TECHNICAL INFORMATION
TECHNICAL SPECIFICATION
The following figure shows the Turbo-V550 pump outline drawing. Dimensions are in inches [mm].
Pumping speed
With CFF 8” or ISO
160:
N
2
: 550 l/s
He: 600 l/s
H
2
: 510 l/s
With CFF 6” or ISO
100:
N
2
: 350 l/s
He: 450 l/s
H
2
: 450 l/s
Compression ra-
tio
N
2
: >1 x 10
9
He: 1 x 10
7
H
2
: 2 x 10
6
Base pressure*
with recommended mechanical forepump:
< 1 x 10
-10
mbar (< 1 x 10
-10
Torr)
with recommended diaphragm forepump:
2 x 10
-9
mbar (1.5 x 10
-9
Torr)
Inlet flange
CFF 8" O.D.
ISO 160
CFF 6” O.D.
ISO 100
Foreline flange
KF 25 NW
Rotational speed
42000 RPM
Start-up time
< 3 minutes
Recommended
forepump
mechanical: Varian SD 300
diaphragm: Varian MD 60
Operating
position
Any
Cooling
requirements
Natural air convection
Forced air or water optional
Operating ambient
temperature
+ 5° C to + 35° C
Coolant water
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout
temperature
120° C at inlet flange max. (CF
flange)
80° C at inlet flange max. (ISO
flange)
Vibration level
(displacement)
<
0.01
µ
m at inlet flange
Noise level
≤
45 dB (A) at 1 meter
Input
56 Vac, three phase, 700 Hz
Lubricant permanent
lubrication
Storage
temperature
- 20° C to + 70° C
Weight kg (lbs)
ISO 100 and 160: 14 (31)
CFF 6” and 8”: 18 (39.6)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, with a Turbopump fitted with a ConFlat
flange and using the recommended pre-vacuum
pump.
26
87-900-874-01(B)