2000 MS Hardware Maintenance
152
Troubleshooting
of Diffusion Pump System
c. Check for air leaks. Refer to
How to Check for Leaks
.
d. Check the fluid level in the diffusion pump.
e. Check the level and condition of foreline pump oil.
f. Check the foreline hose between the diffusion pump and foreline pump
for cracks or collapsed sections.
g. Check all the vacuum seals: diffusion pump, elbow, foreline pump, etc.
h. If a foreline trap is used, replace the pellets.
i. Replace the thermocouple gauge.
j. Contact Varian Customer Support Representative.
k. TEC
Failure
l. Check cable connections. Connectors and pins are differentiated by
size.
m. Contact Varian Customer Support Representative.
3. Peltier Baffle Fan Failure
a. Check the fan on the rear panel.
b. Contact your Varian Customer Support Representative.
4. Thermocouple Gauge Failure
c. Check the cable connections.
d. Open filament. Gauge must be replaced.
e. Contact Varian Customer Support Representative.
5. Diffusion Pump Overheated
a. Check the pump is plugged into the diffusion pump controller.
b. Ensure left side cover is in place. Side panel of GC is in place.
c. Check the fan.
d. Contact Varian Customer Support Representative.
6. Diffusion Pump Heater Failure
a. Check pump is plugged into diffusion pump controller.
b. Replace heaters to diffusion pump.
c. Contact Varian Customer Support Representative.
Problems During Routine Operation
The USER should check for faults by going to the Diagnostics page and checking
the Pump Status under
Vacuum System.1. Foreline Pressure Readings
.
1. At typical column flows (0.3-1.0 mL/minute) the foreline pressure will be
approximately 0-100 mTorr. If the foreline pressure is significantly above
100 mTorr:
a. Ensure column flow rate does not exceed 1.0 mL/minute.
b. Check for air leaks. Refer to
How to Check for Leaks
.
c. Check the level and condition of the diffusion pump fluid.