Varian MidiVac 929-5000 Скачать руководство пользователя

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87-900-080-01 (D)

APRIL 2006

(I)

MANUALE DI ISTRUZIONI

(D)

BEDIENUNGSHANDBUCH

(F)

NOTICE DE MODE D’EMPLOI

(GB) INSTRUCTION MANUAL

MidiVac

Controller

Model 929-5000
Model 929-5001
Model 929-5002
Model 929-5003
Model 929-5004
Model 929-5005
Model 929-5006
Model 929-5007

vacuum technologies

Содержание MidiVac 929-5000

Страница 1: ...ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL MidiVac Controller Model 929 5000 Model 929 5001 Model 929 5002 Model 929 5003 Model 929 5004 Model 929 5005 Model 929...

Страница 2: ...MidiVac Controller...

Страница 3: ......

Страница 4: ......

Страница 5: ...USE 19 TECHNICAL INFORMATION 25 MIDIVAC CONTROLLER DESCRIPTION 25 MIDIVAC CONTROLLER SPECIFICATION 27 MIDIVAC CONTROLLER OUTLINE 27 PUMP CONNECTION 28 REMOTE I O CONNECTOR 28 USE 30 Setting Mode 30 Op...

Страница 6: ...MidiVac della Varian un controller per le pompe ioniche L unit pu essere preconfigurata in fabbrica a seconda delle necessit del cliente o possono essere ordinate separatamente dall utente le schede...

Страница 7: ...VE essere inserito in un adattatore alto quattro unit rack a causa del suo peso Il pannello frontale del MidiVac non previsto per reggere il peso dell unit Non installare o utilizzare il controller in...

Страница 8: ...degli indicatori NOTA Alcuni controlli ed indicatori variano la loro funzione ed il loro significato in funzione della posizione dell interruttore HV ON OFF La tabella riporta entrambi i significati e...

Страница 9: ...zzando la corrente assorbita dalla pompa 8 KV Quando acceso indica che il display 9 sta visualizzando la tensione erogata dal controller 9 Display Visualizza i valori delle tensioni e delle correnti s...

Страница 10: ...a inferiore al valore di soglia impostato in questo caso dopo un periodo di assestamento di 30 secondi durante il quale non viene controllata la corrente il controller spegne l alta tensione nel caso...

Страница 11: ...ezionare il modo di funzionamento Start Portare su OFF l interruttore HV 12 Se si vuole accendere l alta tensione anche se la corrente superiore al livello di Protect portare su ON l interruttore HV 1...

Страница 12: ...er Firma Varian ist ein Ger t zur Steuerung von Ionenpumpen Das Ger t kann im Werk nach den Angaben des Kunden voreingestellt werden oder in Einzelkomponenten geliefert werden so da der Kunde den Cont...

Страница 13: ...afel des MidiVac Controllers ist nicht geeignet das gesamte Gewicht der Einheit zu tragen Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Sc...

Страница 14: ...zeigen Tabelle beschrieben ANMERKUNG Die Bedeutung und Funktion der Schalter und Anzeigen ist von der jeweiligen Stellung des Hochspannungs schalters HV ON OFF abh ngig In der nachstehenden Tabelle si...

Страница 15: ...ten an da die Anzeige 9 die vom Controller abgegebene Spannung anzeigt 9 Display Zeigt die den Schalter 16 selektionierten Spannungs und Stromwerte an Abbildung der vom Controller abgegebenen Spannung...

Страница 16: ...trieb so da die Hochspannung bei einer berschreitung des Grenzwertes abgeschaltet wird und auf dem Display die Fehlermeldung Err2 erscheint 2 Bei Einschaltung liegt der abgegebene Strom unterhalb des...

Страница 17: ...ngsversorgung auch bei berschreitung des f r den Schutzbetrieb eingestellten Grenzwertes zugeschaltet werden soll mu der HV Schalter 12 auf ON gestellt werden Err 3 Allgemeine St rung im Hochspannungs...

Страница 18: ...rrait endommager s rieusement l appareillage DESCRIPTION DU CONTROLEUR Le contr leur MidiVac de la soci t Varian est un contr leur pour les pompes ioniques Cette unit peut tre pr configur e en usine s...

Страница 19: ...ns r dans un adaptateur d une hauteur de quatre unit s de rack pour viter qu il ne tombe l int rieur du rack lui m me Le panneau frontal du MidiVac n est pas con u pour supporter le poids de l unit Ne...

Страница 20: ...ation et la fonction des commandes et des diodes NOTE Certaines commandes et diodes changent en fonction de la position de l interrupteur HV ON OFF Le tableau reporte les deux significations et les de...

Страница 21: ...m e indique que l afficheur 9 affiche la tension fournie par le contr leur 9 Afficheur Visualise les valeurs des tensions et des courants s lectionn s l aide de la touche 16 Affiche la valeur de la te...

Страница 22: ...d passe la valeur de seuil et visualise sur l afficheur le message d erreur Err2 2 Lors de la mise en route le courant fourni est inf rieur la valeur de seuil pr tablie dans ce cas apr s une p riode...

Страница 23: ...ionner le mode de fonctionnement Start Porter l interrupteur HV 12 sur OFF Pour allumer la haute tension m me si le courant est sup rieur au niveau de Protect porter l interrupteur HV 12 sur ON Err 3...

Страница 24: ...is a ion pump controller The unit can be factory configured according to the customer s needs or the user can order separately the option cards relevant to the serial communication and the Set Point...

Страница 25: ...he controller The MidiVac front panel is not designed to support the unit weight Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice dust aggressive gase...

Страница 26: ...nt panel controls and indicators with relevant description and function NOTE Some controls and indicators change their function and meaning according to the position of HV ON OFF switch The table desc...

Страница 27: ...V When it lights up the display 9 shows controller output voltage 9 Display It shows the voltage or current value selected by means of the pushbutton 16 It shows the controller output voltage or the p...

Страница 28: ...Err2 message 2 When the controller is switched on the current value is less than the threshold value in this case after a settling time of about 30 seconds when the current is not controlled the contr...

Страница 29: ...ition the HV 12 switch If you want to switch on the high voltage even when the current is higher than the Protect level set to the ON position the HV 12 switch Err 3 Controller generic fault of the Hi...

Страница 30: ...positive polarity and single HV output connector Model 929 5002 set for 230 Vac negative polarity and single HV output connector Model 929 5003 set for 230 Vac positive polarity and single HV output...

Страница 31: ...the functional push buttons the LEDs indicating active operating mode and the LCD display The high voltage circuitry receives the ac voltage from the mains and converts it into an high voltage to driv...

Страница 32: ...00 Vdc 5 3000 Vdc 5 120 mA 150 W Operating Temperature Humidity 0 to 45 C 90 maximum non condensing Recorder outputs analog signals minimum recorder impedance 1 M 0 to 5 Vdc logarithmic corresponding...

Страница 33: ...e inserted into the corresponding jack Otherwise there will be an interlock fault on the control unit REMOTE I O CONNECTOR The Remote I O connector layout is shown in the following figure Remote I O C...

Страница 34: ...TECHNICAL INFORMATION 29 87 900 080 01 D Recorder Output Diagram from 0 to 5 V Recorder Output Diagram from 0 to 0 1 V...

Страница 35: ...button a fourth time stores the set values NOTE The MENU push button must be always pressed until the last step to store the new values The settings remain stored even when the controller is switched...

Страница 36: ...TECHNICAL INFORMATION 31 87 900 080 01 D VacIon Plus 500 Pressure Vs Current Diagram VacIon Plus 300 Pressure Vs Current Diagram...

Страница 37: ...TECHNICAL INFORMATION 32 87 900 080 01 D VacIon Plus 150 Pressure vs Current Diagram VacIon Plus 75 Pressure vs Current Diagram...

Страница 38: ...TECHNICAL INFORMATION 33 87 900 080 01 D VacIon Plus 55 Pressure Vs Current Diagram VacIon Plus 40 Pressure Vs Current Diagram...

Страница 39: ...TECHNICAL INFORMATION 34 87 900 080 01 D VacIon Plus 25 Pressure Vs Current Diagram VacIon Plus 20 Pressure Vs Current Diagram...

Страница 40: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 41: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 42: ...1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico...

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