Varian 969-9840, Инструкция по эксплуатации

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Request for Return
FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
POSITION PARAMETERS
Does not start Noise Vertical
Power: Rotational Speed:
Does not spin freely Vibrations Horizontal
Current: Inlet Pressure:
Does not reach full speed Leak Upside-down Temp 1: Foreline Pressure:
Mechanical Contact Overtemperature Other: Temp 2: Purge flow:
Cooling defective …………………. OPERATION TIME:
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
Bad feedthrough Poor vacuum Main seal leak Bellows leak
Vacuum leak High voltage problem Solenoid failure Damaged flange
Error code on display Other Damaged sealing area Other
Customer application: Customer application:
LEAK DETECTORS
INSTRUMENTS
Cannot calibrate No zero/high backround Gauge tube not working Display problem
Vacuum system unstable Cannot reach test mode Communication failure Degas not working
Failed to start Other Error code on display Other
Customer application: Customer application:
PRIMARY PUMPS
DIFFUSION PUMPS
Pump doesn’t start Noisy pump (describe) Heater failure Electrical problem
Doesn’t reach vacuum Over temperature Doesn’t reach vacuum Cooling coil damage
Pump seized Other Vacuum leak Other
Customer application: Customer application:
FAILURE DESCRIPTION
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
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