DE35-ST Operating Instructions
D292469I
73
Changing Output Configuration
To change the output configuration of the DE35 ST, press the
OUTPUT SELECT
key. This
will display two lines of the
Output Select Menu
with the cursor
>
pointing to
Quit
Menu
.
1.
Arrow down to
Output Plate Configuration
, press
YES
.
2.
With this line active, use the
+ / –
keys to scroll through the possible selections.
•
4 Trays, 2 in.
Plate 3105
•
2 trays, 2 in vacuum release
Plate 13784
•
1 Trays, 4 in.
Plate 3084
•
2 Trays, 4 in.
Plate 5089
•
2 Trays, 4 in. vacuum release
Plate 16712
•
2 Vials
Plate 9948
•
1 Substrate
Plate 13472
•
Wafer Output Type 8
Plate 5528
•
Wafer Output Type 7
Plate 12758
•
Wafer Output Type 27
Plate 13679
•
Wafer Output Type 7, 29
Plate 14460
Note:
Once the Output Plate is changed, any calibrations made for that plate will
be lost. It is recommended to use a separate process recipe for each different
Output Fixture in order to maintain calibrations when changing from one process
to the next.
Содержание Royce DE35-ST
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