Varian 990 dCLD II, Руководство по эксплуатации

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Model 990 dCLD II Component Leak Detector
6-4
6.2.3 SPEC TUBE LED does not Light or Stay Lit
6.2.3.1 Check the Control Unit SPEC TUBE LED
Using Diagnostic Port Interface J12
To check the SPEC TUBE LED:
1. Verify that the HIGH VAC LED on the front panel of the control unit is lit steadily.
Verify that the system thermocouple (TC) pressure is less than 10 mTorr by issuing the
?PRESSURES<CR> command.
2. Switch to the other Ion source filament by entering the 2 INIT-FILAMENT<CR> or
1 INIT-FILAMENT<CR> command.
❑
If both filaments are burnt out, replace the ion source, see Section 5.5 “Ion Source
Replacement Outside of Spectrometer Tube Overhaul” on page 5-19.
❑
If the SPEC TUBE LED is still not lit, replace the entire spectrometer tube.
3. Perform a full normal calibration. See Table 2-11 on page 2-15 or Table A-4 on
page A-8.
If the SPEC TUBE LED still won’t light or stay lit, call Varian Customer Service at
1-800-8VARIAN (1-800-882-7426).
6.2.3.2 Check the Control Unit SPEC TUBE LED
Using Optional Front Control Panel Interface
To check the SPEC TUBE LED:
1. Verify that the system thermocouple pressure is less than 10 mTorr by viewing the
system pressure parameter in the GAUGE CAL screen (see Section 4.7.3 “Gauge
Calibration” on page 4-20).
2. Switch to the other Ion source filament using the MANUAL TUNING screen,
Section 4.7.2 “Manual Tuning” on page 4-19.
❑
If both filaments are burnt out, replace the ion source, see Section 5.5 “Ion Source
Replacement Outside of Spectrometer Tube Overhaul” on page 5-19.
❑
If the SPEC TUBE LED is still not lit, replace the entire spectrometer tube.
3. Check that the parameters in the CALIBRATED LEAK SET-UP screen, Section 4.6.1
“Calibrated Leak Set-Up” on page 4-13, are set to USE INT LEAK and USE NORM CAL
and then perform a full calibration by pressing the CALIBRATE button.
If the SPEC TUBE LED won’t light or stay lit, call Varian Customer Service at
1-800-8VARIAN (1-800-882-7426).