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Varian Turbo-V250, Инструкция по эксплуатации

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Содержание Turbo-V250

Страница 1: ...UALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA ODHGIES C...

Страница 2: ...Turbo V 250...

Страница 3: ......

Страница 4: ......

Страница 5: ...INFORMATION 25 DESCRIPTION OF THE TURBOPUMP 25 TECHNICAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 30 BASE FIXING KIT INSTALLATION 31 AIR...

Страница 6: ...pompa nel modo SOFT START vedi manuale dell unit di controllo PREPARAZIONE PER L INSTALLAZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero e...

Страница 7: ...andata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar ATTENZIONE Evitare urti o bru...

Страница 8: ...entstehen k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Pumpen m ssen folgende klimatische V...

Страница 9: ...mit einer Heizmanschette Optional ausgeheizt werden Damit die Flanschgrenztemperatur der Turbopumpe 120 C nicht berschreitet sollte immer bei ausheizbaren Vakuumsystemen die TP mit Wasserk hlung arbei...

Страница 10: ...serv es pourraient endommager s rieusement l appareillage NOTE Les notes contiennent des renseignements importants isol s du texte EMMAGASINAGE Pendant le transport et l emmagasinage des pompes il fau...

Страница 11: ...ambre vide la temp rature de la bride d entr e ne doit pas d passer 120 C Utiliser toujours le refroidissement par eau pendant les op rations de chauffage Utiliser toujours le refroidissement par eau...

Страница 12: ...podr an provocar da os al equipo NOTA Las notas contienen informaci n importante extra da del texto ALMACENAMIENTO Durante el transporte y el almacenamiento de las bombas se deber cumplir con las cond...

Страница 13: ...ura de la brida de entrada no deber superar 120 C Utilizar siempre la refrigeraci n por agua durante las operaciones de calentamiento PELIGRO No tocar la turbobomba y sus posibles accesorios durante l...

Страница 14: ...s poderiam causar danos aparelhagem OBS As obs cont m informa es importantes destacadas do texto ARMAZENAGEM Durante o transporte e a armazenagem das bombas n o devem ser superadas as seguintes condi...

Страница 15: ...o o aquecedor opcional Durante o eventual aquecimento da c mara a v cuo a temperatura no flange de entrada n o deve ser superior a 120 C Utilizar sempre o resfriamento com gua durante as opera es de a...

Страница 16: ...wezig zijn temperatuur van 20 C tot 70 C relatieve vochtigheid 0 95 niet condenserend Als de opslagperiode meer dan 9 maanden bedraagt de pomp met de SOFT START wijze opstarten zie handleiding regelee...

Страница 17: ...niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk...

Страница 18: ...rbejdsmetode der skal overholdes for ikke at skabe risiko for skade p udstyret BEM RK Bem rkningerne indeholder vigtige yderligere oplysninger OPLAGRING Under transport og oplagring af pumpene skal f...

Страница 19: ...kke overstige 120 C Brug altid vandafk ling under opvarmningen ADVARSEL R r ikke ved turbopumpen eller eventuelt tilbeh r under opvarmningsman vrerne Den h je temperatur kan for rsage kv stelser p per...

Страница 20: ...framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst OBSERVERA Detta visar p viktig information i texten F RVARING F ljande krav p omgivningsf rh llanden g ller vid...

Страница 21: ...a tryckgr nserna kan pumphuset v rmas med ett s rskilt v rmeaggregat som finns som tillval Under uppv rmningen av pumploppet f r temperaturen vid inloppet aldrig bli h gre n 120 C Under uppv rmningen...

Страница 22: ...r som dersom de ikke f lges kan f re til at utstyret skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten LAGRING N r pumpene transporteres eller lagres m f lgende milj messi...

Страница 23: ...m temperaturen ved inngangsflensen ikke overskride 120 C Bruk alltid vannavkj ling under oppvarmingen ADVARSEL Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperat...

Страница 24: ...voi johtaa laitteen vahingoittumiseen HUOMAUTUKSET Huomautuksissa k yv t ilmi tekstiss k sitellyt t rke t tiedot VARASTOINTI Pumppujen kuljetuksen ja varastoinnin aikana t ytyy seuraavien ymp rist a...

Страница 25: ...tavaa kuumenninta Tyhji kammion mahdollisen kuumentamisen aikana ei sis njohtavan laipan l mp tila saa olla yli 120 C K ytt k aina kuumentamisen aikana vett j hdytykseen VAARA lk koskeko turbopumppuun...

Страница 26: ...suskeu SHMEIWSH SHMEIWSH SHMEIWSH SHMEIWSH Oi shmei seij peri coun shmantik j plhrofor ej pou coun apospaste ap to ke meno APOQHKEUSH APOQHKEUSH APOQHKEUSH APOQHKEUSH Kat th di rkeia thj metafor j ka...

Страница 27: ...opoie te p nta ugr y xh KINDUNOS KINDUNOS KINDUNOS KINDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl...

Страница 28: ...storage time is longer than 9 months start the pump using the SOFT START mode see control unit manual PREPARATION FOR INSTALLATION The pump is supplied in a special protective packing If this shows s...

Страница 29: ...or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar CAUTION Avoid impacts or harsh movements of the pump when in operation The bearings...

Страница 30: ...ol ler through a 6 pin socket on the side of the pump The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 m The pump can operate in any position and can be supporte...

Страница 31: ...requirements Natural air convection Forced air or water optional Operating ambient temperature 5 C to 35 C Coolant water flow 30 l h 0 13 GPM temperature 10 C to 30 C pressure 3 to 4 bar Bakeout temp...

Страница 32: ...ph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum...

Страница 33: ...speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on either pump series and is supplied with a small tab for easy removal see...

Страница 34: ...shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C The heater band model 969 9803 and 969...

Страница 35: ...ooling is insufficient The kit is assembled as shown in the figure Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circuit cooling sys...

Страница 36: ...om the rear as shown in the diagram and screw them in ensuring that they do not protrude from the other end Use the Allen key supplied for this purpose Turn the pump the right way up Fix the pump to a...

Страница 37: ...maximum power 2 16 W dimensions 60x60 mm 2 36x2 36 inches Specification for large fan mod 969 9313 The low power fan can also be mounted under the pump as shown in the figure air flow 25 l s 51 CFM in...

Страница 38: ...0 mm hexagonal span ner CAUTION The vent valve mod 969 9833 enables undesired pump areation during a temporary power failure 5 sec maximum to be avoided and enables an automatic vent operation Do not...

Страница 39: ...temporary power failure adjustable time up to 36 min and enables an automatic vent operation Vibration isolators for both ISO and CF version pumps are available as accessories They can re duce the vib...

Страница 40: ...mend using Varian hardware 8 Fore vacuum pump connecting flange 9 Oil mist eliminator To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protrud...

Страница 41: ...nge KF 16 NW is available to connect the Turbo V 250 to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be e...

Страница 42: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 43: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 44: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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