TECHNICAL INFORMATION
26
87-900-851-01(A)
TECHNICAL SPECIFICATION
Pumping speed (l/s)
N
2
: 250 l/s
He: 220 l/s
H
2
: 200 l/s
Compression ratio
N
2
: 2 x 10
8
He: 1 x 10
5
H
2
: 1 x 10
4
Base pressure*
with recommended mechanical fore-
pump:
2 x 10
-10
mbar (1.5 x 10
-10
Torr)
with recommended diaphragm fore
pump:
2 x 10
-8
mbar (1.5 x 10
-8
Torr)
Inlet flange
DN 100 CFF (6" O.D.)
DN 100 ISO
Foreline flange
NW 16 KF
Rotational speed
56000 RPM
Start-up time
< 3 minutes
Recommended
forepump
Two stage rotary pump SD-40
Diaphragm pump: MDP 30
Operating
position
any
Cooling
requirements
Natural air convection
Forced air or water optional
Operating ambient
temperature
+ 5° C to + 35° C
Coolant water
flow: 30 l/h (0.13 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 4 bar
Bakeout
temperature
120° C at inlet CF flange maximum
80° C with ISO flange
Vibration level
(displacement)
<
0.01
µ
m at inlet flange
Noise level
45 dB (A) at 1 meter
Input
58 Vac, three phase, 933 Hz
Lubricant permanent
lubrication
Storage
temperature
- 20° C to + 70° C
Weight kg (lbs)
ISO: 7.5 (3.4); CFF: 11.4 (5.2)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
UPPER VIEW
BOTTOM VIEW
