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NHS-35
Diffusion Pump

Instruction Manual

Varian Vacuum Technologies

121 Hartwell Avenue

Lexington, MA 02421-3133

(781) 861-7200

(800) 8-VARIAN

Manual No. 6999-01-135
Revision G
April 2000

Содержание F1730308

Страница 1: ...NHS 35 Diffusion Pump Instruction Manual Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 3133 781 861 7200 800 8 VARIAN Manual No 6999 01 135 Revision G April 2000 ...

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Страница 3: ...2 Hong Kong Varian Technologies Asia Ltd Rm 2611 Concordia Plaza New Mandarin Plaza 1 Science Museum Rd Tsimshatsui East Kowloon Hong Kong Tel 852 26206173 Fax 852 26206338 India Varian India PVT LTD 1010 Compotent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies via Flli Varian 54 10040 Leini Torino Italy Tel 39 011 9...

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Страница 5: ... of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or its authorize...

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Страница 7: ...pproved by an industrial hygienist or chemical safety engineer Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe use and disposal of hazardous or potentially hazardous materials of any kind is the sole responsibility of the user Observe all WARNINGS and CAUTIONS to minimize the serious hazards involved It is th...

Страница 8: ... SAFELY AND EFFICIENTLY READ THEM SPECIAL OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION INSTRUCTIONS UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN POOR PERFORMANCE DAMAGE TO THE PUMP OR OTHER PROPERTY SERIOUS BODILY INJURY AND POSSIBLE DEATH USERS OF THIS EQUIPMENT SHOULD BE ALERT TO TWO LEVELS OF HAZARDS IDENTIFIED BY THE FOLLOWING SYMBOLS Designers of syst...

Страница 9: ...er flow through the Use water flow sensor and feedback to interlock on the heater main cooling coils power supply Water trapped between inlet and Provide vent or pressure relief valves for both quick cool coil outlet of quick cool coil or liquid and liquid nitrogen trap nitrogen trapped between inlet and outlet of liquid nitrogen trap Loss of ground integrity Incorporate ground fault interrupt cir...

Страница 10: ...usion pump fluids except mercury are fuels Hydrocarbon oils are more prone to oxidize and explode than synthetic silicone based oil Oxidizers can be air a strong oxidizer from a leak or can be deliberately introduced in a process or can be inadvertently admitted to the system by operator or process controller error Oxygen and other strong oxidizers are even more dangerous Certain conditions of tem...

Страница 11: ...re causes Be certain that exhaust duct materials are capable of withstanding the corrosivity temperature and pressure of exhausted products c Pressure Pumps and their components are designed for vacuum service they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities Serious accidents have been caused by intentional pressurization of v...

Страница 12: ...ges tion may produce serious effects Even absorption through the skin can result in moderate toxicity Always ensure that cleaning operations are performed in large well ventilated rooms Use of self contained breathing apparatus may be necessary depending upon the solvent type and vapor concentration in surrounding air e High Voltage Diffusion pumps operate at voltages up to 480 V high enough to ki...

Страница 13: ... large amount of liquid nitrogen is spilled in a small poorly ventilated room or equipment death from suffocation can result All diffusion pumps are typically cleaned with acetone or alcohol Acetone alcohol and most other solvents are very volatile unstable During cleaning the volatility of these cleaners may permit their gases to displace air and its life supporting oxygen which could cause death...

Страница 14: ...ow areas thus displacing air which can kill by asphyxiation Use in a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation and or ingestion may pro duce serious effects Prolonged or continued contact with the skin will result in absorption through the skin...

Страница 15: ...sonnel to avoid dropping slip ping and or overturning the pump and severely injuring personnel Check weight of equipment before lifting and do not stand under equip ment being moved WARNING _____________ Hot oils can cause serious burns Wear protective gloves and long sleeved loose fitting heat resistant garments when draining pump oil WARNING _____________ If hazardous gas vapors chemicals or com...

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Страница 17: ...dding Pump Fluid 1 14 Section II Operation 2 1 2 1 Start up Procedure 2 1 2 2 Shutdown Procedure 2 2 Section III Maintenance 3 1 3 1 General 3 1 3 2 Periodic Inspection 3 1 3 3 Cleaning 3 2 3 4 Disassembling and Reassembly the Cold Cap 3 3 3 5 Disassembling and Reassembling the Jet Assembly 3 4 3 6 Heater Replacement 3 4 3 7 Replacement Parts 3 6 Section IV Troubleshooting 4 1 4 1 Leakage 4 1 4 2 ...

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Страница 19: ... Diffusion Pump 1 6 1 4 Water Cooling Connections 1 9 1 5 240 400 440V Wiring Diagram NHS 35 Diffusion Pump 1 10 1 6 380 415V Wiring Diagram NHS 35 Diffusion Pump 1 11 1 7 480V Wiring Diagram NHS 35 Diffusion Pump 1 12 1 8 Sight Glass Assembly 1 15 3 1 Heater Element Assembly 3 3 3 2 External Fittings Cold Cap Assembly 3 5 List of Tables Table Title Page 4 1 Troubleshooting 4 2 ...

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Страница 21: ... 440 V with ASA flanges standard cold cap F1730308 F1730309 F1730326 F1730362 F1730364 with ASA flanges and halo baffle F1730318 F1730319 F1730336 F1730363 F1730365 with ISO flanges standard cold cap L5924308 L5924309 L5924326 with ISO flanges and halo baffle L5924318 L5924319 L5924336 Optimum Operating Range 6 x 10 4 torr to 5 x 10 8 torr 8 x 10 2 Pa to 7 x 10 6 Pa 8 x 10 4 mbar to 7 x 10 8 mbar ...

Страница 22: ...Installation 1 2 Figure 1 1 Speed and Throughput Curves NHS 35 Diffusion Pump ...

Страница 23: ...09 0 25 Height 72 13 inches allow additional 8 inches min for heater removal Jet Assembly 5 stage Self aligning fractionating design with four diffusion stages and one ejector stage Foreline Baffle Stacked disk and ring Cold Cap Water cooled Water Connections 3 8 FPT for pump body and quick cool coils Thermal Switches Upper set at 200 F 92 C Lower set at 600 F 315 C Materials Body Mild steel Flang...

Страница 24: ...Installation 1 4 Figure 1 2 Physical Specifications NHS 35 Diffusion Pump with ASA Flanges optional ...

Страница 25: ...d on the bottom of the pump Using a flashlight check to make sure that the ejector nozzle is opposite the foreline the pump outlet connection The jet assembly should not rotate because of an indexing pin at the bottom 1 5 CLEANING A NEW PUMP Refer to Section 3 MAINTENANCE a Read cold cap maintenance and installation data which will be found in Section III para 3 4 of this manual Remove the cold ca...

Страница 26: ...Installation 1 6 Figure 1 3 Section Drawing NHS 35 Diffusion Pump ...

Страница 27: ...n a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation and or ingestion may pro duce serious effects Prolonged or continued contact with the skin will result in absorption through the skin and moderate toxicity Always ensure that cleaning operations are...

Страница 28: ...w b Prepare inlet O ring seals by wiping them with a clean cloth Do not use solvents Use a small amount of diffusion pump oil to wet the cleaning cloth Install the O ring in the groove being careful not to damage the sealing surface with cuts nicks or scratches c Using appropriate lifting apparatus align the bolt holes of the flanges and assemble the bolts Tighten the bolts evenly to compress the ...

Страница 29: ...nected to an open drain and the feed line con trolled by a separate water 3 way valve open closed and vent to atmosphere The drain must be below the boiler level so that it is drained completely when the quick cool coil water supply is shut off and the pump is operating 1 6 4 Electrical Connections See Figure 1 5 1 6 or 1 7 Diffusion Pump Wiring Diagram a The pump heater has been designed to opera...

Страница 30: ...Installation 1 10 Figure 1 5 240 400 440V Wiring Diagram NHS 35 Diffusion Pump ...

Страница 31: ...Installation 1 11 Figure 1 6 380 415V Wiring Diagram NHS 35 Diffusion Pump ...

Страница 32: ...Installation 1 12 Figure 1 7 480V Wiring Diagram NHS 35 Diffusion Pump ...

Страница 33: ...ch should be adjusted with the pump in operation as follows a Disconnect the lead wires and place an ohmmeter across the terminals of the switch b Turn the switch adjusting screw until 1 16 of a turn either way will make the contact open or close c Turn the adjusting screw clockwise 1 4 turn Thermal switches are to be operated on AC power only and should be connected in series with the coil of the...

Страница 34: ...rs 1 7 ADDING PUMP FLUID a The recommended fluid charge for the pump is three gallons The fluid charge will gradually be depleted through use but the pump will continue to operate normally When the charge is reduced to approximately 60 of the initial amount the boiler temperature may begin to rise and under this condition the thermal switch is designed to open the heater circuit b This diffusion p...

Страница 35: ...id can also be poured in from the pump inlet or foreline d Replace the fill plug with a new Viton gasket Tighten the fill plug using moderate torque 75 inch pounds maximum Lubricate the O ring with pump fluid before installation e Once the pump is running the oil level should be in the FULL HOT operating range as indicated on the sight glass assembly f It is not recommended that Santovac 5 Diffusi...

Страница 36: ...Installation 1 16 ...

Страница 37: ...r release or admitting air to a pump with a hot boiler permit a strong oxidizer to contact the hot pump oil high above 1 micron 133 Pa inlet pressure insufficient or low level of pump fluid running pump without cooling water circulating to main water cooling coils trapping water between closed isolation valves at inlet and discharge of quick cool coils and running diffusion pump foreign matter in ...

Страница 38: ...s which have tight inlet and foreline connections it is possible to close valves to isolate the diffusion pump at inlet and discharge to air release the remainder of the system shut off the heat to the diffusion pump and stop the mechanical pump With this method the quick cool coil does not have to be used However the water flow through the pump must be maintained until the boiler cools down below...

Страница 39: ...in plugs Slight discoloration of the fluid does not affect performance b Loss of the fluid can be caused by the following 1 incorrect air admittance procedures and or admittance of excessive air or other gas to a hot pump 2 inadequate water cooling 3 continuous operation at inlet pressures above 10 3 Torr 133 Pa 4 failure to reinsert the foreline baffle in the pump assembly c When the pump is cold...

Страница 40: ...sion pumps are typically cleaned with acetone alcohol or other solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury or death Do not use near a high temperature source Ventilate work ing area with a blower and use in large well ventilated room When heated or sprayed solvents also become 4 to 5 times heavier than a...

Страница 41: ...E COLD CAP 1 To disassemble the cold cap a Remove the female coupling nut follower and the gasket located at the end of the cold cap water line on the outside of the pump b Remove the nut which secures the cold cap to the jet assembly c Lift out the cold cap 2 To reassemble the cold cap a Insert the end of the cold cap water line into the cold cap port opening at the side of the pump before settin...

Страница 42: ...n the jet base is engaged in the locating pin in the boiler Unless this is done the pump will not function properly 3 6 HEATER REPLACEMENT a Determine which heater element has failed at the junction box then disconnect the two corresponding leads from the terminal strip Pull the leads out of the terminal box then out the elbow cover plate b Remove the heater cover and insulation from the bottom of...

Страница 43: ...r leads according to the schematic diagram then run the wires around the periphery of the pump under the wire retaining clips into the conduit and up into the junction box Connect the leads to the terminal strip then replace the elbow cover plate j Replace the heater cover and insulation Figure 3 2 External Fittings Cold Cap Assembly CAUTION ________ Should it be necessary to use a new wire in the...

Страница 44: ...005 Upper thermal switch 200 F K9050006 Lower thermal switch 600 F 647335010 Heater element with leads 4000 W 240V 380V 480V L6383010 Heater element with leads 4000 W 400V L6383011 Heater element with leads 4000 W 440V F1749001 Clamping plate no crushplate in NHS 35 L6514001 Insulation for heaters Cerablanket 0 50 inch thick L9223001 Sight glass for pumps built after October 1995 K0377169 O ring k...

Страница 45: ...in the system is a result of gas load divided by pumping speed p Q S If the gas load Q exceeds the maximum throughput capability of the diffu sion pump the diffusion pump will not function and the pumping action will essentially be due to the mechanical backing pump To estimate the gas load isolate the system from all pumps after evacuation and measure the rate of pressure increase The gas load ca...

Страница 46: ... and remove cause Low heat input Check heaters Low fluid level Add fluid Malfunctioning pump assembly Check and repair or replace Improperly located jets Damaged jet system Inlet pressure surges Incorrect heater input Check and correct Fluid outgassing Condition fluid by operating the pump for a few hours Leak in system ahead of pump inlet Check and correct High chamber Forepressure too high Check...

Страница 47: ...n cleaned of all hazardous residue and that the residue remaining is of a non hazardous nature __________ Hereby certify that the product s listed below have been contaminated by the fol lowing toxic or hazardous materials RA Number Model Number Serial Number ________________________ ______________________ ______________________ ________________________________________ ____________________________...

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Страница 49: ..._____ Machine ___________________________ Original Purchase Order No _________________________ Purchase Order Date _______________________ Company Name ___________________________________________ Contact _______________________________________ Address City ______________________________________________________________ State _________________ Zip _____________ Telephone Failure Report describe in d...

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