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vacuum technologies

FRG-700

Inverted

Magnetron Pirani

Gauge

SHORT OPERATING
INSTRUCTIONS

Manual No. tqma48e1
Revision --
November 2008

Содержание FRG-700 series

Страница 1: ...vacuum technologies FRG 700 Inverted Magnetron Pirani Gauge SHORT OPERATING INSTRUCTIONS Manual No tqma48e1 Revision November 2008...

Страница 3: ...aced parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts After expiration of the applicable warranty period Custo...

Страница 4: ...means of transportation indicated as acceptable by Seller Seller reserves the right to reject any war ranty claim not promptly reported and any warranty claim on any item that has been altered or has...

Страница 5: ...421 USA Validity This document applies to products with the following part num bers FRG700KF25 DN 25 ISO KF FRG700CF35 DN 40 CF F The part number PN can be taken from the product nameplate If not indi...

Страница 6: ...for measuring flammable or combustible gases which react in air The gauge can be operated in connection with a VARIAN FRG Control Unit a VARIAN Turbo AG Rack Controller or with another controller Fun...

Страница 7: ...2 Technical Data 10 3 Installation 17 3 1 Vacuum Connection 17 3 2 Electrical Connection 21 4 Operation 22 4 1 Gas Type Dependence 22 4 2 Ignition Delay 22 4 3 Adjusting the Gauge 23 5 Deinstallation...

Страница 8: ...nd environ mental damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Notice 1 2 Personnel Qualifications Skilled personnel All work desc...

Страница 9: ...ll work you are going to do and consider the safety instructions in this document Before beginning to work find out whether any vacuum com ponents are contaminated Adhere to the relevant regulations a...

Страница 10: ...V decade Error signal 0 5 V no supply 9 5 V Pirani sensor de fective filament rupture Output impedance 2 10 Minimum loaded impedance 10 k short circuit proof Response time p 10 6 mbar pressure depend...

Страница 11: ...e 1 Vpp 2 Adjustment Potentiometer HV Potentiometer ATM adjustment under 10 4 mbar adjustment at atmospheric pressure Electrical connection FCC68 socket 8 poles Sensor cable 8 poles shielded Line leng...

Страница 12: ...steel stainless steel ceramic FPM 75 Mo stainless steel Ni Au W Internal volume 20 cm Pressure 10 bar absolute limited to inert gases Temperatures Operation Bakeout Pirani filament Storage 5 55 C 150...

Страница 13: ...FRG 700 Inverted Magnetron Pirani Gauge 13 Dimensions mm 18 DN 25 ISO KF DN 40 CF F 24 92 63 5 28 55 60 75 Weight FRG700KF25 FRG700CF35 700 g 980 g...

Страница 14: ...3 5 4 5 5 5 6 5 7 5 8 5 9 5 10 5 1E 02 1E 04 1E 06 1E 08 sensor error underrange overrange sensor error Pa mbar torr p 101 667U d Measurement signal U V p 10 1 667 U d U c 0 6log10 p mbar Pa Torr d 1...

Страница 15: ...ge 15 Gas Type Dependence 102 8 6 4 2 101 8 6 4 2 100 8 6 4 2 10 1 8 6 4 2 10 2 p mbar peff mbar 10 3 2 4 6 10 2 2 4 6 10 1 2 4 6 100 2 4 6 101 2 4 6 102 H2 He Ne Xe Ar Freon 12 Water vapor Air O2 CO...

Страница 16: ...10 6 10 1 mbar peff mbar 10 6 2 4 6 10 6 2 4 6 10 4 2 4 6 10 3 2 4 6 10 2 2 4 6 10 1 In the range below 10 5 mbar the pressure indication is linear For gases other than air the pressure can be determi...

Страница 17: ...lamps are opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER DANGER overpressure in...

Страница 18: ...ording to EN 61010 CF flanges fulfill this requirement For gauges with a KF flange use a conductive metallic clamping ring Caution Caution vacuum component Dirt and damages impair the function of the...

Страница 19: ...ion To keep condensates and particles from getting into the measur ing chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter If adjustment...

Страница 20: ...rted Magnetron Pirani Gauge 20 Remove the protective lid and connect the product to the vac uum system or Protective lid Clamp Seal with centering ring Seal with centering ring and filter Keep the pro...

Страница 21: ...r cable is available make one according to the following diagram Electrical connection Pin 1 Supply 15 30 VDC Pin 2 Supply common Pin 3 Signal output measuring signal Pin 4 Identification Pin 5 Signal...

Страница 22: ...es 1 10 2 mbar 4 1 Gas Type Dependence The measurement value depends on the type of gas being measured The value displayed is accurate for dry air O2 CO and N2 It can be mathematically converted for o...

Страница 23: ...nt circuit which is dominant for low pressures 1 10 3 mbar is factory calibrated By way of con trast the Pirani measurement circuit can be adjusted Any ad justment has a negligible effect on the press...

Страница 24: ...h with a cylindrical pin 3 mm adjust the HV potentiometer by means of a 1 5 mm screwdriver to 4 20 V or to 5 10 4 mbar s Vent the gauge with air or nitrogen to atmospheric pres sure and wait at least...

Страница 25: ...FRG 700 Inverted Magnetron Pirani Gauge 25 u Using the 1 5 mm screwdriver adjust the ATM potentiometer to 8 60 V or to 1 103 mbar v Turn the nameplate back to its original position it catches...

Страница 26: ...ecessary precautions when handling contaminated parts Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate m...

Страница 27: ...g a CF flange connection it can be ad vantageous to temporarily remove the electronics and the magnet unit Instruction Manual tqna48e1 6 Maintenance Troubleshooting Instruction Manual tqna48e1 If oper...

Страница 28: ...ng companies and enclose a duly com pleted declaration of contamination Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Products...

Страница 29: ...ling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be decontaminated...

Страница 30: ...lating to electromagnetic compa tibility 2004 108 EC FRG 700 Inverted Magnetron Pirani Gauge Part numbers FRG700KF25 FRG700CF35 Standards Harmonized and international national standards and specifi ca...

Страница 31: ...FRG 700 Inverted Magnetron Pirani Gauge 31 Notes...

Страница 32: ...Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 861 5437 Original English custserv varianinc com t q ma 4 8 e 1 www varianinc com...

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