7 1 4 VHS 250 Dimensions 1 9 4 1 Troubleshooting 4 2 5 1 VHS 4 Models 5 1 5 2 VHS 4 Replacement Parts 5 1 5 3 VHS 6 Models 5 2 5 4 VHS 6 Replacement Parts 5 3 5 5 VHS 250 Models 5 4 5 6 VHS 250 Replacement Parts 5 4 ...

Страница 12: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps This page intentionally left blank ...

Страница 13: ...e instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards Documentation Standards This manual uses the following documentation standards WARNING Warnings are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to ...

Страница 14: ...ures and interlocks as recommended Refer to the following tables for a list of general hazards and recommended actions a list of prohibited actions that can result in explosions and a list of pressurization hazards that can result in damage to equipment THE INSTALLATION OPERATION AND SERVICING OF DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE HAZARDS LISTED IN THIS SECTION ANY ONE OF WHICH IN THE ABS...

Страница 15: ...ack to interlock the heater power supply Water trapped between inlet and outlet of Quick Cool Coil or liquid nitrogen trapped between inlet and outlet of liquid nitrogen trap Provide vent or pressure relief valves for both Quick Cool Coil and liquid nitrogen trap Loss of electrical ground integrity Incorporate ground fault interrupt circuit into heater power supply Positive pressure in pumping sys...

Страница 16: ...oxidizer can be air which is a strong oxidizer that is introduced by a leak deliberately brought in via a process or inadvertently admitted by an operator or by a process controller error Explosion and Fire from Acetone and Alcohol Diffusion pumps are typically cleaned with acetone and alcohol When combined with air oxygen and other oxides alcohol and most other solvents are very flammable and exp...

Страница 17: ... plus strong oxidizer Do not open drain or fill plug while pump is under vacuum especially when it is hot Overpressure plus strong oxidizer Do not contaminate pump with explosive vapors Lower explosive threshold of gas mixtures Do not remove defeat or override safety counter measures such as pressure and thermal switches and valve sequencer interlocks Overtemperature overpressure more combustible ...

Страница 18: ...es Systems larger than 10 such as this pump must be designed with pressure relief devices to provide safe pressure relief from internal explosions Always recognize that safety devices can fail or malfunction provide redundant protection by installing devices having different failure modes failure mechanisms and failure causes Be certain that exhaust duct materials are capable of withstanding the c...

Страница 19: ...n or remain after regeneration to cause severe injury or death Pump Fluids Overheating the pump fluid exposing it to air or reactive materials or overpressurizing it above the normal operating range approximately 1 x 10 3 Torr 1 3 x 10 3 mbar decomposes the fluid and possibly makes it toxic This is especially true of backstreamed mechanical pump oils which are more volatile unstable Overheating of...

Страница 20: ...Coils from previous use turns to steam when the pump is reheated This steam must be allowed to escape without coming into contact with personnel Whenever possible design the water system with interlock valves so that power cannot be applied to the pump unless water is flowing in the main cooling coils not the Quick Cool Coils High Voltages Diffusion pump heaters operate at voltages high enough to ...

Страница 21: ...cifications Power Rating VHS 4 1450 Watts VHS 6 2200 Watts VHS 250 2200 Watts Optimum Operating Range Torr VHS 4 and VHS 6 1x10 3 to 5x10 9 1 3 x 10 3 to 6 6 x 10 9 mbars VHS 250 7x10 4 to 5x10 9 9 x 10 4 to 6 x 10 9 mbars Maximum Pumping Speed l s VHS 4 Air 1200 with std cold cap 950 with extended cold cap Helium 1500 with std cold cap 1200 with extended cold cap VHS 6 Air 2400 with std cold cap ...

Страница 22: ...m inlet temperature 60 80 F 15 26 C Maximum outlet temperature at foreline 120 F 48 9 C Flow rate VHS 4 0 15 gpm VHS 6 and VHS 250 0 25 gpm Pressure drop across coils VHS 4 4 psi VHS 6 and VHS 250 15 psi Backing Pump Size VHS 4 10 cfm for maximum throughput VHS 6 and VHS 250 17 cfm for maximum throughput Recommended Jet Assembly 4 stage self aligning stainless steel Foreline Baffle Stacked half mo...

Страница 23: ... watts 120 V 6 5 208 V 19 6 240 V 26 1 Clearance for heater removal 6 minimum Materials Body Flanges Foreline Baffle stainless steel Jet Assembly stainless steel Body Cooling Coils copper Quick Cooling Coil stainless steel Cold Cap nickel plated copper Shipping Weight VHS 4 55 pounds VHS 6 and VHS 250 75 pounds Table 1 1 Pump Operational Specifications Continued ...

Страница 24: ... generated according to AVS Standard 4 1 Figure 1 2 gives the VHS 4 wiring information Figure 1 2 VHS 4 Wiring Information Speed with standard cold cap Speed with extended cold cap Air Speed sec INLET PRESSURE TORR Throughput Torr sec 1800 1200 900 600 300 5 4 3 2 1 10 10 10 9 10 4 10 7 10 10 10 5 10 4 10 3 10 2 10 1 0 0 Note Speed curves were generated according to AVS Standards 4 1 ...

Страница 25: ...wise Inlet Flange Nominal Size 4 ASA ISO 160K 8 CFF Inlet Flange OD 9 00 229 7 09 180 7 96 202 Inlet Flange ID 5 91 150 5 78 147 5 91 150 Inlet Flange Thickness 0 50 13 0 47 12 0 93 24 Inlet Flange Bolt Circle 7 50 191 N A N A 7 12 181 Inlet Flange Number of Holes 8 N A 20 Inlet Range Hole Size 0 69 18 N A N A 33 8 O ring Groove ID 6 06 154 N A N A N A N A O ring Groove Width 0 18 4 N A N A N A N ...

Страница 26: ...usion Pumps 1 6 D R A F T 3 9 0 5 Figure 1 3 shows the VHS 6 speed and throughput curves Figure 1 3 VHS 6 Speed and Throughput Curves Figure 1 4 gives the VHS 6 schematic and wiring information Figure 1 4 VHS 6 Wiring Information ...

Страница 27: ...wise Inlet Flange Nominal Size 6 ASA ISO 200K 10 CFF Inlet Flange OD 11 00 279 9 45 240 9 97 253 Inlet Flange ID 7 88 200 7 72 196 7 88 200 Inlet Flange Thickness 0 75 19 0 47 12 0 96 24 Inlet Flange Bolt Circle 9 50 241 N A N A 9 12 232 Inlet Flange Number of Holes 8 N A 24 Inlet Range Hole Size 0 81 21 N A N A 33 8 O ring Groove ID 8 20 208 N A N A N A N A O ring Groove Width 0 18 4 N A N A N A ...

Страница 28: ...n Pumps 1 8 D R A F T 3 9 0 5 Figure 1 5 shows the VHS 250 speed and throughput curves Figure 1 5 VHS 250 Speed and Throughput Curves Figure 1 6 gives the VHS 250 schematic and wiring information Figure 1 6 VHS 250 Wiring Information ...

Страница 29: ...lectrical Box Degrees from Foreline 30 counterclockwise Inlet Flange Nominal Size ISO 250F Inlet Flange OD 13 19 335 Inlet Flange ID 10 75 273 Inlet Flange Thickness 0 63 16 Inlet Flange Bolt Circle 12 205 310 Inlet Flange Number of Holes 12 Inlet Range Hole Size 0 44 11 O ring Groove ID 10 95 278 O ring Groove Width 0 14 4 Foreline Flange Nominal Size 1 ASA OD 5 00 127 ID 1 88 48 Thickness 0 62 1...

Страница 30: ... Remove flange covers and protective plugs from water connections being careful not to scratch the inlet and foreline flanges O ring seal surfaces 3 Inspect the internal jet assembly It should be concentric and firmly seated on the bottom of the diffusion pump and the ejector nozzle must be directly in line with the foreline The location of the jet is controlled by an indexing pin located on the b...

Страница 31: ...aling surface 5 Check the fill and drain plugs for tightness and apply light to medium torque enough to compress the O rings 6 Using an appropriate lifting apparatus align the bolt holes of the inlet flange with the bolt holes of the mating flange 7 Using the appropriate mounting hardware tighten the bolts evenly until the O ring is compressed and the flanges make light metal to metal contact 8 En...

Страница 32: ... to kill through electrical shock During installation check the drawings and be sure to attach all hazard warning and caution labels Always break the primary circuit of the power supply when direct access to the heater or wring is required Read the safety section in the front of this manual The diffusion pump has been designed to operate at a specific voltage The voltage is specified on the label ...

Страница 33: ...g water or high inlet pressure WARNING Failure to properly connect the thermal switch circuit can result in catastrophic injury to personnel and major damage to the pump or vacuum system Connect the thermal switch in series with the heater In the event of overtemperature the thermal switch opens and shut off the power to the pump Reset the thermal switch by pressing the button located at the cente...

Страница 34: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps This page intentionally left blank D R A F T 3 9 0 5 ...

Страница 35: ...er unless cooling water is circulating It causes the pump fluid to overheat 2 1 Startup During initial operation of the diffusion pump a fresh charge of diffusion pump oil may go through a degassing process This can result in inlet and foreline pressure fluctuations These pressure fluctuations are normal 1 Visually inspect the sight glass assembly to ensure that the diffusion pump has been charged...

Страница 36: ...e 2 2 Shutdown 1 Turn off the power to the diffusion pump and continue to back the diffusion pump with the appropriate mechanical pump 2 Allow cooling water to flow through the diffusion pump until the pump body temperature located just above the boiler plate has cooled to a temperature of approximately 130 F After isolating the backing pump the diffusion pump can be vented to atmosphere If faster...

Страница 37: ...u examine the following items regularly When the pump is cold check the condition and level of the fluid Withdraw a fluid sample through the drain and visually check the level of the fluid through the sight glass A slight discoloration of the fluid does not affect performance NOTE Always use new O rings when replacing fill plugs or the sight glass Loss of fluid can be caused by any of the followin...

Страница 38: ... the jet assembly and the foreline baffle from the pump 7 Thoroughly clean the diffusion pump body interior and the jet assembly using acetone followed by an isopropyl alcohol rinse 8 Dry the pump and the jet assembly with clean dry oil free compressed air 9 Install the foreline baffle the jet assembly and the cold cap assembly in the pump body Verify that the ejector nozzle is properly aligned wi...

Страница 39: ...shing 10 until it bottoms 3 Install the ceramic bushing assembly onto the top of the jet cap 8 by threading stud 11 into the tapped hole in the top jet cap Install finger tight 4 Attach spring clip 1 to cold cap 7 with 6 32 screw 2 and washers 3 and 4 so that the clip rests on top of sleeve 12 5 Lower the cold cap assembly carefully onto the top of the jet cap assembly 8 The ceramic bushing fits i...

Страница 40: ...shing 0 until it bottoms 3 Install the ceramic bushing assembly onto the top of the jet cap A by threading stud F into the tapped hole in the top jet cap Install finger tight 4 Attach spring clip J to cold cap 8 with 6 32 screw H so that the clip rests on top of sleeve K 5 Lower the cold cap assembly carefully onto the top of the jet cap assembly A The ceramic bushing fits in sleeve K and the clam...

Страница 41: ...sembly during disassembly or cleaning 4 Remove the splash baffle from the pump To install the jet assembly 1 Place the splash baffle in the bottom of the pump and verify that it is located in the outer boiler groove 2 Insert the jet base making sure the ejector is aligned with the foreline and that the slot in the jet base locks onto the alignment pin 3 Assemble the remaining stages of the jet Ver...

Страница 42: ...umps 3 6 D R A F T 3 9 0 5 Figure 3 3 VHS 4 Diffusion Pump Jet Assembly Jet Cap Jet Plug Inner Rod 2nd Stage Drip Shield 3rd Stage Jet 3rd Stage Drip Shield Jet Tube Assembly Jet Base Ejector Splash Baffle Boiler Plate Jam Nut 4 00 Flat ...

Страница 43: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps D R A F T 3 9 0 5 3 7 Figure 3 4 VHS 6 and 250 Diffusion Pump Jet Assembly ...

Страница 44: ...vely torquing and possibly breaking the heater terminals 5 Remove the nut holding the heater clamp 6 Lower the entire heater unit from the pump and replace the defective heater 7 Coat the boiler stud with an anti seize compound such as FEL PRO C5A or common milk of magnesia 8 Support the heater unit by the heater clamp line up the hole with the boiler stud and push the unit up against the boiler p...

Страница 45: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps D R A F T 3 9 0 5 3 9 Figure 3 6 VHS 4 Heater Mounting Heater Element 647304205 1450 W 120 V 647304210 1450 W 208 V 647304250 1450 W 240 V ...

Страница 46: ...d is designed to open the heater circuit To add pump fluid 1 Turn off power to the pump and allow the pump to cool until the temperature of the pump body measured 1 above the heater skirt has cooled to 130 F 2 Turn off the backing pump 3 Vent the pump to atmosphere 4 Loosen and remove the fill plug located at the top of the sight glass assembly 5 Add pump fluid until the fluid level is even with t...

Страница 47: ... 2 Outgassing High vacuum systems even without external leakage can also exhibit high gas loads due to outgassing from internal surfaces or processes The pressure in the system is a result of gas load divided by pumping speed P Q S If the gas load Q exceeds the maximum throughput capability of the diffusion pump the diffusion pump will not function and the pumping action will essentially be perfor...

Страница 48: ...rty Clean system to reduce outgassing Poor ultimate pressure Contaminated pump fluid Examine clean pump and replace fluid Low heat input Check voltage Check for continuity burned out element poor thermal contact Inadequate cooling water flow Check water pressure Check tubing for obstructions or backpressure Excessive or too cold cooling water Check temperature adjust flow High forepressure Check f...

Страница 49: ... in foreline poor mechanical pump performance breakdown of pump fluid and incorrect valve operation Prolonged operation at high throughput at pressure above 10 3 Torr 1 33x10 3 mbar Review operating procedures Improper system operation air release procedures Review operating procedures Pump will not start Safety circuits and or protective devices prevent contactor from staying closed Check utiliti...

Страница 50: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps This page intentionally left blank D R A F T 3 9 0 5 ...

Страница 51: ...old cap 208 V 86460316 L6256316 L6188316 Standard cold cap 240 V 86460302 L6256302 L6188302 Extended cold cap 240 V 86460312 L6256312 L6188312 Table 5 2 VHS 4 Replacement Parts Part Number Description 86488301 Standard Cold Cap Assembly F6898301 Extended Cold Cap Assembly L8908301 Sight Glass Repair Kit F4785301 Jet Assembly F4780 301 Splash Baffle 86754 301 Foreline Baffle Assembly 642906025 Swit...

Страница 52: ... 1000 cc 695474005 DC 704 Diffusion pump Fluid 500 cc 695475005 DC 70S Diffusion Pump Fluid 500 cc 695405005 Santovac 5 Diffusion Pump Fluid 500 cc 86715001 Spring Cold Cap Commercial Screw Rd hd machine no 8 32x31 416 stainless steel Commercial Stud no 8 32 x 1 2 stainless steel Commercial Screw Socket hd cap no 8 32x11 44 stainless steel Table 5 2 VHS 4 Replacement Parts Continued Table 5 3 VHS ...

Страница 53: ...eplacement nickel 86087001 Heater Insulator 86086301 Heater Clamping Plate 86088301 Heater Cover Plate L8998001 Heater Insulating Blanket L8997001 Heater Cover K0377184 O Ring Kit includes 3 Butyl inlet flange O ring Parker No 2 267 3 Butyl N foreline flange O ring Parker No 2 332 10 Viton fill and drain O rings old style Parker No 2 112 10 Viton fill and drain O rings new style Parker No 2 113 1 ...

Страница 54: ... Pump Voltage Part Number Flange Type ISO Standard cold cap 120 V K0543301 Standard cold cap 208 V K0543306 Standard cold cap 240 V K0543302 Table 5 6 VHS 250 Replacement Parts Part Number Description F9584301 Standard Cold Cap Assembly F9548301 Jet Assembly F3373301 Splash Baffle L9172301 Foreline Baffle Assembly 642906025 Thermoswitch Kit 699006025 Standoff ceramic insulating Cold Cap 647306125 ...

Страница 55: ...er No 2 113 1 Teflon gasket 1 Sight glass O ring Parker No 2 226 K6948301 NEOVAC SY Diffusion Pump Fluid 1000 cc 695474005 DC 704 Diffusion pump Fluid 500 cc 695475005 DC 70S Diffusion Pump Fluid 500 cc 695405005 Santovac 5 Diffusion Pump Fluid 500 cc 86715001 Spring Cold Cap Commercial Screw Rd hd machine no 6 32x3 16 stainless steel Commercial Washer flat no 6 stainless steel Commercial Washer l...

Страница 56: ...VHS 4 VHS 6 and VHS 250 Diffusion Pumps This page intentionally left blank D R A F T 3 9 0 5 ...

Страница 57: ...F lli Varian 54 10040 Leini TO ITALY Fax 39 011 997 9350 Varian Vacuum Technologies Local Office For a complete list of phone fax numbers see www varianinc com vacuum Do not write below this line Notification RA Customer ID Equipment CUSTOMER INFORMATION Company name Contact person Name Tel Fax E mail Ship method Shipping Collect P O Europe only VAT Reg Number USA only Taxable Non taxable Customer...

Страница 58: ...Message Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Describe failure Describe failure Customer application Customer application Cannot calibrate No zero high background Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication ...

Страница 59: ......

Страница 60: ... gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Russia Central coordination through Varian Inc via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 252 Fax 39 011 997 9 316 Taiwan Varian Technologies Asia Ltd 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei...

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