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Turbómolekuláris szivattyúkhoz

A turbómolekuláris szivattyúk – ahogy a következ

gépkönyvben le van írva – nagy

mozgási energiával rendelkeznek a nagy forgási sebességük és a rotorok fajlagos tömege
miatt.

A rendszer hibás m

ködése – például a rotor/állórész érintkezési hibája vagy akár a

forgórész széttörése – esetén a forgási energia felszabadulhat.



VIGYÁZAT!

A berendezés károsodásának és a kezel

személyzet sérülésének

megel

zésére az ebben a gépkönyvben adott telepítési utasításokat

szigorúan be kell tartani!

Содержание Turbo-V 2K-G

Страница 1: ...IENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA ODHGIES CRHSEWS FELHASZN L I K...

Страница 2: ...Turbo V 2K G...

Страница 3: ......

Страница 4: ......

Страница 5: ...Protocol 77 Window Meanings 79 MONITORR 81 Powering on the MoniTorr 81 Operation 81 Maintenance 81 MoniTorr Installation on the Network and on the Main PC 81 MoniTorr Connectivity Kit Installation Pro...

Страница 6: ...lla alta velocit di rotazione in unione alla massa speci fica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia d...

Страница 7: ...Turbomolecolari Varian devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti con dizioni ambienta...

Страница 8: ...La Turbo V 2K G ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibi le Assicu...

Страница 9: ...te Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Il sistema fornito di un LED verde pilotato...

Страница 10: ...dung mit dem spezifischen Ge wicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k n...

Страница 11: ...olekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einla gerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werd...

Страница 12: ...die Gegenkonnek toren zu verwenden Der Turbo V 2K G hat Verbinder f r den Ein und Ausgang und die Schnittstellenkommunikation die an die Au enkreise ange schlossen werden m ssen soda kein Teil unter S...

Страница 13: ...ungskabel d rfen nur die PN 969 9957 oder 969 9958 verwendet werden Das Kabel ist am Controller mit der hierf r vorgesehenen Schelle zu befestigen siehe nachstehende Abbildung Verwenden Sie dieses Kab...

Страница 14: ...grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation p...

Страница 15: ...formances et la fiabilit maximales des pompes turbomol culaires Varian il est indispensable de res pecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp r...

Страница 16: ...ction IP 54 Le Turbo V 2K G dispose de connecteurs pour les en tr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de fa on qu aucune partie sous tension n...

Страница 17: ...9957 ou 969 9958 et le fixer au contr leur l aide de la bride pr vue voir la figure ci dessous Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d...

Страница 18: ...bido a la alta velocidad de rotaci n en combi naci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del...

Страница 19: ...superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad So...

Страница 20: ...s suministrados adjuntos El Turbo V 2K G tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo ten...

Страница 21: ...de la correspondiente abrazadera v ase la siguiente figura Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los...

Страница 22: ...ergia cin tica devida alta velocidade de rota o unida massa espec fi ca de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o e stator ou uma ruptura do ro...

Страница 23: ...e e fiabilidade das bombas Turbomoleculares Varian devem ser observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as segui...

Страница 24: ...ie para garantir o isolamento IP 54 O Turbo V 2K G tem dois conectores para as entradas sa das e para a comunica o de s rie que devem ser ligados aos circuitos externos de modo a n o permitir o acesso...

Страница 25: ...os PN 969 9957 ou 969 9958 e fixar o cabo ao controller utilizando a bra adeira espec fica ver a figura que se segue Utilize este cabo e tomada juntos com uma tomada adequadamente conectada a terra pa...

Страница 26: ...energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rot...

Страница 27: ...e voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid...

Страница 28: ...G bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Controleer of...

Страница 29: ...opsluitbeugel zie volgende figuur Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen Het systee...

Страница 30: ...h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan...

Страница 31: ...lde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Varian S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flyt...

Страница 32: ...on Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opn adgang til de sp ndingsf rende dele Kontroll r at anordningen der er tilsluttet Turbo V 2K G har en passende...

Страница 33: ...ektive konsol se nedenst ende figur Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske st d og opfylde kravene if lge CE EF normerne...

Страница 34: ...otationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenerg...

Страница 35: ...de anvisningar f r att garantera optimal pre standa och drifts kerhet f r Varian turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temp...

Страница 36: ...r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon sp nningsf rande del Kontrolle...

Страница 37: ...ast str mkabeln art nr 969 9957 eller 969 9958 F st str mkabeln vid styrenheten med hj lp av en l mplig f stbygel se f ljande figur Anv nd sladden och kontakten tillsammans med en jordad anslutning f...

Страница 38: ...erginiv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller br...

Страница 39: ...optimal drift og p litelighet for Varian turbomolekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C...

Страница 40: ...stykker for inn utgangene og seriekommunikasjonen som m koples til de ytre str mkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til Tu...

Страница 41: ...eller 969 9958 og fest den til styreenheten med det bestemte festet se figuren nedenfor Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overholde EU f...

Страница 42: ...utuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergia...

Страница 43: ...VARASTOINTI Noudata seuraavia ohjeita jotta Varian turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhte...

Страница 44: ...uja liittimi taataksesi IP54 eristyksen Turbo V 2K G laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen...

Страница 45: ...ketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t J rjestelm on varustettu vihre ll LED valolla jota ohjataan tilasignaalilla Vihre LE...

Страница 46: ...ODHGIES CRHSHS 41 87 900 968 01 C KINDUNOS...

Страница 47: ...ro san na prokal soun bl bej sth suskeu SHMEIWSH Oi shmei seij peri coun shmantik j plhrofor ej pou coun apospaste ap to ke meno APOQHKEUSH Gia na egguhqe to M gisto ep pedo leitourgik thtaj kai axiop...

Страница 48: ...rositov kanevna mevro upov tavsh Bebaiwqeivte ovti h movnwsh th sundemevnh diavtaxh ston Turbo V 2K G evcei mia ka tavllhlh movnwsh akovma kai se katavstash monhv blavbh ovpw problevpetai apov ton kan...

Страница 49: ...rmation Stam thma Ektakthj An gkhj Gia na stamathvsete se sunqhvke evktakth anavgkh to Turbo V 2K G prevpei na bgavlete to kalwvdio trofodovthsh apov ton controller SUNTHRHSH To Turbo V 2K G de crei z...

Страница 50: ...val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si energ...

Страница 51: ...Varian Turbomolecular szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param ter...

Страница 52: ...munik ci s csatl z sai vannak amelyeket gy kell k ls ramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Haszn lja a mell kelt csatlakoz kat az IP 54 v delmi fokozat fenntart s...

Страница 53: ...a vez rl h z alkalmas tart bilincs seg ts g vel l sd k vetkez bra Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen...

Страница 54: ...bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa m...

Страница 55: ...te z tekstu MAGAZYNOWANIE W celu zagwarantowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Varian musz by przestrzegane nast puj ce zalecenia podczas transportu przesu...

Страница 56: ...j ciowe wyj ciowe i dla komunikacji szeregowej kt re musz by pod czone do obwod w zewn trznych w spos b aby adna cz znajduj ca si pod napi ciem nie mog a by dost pna Nale y upewni si e izolacja pod cz...

Страница 57: ...iednim wspornikiem patrz niniejszy rysunek Kabel ten pod czy wraz z wtyczk do kontaktu uziemionego celem unikni cia pora e pr dem elektrycznym oraz spe nienia wymog w norm CE System jest wyposa ony w...

Страница 58: ...du obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotor...

Страница 59: ...P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rn v v vy mus u ivate...

Страница 60: ...v va Turbo V 2K G je vybavena vstupn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Pro zachov n ochr...

Страница 61: ...69 9958 pro nap jec kabel a p ipevn te jej k regul toru vhodnou p chytkou viz n sleduj c obr zek Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem...

Страница 62: ...e k mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zr caniu rotora sa...

Страница 63: ...rne v vevy zna ky Varian pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t...

Страница 64: ...or vyhovuje uvedenej kateg rii Zariadenie Turbo V 2K G m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj m okruhom tak aby nebola dostupn iadna elektrick s...

Страница 65: ...hodn mi svorkami pozri nasleduj ci obr zok T to n ru so z str kou pou vajte spolu s vhodne uzemnenou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Syst m je v...

Страница 66: ...o kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko spros...

Страница 67: ...omolecular se morate dr ati naslednjih vodil Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do...

Страница 68: ...na napetost ki je v vskladu z zgornjo kategorijo Naprava Turbo V 2K G ima vhodne izhodne in serijske pri klju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Za...

Страница 69: ...dite na upravljalec s posebnim nosilcem glej naslednjo skico Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Sistem ima zel...

Страница 70: ...gy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational e...

Страница 71: ...nd reliability of Varian Turbomolecular pumps the following guide lines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temper...

Страница 72: ...y the above category The Turbo V 2K G has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Use the provi...

Страница 73: ...ans of the suitable retaining bracket see the following figure Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirement...

Страница 74: ...ic blades of the stator are made of alumin ium alloy These are supported and accurately po sitioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumpin...

Страница 75: ...dedicated controller is a solid state frequency converter which is driven by a single chip micro computer The controller can be operated by a remote host computer via the serial connection a Windows b...

Страница 76: ...61000 3 3 Limitation of voltage changes voltage fluc tuations and flicker EN 61000 6 2 and EN 61326 Immunity for industrial envi ronments which recall EN 61000 4 2 Electrostatic discharge phenomena E...

Страница 77: ...INFORMATION 72 87 900 968 01 C Throughput and power curves for Argon power limit 350 W Data with 80 m3 h primary pump Throughput and power curves for Nitrogen power limit 400 W Data with 80 m3 h prim...

Страница 78: ...ontrol the Turbo V 2K G It is a 15 pins D type connector the available sig nals are detailed in the table the following para graphs describe the signal characteristics and use PIN N SIGNAL NAME INPUT...

Страница 79: ...e default value is 555 Hz it is settable via serial line by means of window 121 see the serial command table If a continuous signal is applied pin 5 connected to pin 9 the driving frequency is set to...

Страница 80: ...becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes closed and stays colsed until the frequency becomes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to mask the s...

Страница 81: ...ose def win 122 1 Vent Open win 145 0 Purge Close def win 145 1 Purge Open Win 126 set the Vent Valve Opening Delay from 0 to 65535 1bit 0 2s def 10s 50bit Win 147 set the Vent Valve Open Time from 0...

Страница 82: ...w a string of 3 numeric char acter indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph COM Command 0x30 to read the window 0x31 to write into the win...

Страница 83: ...cified window Win Disabled 1 byte 0x35 The specified window is Read Only or tempo rarily disabled for ex ample you can t write the Soft Start when the Pump is running NOTE The RS 485 is a 2 wire gnd o...

Страница 84: ...owing 101 R W N Set Point type 0 Frequency 1 Current 2 Time 3 Status default 3 N Read Write Data Type Description Admitted Values 102 R W N Set Point threshold expressed in Hz mA or s default 500 103...

Страница 85: ...ater max 200 R N Pump current in mA dc 201 R N Pump volt age in Vdc 202 R N Pump power in W pump current X pump voltage X duty cycle 203 R N Driving fre quency in Hz N Read Write Data Type Description...

Страница 86: ...wnload program where are stored and where can be analyzed by Varian s specialised person nel Maintenance The MoniTorr card doesn t require any mainte nance Any intervention must be carried out by auth...

Страница 87: ...nload Program PC FileDW Setup exe on CD rom see In stalling the File Download Software paragraph 8 Connect the RS232 cable from PC to Protocol Converter 9 Connect the RS485 cable between the proto col...

Страница 88: ...ectivity kit comes with the soft ware needed to transfer via RS 485 all the data stored To install the software simply insert disk ette No 1 into the personal computer drive and run the Setup program...

Страница 89: ...an the net work and it continuously downloads the file when it is ready The program is configured to work with the COM 1 serial port If a change is required click the right mouse button with the curso...

Страница 90: ...mer should send by e mail the compressed CAB file every archive time pe riod to Varian Technical support at the following address vtt technical support varianinc com Only for information all files are...

Страница 91: ...e first 45 seconds after the interface power on Controller address searching phase or after the controller power on 2 pulses ProfiBus link not established yet ProfiBus state machine not in Regular dat...

Страница 92: ...scale and the meaning of some parame ters depends directly to the specific model of Turbo Pump controller connected to the interface PROFIBUS MESSAGE MAPPING PARAMETER BUFFER 17 BYTES OFFSET BYTE SIZ...

Страница 93: ...ump 1 at start the interlock must be present only at start command 110 B3 Setpoint Logic 0 active close NO 1 active open NC 104 B4 Heather Jacket Mode Auto man Specific option not available on standar...

Страница 94: ...ter a stop command the controller will brake the pump using the motor activate this function only if you don t use the vent valve and for few cycles at week 107 B3 Vent Valve On Off 0 close 1 open Val...

Страница 95: ...If Pump Body Temperature Limit In Buff byte 25 the controller will re duce the Max Allowable Power If 38 C the controller goes in fail pump over temperature and the pump is stopped 216 23 1 C 0 100 Co...

Страница 96: ...f byte 8 is high speed Out Buff byte 1 1 on the target speed In Buff byte 8 is low speed Out Buff byte 3 001 B2 Soft Start Status 0 on 1 off this function is active at first pump run up and can t be d...

Страница 97: ...s in the diagnosis frame signals which parameter is wrong i e over range or under range Diagnostic buffer OFF SET MEANING 0 B0 station non exist set by master B1 station not ready slave not ready for...

Страница 98: ...ter The inlet screen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure It is welded to the center ring of the ISO 250 F...

Страница 99: ...n to the pump through the purge port connect a gas purge line to the pump The purging device automatically provides 20 sccm when fed with 1 bar 14 psi absolute at mospheric pressure CAUTION To prevent...

Страница 100: ...is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radia tion and hence the rotor may be overheated while static parts of the p...

Страница 101: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 102: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 103: ...Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81...

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