DE35-ST Operating Instructions
D292469I
17
Installing the Wafer Holder
1.
Install the Wafer Holder on the Die Eject Stage (DES) with the 10-32 x 2.25
socket cap screws provided.
Figure 1.1: Max 4 in Wafer Diameter Holder
Figure 1.2: Max 6 in Wafer Diameter Holder
Figure 1.3: Max 8 in Wafer Diameter Holder
Содержание Royce DE35-ST
Страница 2: ...2 D292469I BLANK PAGE...
Страница 26: ...DE35 ST Operating Instructions D292469I 25 BLANK PAGE...
Страница 45: ...44 D292469I BLANK PAGE...
Страница 57: ...56 D292469I BLANK PAGE...
Страница 83: ...82 D292469I NOTE The Die Ejector is automatically switched off after about 1 minute...
Страница 95: ...94 D292469I Blank Page...
Страница 107: ...106 D292469I Blank Page...
Страница 130: ...DE35 ST Operating Instructions D292469I 129 Blank Page...
Страница 132: ...DE35 ST Operating Instructions D292469I 131 Blank Page...
Страница 134: ...DE35 ST Operating Instructions D292469I 133 Blank Page...