FRG-700 Inverted Magnetron Pirani Gauge
29
N
WARNING
WARNING: substances detrimental to the environ-
ment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimen-
tal to the environment.
Dispose of such substances in accordance with the
relevant local regulations.
Separating the components
After disassembling the product, separate its components ac-
cording to the following criteria:
•
Contaminated components
Contaminated components (radioactive, toxic, caustic or bio-
logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
•
Other components
Such components must be separated according to their ma-
terials and recycled.
9 Literature
[1] www.varianinc.com
Instruction Manual
Inverted Magnetron Pirani Gauge FRG-700
tqna38e1
Varian Vacuum Technologies, MA 02421, USA
